List of Semiconductor Manufacturing Equipment products

Heating multiple wafers in a clean environment of Class 1 at a maximum temperature of 450°C with high temperature stability.

• Heating device
• Annealing furnace

Dust prevention and reliable protection of wafers! Bulk transfer is also possible!

• Other semiconductor manufacturing equipment

Featuring the latest products from Tokyo Electron Kyushu, a leading company in semiconductor manufacturing equipment!

• Other semiconductor manufacturing equipment

Reduce solvent consumption and drastically cut running costs! This cleaning machine continuously regenerates and reuses cleaning solvents through distillation and separation.

• Ultrasonic Cleaner
• Other semiconductor manufacturing equipment
• Other environmental equipment

SiC semiconductor evaluation device using photoluminescence (PL) imaging method

• Semiconductor inspection/test equipment

PSPC standard compliant product. It uses a three-blade cutter, which ensures long-lasting blades and low running costs!

• Wafer processing/polishing equipment

A semi-automatic grinding machine for chamfering the outer peripheral edge of a wafer in a simple manner.

• Wafer processing/polishing equipment

This device measures the thickness of wafers fixed to ceramic plates without contact, using optical probes/sensors.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This machine is a device for measuring the thickness of φ8” silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This machine is a device that performs macro and micro inspections of φ8-inch wafers in the semiconductor manufacturing process.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

We provide high-quality layout design! High-performance package-specific automatic wiring tool.

• Semiconductor inspection/test equipment

It is a diamond-like carbon that is resistant to wear.

• Coater

This machine is a device for spin-drying workpieces.

• Other semiconductor manufacturing equipment
• Other industrial robots

It is a device for drying wafers that have been stripped and cleaned.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device for cleaning wafers that are epoxy bonded to a glass plate.

• Other semiconductor manufacturing equipment
• Wafer processing/polishing equipment
• Other industrial robots

It is a device for applying a solution by spin coating.

• Wafer processing/polishing equipment
• Other industrial robots
• spray

It is a semi-automatic device for visual inspection of 8-inch silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a fixture for visual inspection of the front and back surfaces of the quartz mask.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for visual inspection and thickness measurement of 8-inch silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device that performs macro inspection of wafers and micro inspection using a microscope.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for surface inspection of wafers after polishing.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Two-dimensional code reading device

• Other semiconductor manufacturing equipment
• Other semiconductor manufacturing equipment

This is a device for visually inspecting the edges of φ300 mm silicon wafers (chip and chipping inspection).

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Pass/Fail Judgment Device

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Manual device equipped with a safety cover and remote control mechanism.

• Other semiconductor manufacturing equipment
• Other processing machines

This is a device for heating φ300mm bonded wafers using an IR lamp.

• Other semiconductor manufacturing equipment

Bulk cassette to cassette transfer

• Other semiconductor manufacturing equipment

A device capable of performing three types of operations.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for drying 300mm wafers that have been cleaned after double-sided polishing.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for simple cleaning (brush + water) of φ300 mm silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Loading and unloading of φ150 mm and φ125 mm silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device for storing φ300 mm wafers, which have completed processing, one by one into a Teflon cassette for submersion.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device that loads wafers one by one.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device used for handling to perform P/N determination and visual inspection of silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device for inverting and transferring silicon wafers.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

Classified by resistivity and thickness categories.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device that detects the wafer edge using laser light and measures the diameter by comparing it with a calibration wafer (reference wafer).

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device that detects the edge of a wafer and measures its diameter through image processing.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device that measures the thickness of sapphire wafers and sorts them according to their thickness.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device that measures the thickness of silicon wafers and rearranges them according to their thickness.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device that measures the thickness of silicon wafers and sorts them according to their thickness.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

It is a device that measures the thickness of silicon wafers and sorts them according to their thickness.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a device used to measure the thickness of metal or resin carriers used in the silicon wafer lapping process and double-sided polishing process.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment