Analytical Equipment Product List and Ranking from 260 Manufacturers, Suppliers and Companies

[Analysis Case] Depth Profile Analysis of Dopant Elements in SiC Using SIMS

It is possible to evaluate the depth distribution of B, Al, N, P, and As in SiC with high sensitivity.

SiC is used as a power device material due to its physical properties, but unlike Si, the diffusion of dopants after thermal treatment following ion implantation is difficult. Therefore, it is necessary to control the distribution in the depth direction through multi-step ion implantation. SIMS analysis can evaluate impurity concentrations in the depth direction with high sensitivity (below ppm), making it suitable for assessing the distribution of dopant elements in SiC. It is also possible to evaluate the distribution of light elements (such as H, C, O, F, etc.). Please contact us regarding any elements you would like to evaluate.

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[Analysis Case] Evaluation of Silicon (Si) Oxide Film State

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

In depth-direction analysis of molecular information obtained by TOF-SIMS, (1) the depth resolution is good, (2) it is possible to distinguish the chemical states of inorganic materials such as oxides, nitrides, fluorides, carbides, alloys, and metals, (3) evaluation of trace states is possible, (4) monitoring of OH is possible, (5) relative comparisons between samples (film thickness, composition) are possible, and (6) image analysis allows for a visual capture of the distribution of states at the surface level of a few nanometers. We will summarize the results of natural oxide films and oxide films. Measurement method: TOF-SIMS Product field: LSI, memory Analysis purpose: evaluation of chemical bonding states, evaluation of composition distribution, thickness of corrosion layers For more details, please download the materials or contact us.

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[Analysis Case] Distribution and State Evaluation of OH on Aluminum (Al) Surface

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

The presence of OH and fluoride on the surface of aluminum electrodes is one of the causes of electrode corrosion, and investigating the state of the aluminum surface is essential for identifying the causes of defects. TOF-SIMS excels in depth resolution at the very surface and can measure depth distribution with high sensitivity while monitoring the state of inorganic substances. By evaluating the depth distribution along with OH, we discovered a phenomenon where OH increased without a change in the thickness of the oxide film. In this way, TOF-SIMS enables the evaluation of depth distribution of molecular information of inorganic substances that cannot be obtained through elemental analysis.

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[Analysis Case] Evaluation of Impurities in Metal Wires

Visualizing the in-plane distribution of impurities such as atmospheric components with a field equivalent to SEM.

SIMS analysis can be applied to various shapes of samples beyond wafers and substrates. In this case study, we will introduce an example of evaluating the distribution of impurities in a wire. The results of evaluating the impurity distribution in the depth direction from the side of the wire (Figure 2) indicate that the impurity profiles of H, O, F, S, and Cl vary in intensity with depth, suggesting that they are localized within the wire. The elemental mapping of the wire cross-section (Figure 3) confirmed the localization of impurities within the wire.

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[Analysis Case] Evaluation of Dopant and Carrier Concentration Distribution in Power Devices

Evaluation of activation rate is possible through composite analysis.

By comparing the impurity concentration distribution obtained from SIMS with the carrier concentration distribution from SRA, not only can we understand the activation state of the dopants, but the presence of unknown impurities and inherent structural issues are also suggested in areas that do not align. Using Profile Viewer, it is possible to overlay and analyze SIMS data and SRA data on your own. As an example, we will introduce a case where SIMS and SRA were performed on a commercially available diode chip, specifically on the central part of the surface and the outer edge (Figure 1) as well as the backside after the package was opened.

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[Analysis Case] SSDP-SIMS Analysis on SiC Substrates

It is possible to obtain the dopant concentration profile from the SiC substrate side.

In the SiC power MOSFET (Figure 1), the concentration distribution of the dopant element Al in the SiC beneath the gate pad was evaluated using SIMS from both the surface side and the backside (Figure 2). Regardless of the direction of analysis, the distribution beyond a depth of approximately 0.5 μm also matches well, suggesting that the spread of the Al concentration distribution reflects the actual elemental distribution rather than being measurement-induced. SSDP-SIMS analysis is possible even on hard substrates like SiC, which are difficult to process. Please feel free to consult us first.

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[Analysis Case] Evaluation of the Cleaning Effect of Organic Ingredients

You can measure the 300mm wafer as it is.

TOF-SIMS has the characteristics of simultaneously evaluating organic and inorganic materials, being capable of analyzing small areas with high sensitivity at the very surface, and allowing evaluation while still in the form of 300mm wafers, making it effective for residue investigations during cleaning processes. We will introduce an analysis case of the removal effect of organic contamination on Si surfaces. TOF-SIMS analysis was conducted on samples where amine-based organic materials were confirmed to be in extremely small quantities by XPS. Even in small areas, it is possible to measure components in such extremely small amounts.

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[Analysis Case] Composition Analysis of GaN-based LED Structures using SIMS

Capable of evaluating the composition of the main elemental components of GaN-based LEDs in the depth direction.

In general, the quantification of major elements with concentrations exceeding a certain percentage in SIMS is considered to be low. However, by using the M Cs+ (M: element of interest) detection mode with Cs+ as the primary ion, it is possible to determine the compositional distribution of major element elements in the depth direction. An example of depth compositional evaluation for Al, Ga, and In in GaN-based LED structures is presented.

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[Analysis Case] SSDP-SIMS Analysis of Mg in GaN-based LED Structure

It is possible to obtain the impurity profile in the GaN-based LED structure from the backside.

In GaN-based LEDs, it is said that the diffusion of the dopant element Mg into the active layer leads to a decrease in luminous efficiency. This document presents a case study where SIMS analysis was conducted on GaN-based LED structural samples from both the surface side and the sapphire substrate side (back side) to evaluate the depth profile of Mg concentration.

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[Analysis Case] Concentration Analysis of Harmful Components in Food

Evaluation of melamine concentration in infant formula milk powder

The large-scale pet food recall incident in 2007 and the melamine-contaminated milk powder incident in 2008 led to the detection of melamine in dairy products, livestock feed, and other foods, prompting nationwide measures to address the issue. MST has established a method for extracting and recovering melamine from food with high precision, and quantifying it using LC/MS/MS analysis. Below are the LC/MS/MS analysis results. We hope this helps alleviate your concerns about food safety.

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[Analysis Case] Depth Profile Analysis of Dopant Elements in SiC Using SIMS 2

Measurements will be taken according to the analysis conditions suited to the purpose.

This paper presents examples of evaluating the depth concentration distribution of the dopant elements N, Al, and P in commercially available SiC power MOSFETs using multiple analysis modes. Depending on the analysis objectives, it is possible to measure multiple elements simultaneously without measuring each element separately under optimal conditions. Examples are provided for cases of simultaneous multi-element measurement and measurements focused on each individual element.

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[Analysis Case] Ginseng - LC/MS/MS Analysis of Herbal Components

Simultaneous analysis of six types of ginsenosides (Rb1, Rc, Rd, Re, Rg1, Rg3)

The main component of Korean ginseng, which is widely used as a herbal medicine, is a saponin called ginsenoside. Ginsenosides are classified based on the way sugars are attached, and currently, about 30 types have been discovered. In this case, we will introduce an example of analyzing ginsenosides using LC/MS/MS. With LC/MS/MS, we confirmed that the double filtering effect of MRM allows for the separation of peaks from six structurally similar compounds, enabling simultaneous qualitative and quantitative analysis.

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[Analysis Case] LC/MS/MS Analysis of Non-Specified Antioxidant (TBHQ)

Achieving quantitative analysis of TBHQ in low concentration food with a high recovery rate.

TBHQ (tert-Butylhydroquinone) is a compound used as an antioxidant in foods in countries such as the United States and China. However, in Japan, the import and sale of foods containing TBHQ is not permitted. As a result, imported foods may contain TBHQ, and if detected domestically, measures such as voluntary recalls are taken. This document presents examples of adding 0.1 ppm of TBHQ to various foods and measuring it using LC/MS/MS. In all cases, TBHQ was analyzed with a recovery rate of over 80%. We hope this will help ensure the safety and security of imported foods and raw materials.

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[Analysis Case] Evaluation of Ti Diffusion into IGZO Film

Measurement avoiding the influence of high concentration layers using SSDP-SIMS.

IGZO films are materials that are being researched and developed as TFT materials for displays. There are concerns that the diffusion of metal elements into the IGZO film may degrade the TFT characteristics, so it is necessary to accurately measure the metal concentration within the film for evaluating the device characteristics and reliability using IGZO films. We will introduce a case where the Ti concentration in the IGZO film was evaluated from the opposite side of the metal electrode using SSDP-SIMS.

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[Analysis Case] Analysis of Microscopic Contaminants on Wafer Surface

Composition analysis of 30nm size is possible without processing.

AES analysis is a method for obtaining compositional information from the surface down to a depth of several nanometers, and it is an effective analysis for investigating the composition of contaminants and foreign substances that occur on the surface during the manufacturing process. Since it rarely detects information about the substrate or base material, it allows for a simple examination of only the abnormal areas, such as foreign substances, without preprocessing. Additionally, by conducting surface analysis, it is possible to obtain elemental distribution images. In this case study, we will present data evaluated using AES analysis regarding foreign substances present on a Si wafer.

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[Analysis Case] Fluorescent X-ray Analysis Case of Metal Materials

As a metal composition evaluation, we recommend starting with elemental screening using XRF analysis.

When conducting elemental analysis, it is possible to establish an efficient evaluation plan by first using XRF analysis to non-destructively examine the elements contained in the target before moving on to detailed analysis. In this case, we present data from XRF analysis conducted on blades for metal cutting. By performing surface analysis over a wide range on the order of millimeters, we roughly examined the distribution of metallic elements in the material and estimated the metal composition by calculating the elemental composition from the XRF point analysis results of characteristic areas. Measurement method: XRF Product field: Manufacturing equipment, parts, daily necessities Analysis purpose: Composition evaluation, identification, composition distribution evaluation, failure analysis, defect analysis For more details, please download the materials or contact us.

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[Analysis Case] Quantitative Analysis of Acrylamide in Food

Participating in the FAPAS proficiency test ensures the accuracy of analytical values.

In 2002, it was announced that acrylamide, which may have carcinogenic properties, is generated when foods high in carbohydrates are heated at temperatures above 120°C (Figure 1), attracting attention. According to the Ministry of Agriculture, Forestry and Fisheries (MAFF) website, acrylamide is found in many foods, including fried potato snacks, toast, and coffee. At MST, we participate in the proficiency testing FAPAS and confirm that the absolute value of the z-score is 2 or below (satisfactory), allowing us to accurately quantify acrylamide in food using LC/MS/MS.

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[Analysis Case] LC/MS/MS Analysis of Vitamin Supplements

Simultaneous analysis of five water-soluble vitamins (B1, B2, B6, B12, and niacin).

Water-soluble vitamins can be divided into about 10 types based on their functions in the body. For example, vitamin B1 consists of multiple components (thiamine, hydroxymethylthiazole, and its derivatives) that have the same function, and the total amount of these components determines the content. In this case, a multivitamin supplement was measured using LC/MS/MS, and qualitative analysis was conducted for each component of five types of water-soluble vitamins. By performing simultaneous analysis, it is possible to efficiently confirm the presence or absence of the target components. Analysis of other water-soluble vitamins is also possible, so please feel free to inquire.

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[Analysis Case] Analysis of Smartphone Sealants by Pyrolysis GC/MS

Analysis of UV-curable materials is possible through two-stage heating.

Using a two-stage heating method with thermal decomposition GC/MS, we analyzed the material of the sealing agent around the display of commercially available smartphones. By heating the sample at a low temperature (250°C) and measuring the gas components generated using GC/MS, we can detect residual monomers and low molecular weight additives (polymerization initiators, antioxidants). Subsequently, by heating at a high temperature (550°C), we can decompose the polymers and estimate their constituent components. This revealed that the sealing agent is made of a UV-curable material.

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[Analysis Case] Investigation of Contamination Causes on Silicon Wafers

Evaluation of contamination originating from gloves

In semiconductor device manufacturing, it is necessary to investigate what causes thin deposits that lead to defects in order to examine contamination processes. An analysis was conducted using TOF-SIMS on the deposits for which carbon was detected by EDX and quantified by XPS. When compared to the gloves used for standard samples in each process, similar trends were observed with gloves A and B. Furthermore, verification was performed by adhering the standard sample gloves to silicon wafers. As a result, it was found that they were similar to glove A. Adhering standard samples to silicon wafers for verification is an effective method.

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[Analysis Case] Ultra-high Sensitivity Measurement of Impurities in Silicon Using SIMS

We will enhance the sensitivity and evaluate the concentration distribution at the ppt level.

The detection sensitivity in SIMS analysis depends on the amount of sputtered sample per unit time. Depending on the element, significantly improved sensitivity can be achieved by limiting the impurities to one element, allowing evaluation down to ppt (parts per trillion) levels of less than 5E13 atoms/cm3, which is effective for assessing low-concentration impurities in IGBT devices and high-purity wafers. This document presents examples of ultra-high sensitivity evaluations of low-concentration impurities in silicon.

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[Analysis Case] Analysis of Additive Components in Polymer Films

Surface and depth distribution evaluation of additives in the film using GCIB.

Food wrap films may use additives to ensure stability against thermal exposure during the manufacturing process and to impart plasticity. These additives are required to remain stable under cooking conditions without changing. In this case, we present the results of an investigation using TOF-SIMS to examine whether the state of one of the additives, Irgafos168, changes (bleeds out) before and after heating. *GCIB: Gas Cluster Ion Beam

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[Analysis Case] Foreign Substance Analysis Using Micro-Sampling Tools

Identifies the components of foreign substances without the influence of the substrate or base material.

Regarding foreign substance analysis, it has traditionally been difficult to analyze using microscopic FT-IR analysis or Raman analysis due to the influence of the substrate. However, with the introduction of micro-sampling tools, it has become possible to reduce that influence. We will introduce examples of analysis for two types of foreign substances.

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[Analysis Case] Evaluation of Layer Structure and Film Thickness of Naturally Oxidized Copper (Cu) Surface Film

Depth-direction state evaluation using TOF-SIMS.

The surface of copper (Cu) metal exposed to the atmosphere is covered with a natural oxide film, and it is known that such copper surfaces can be broadly classified into the states of "Cu," "Cu2O," "CuO," and "Cu(OH)2." By conducting depth profile analysis of commercially available standard powders of "Cu2O," "CuO," and "Cu(OH)2" using TOF-SIMS, it was found that it is possible to obtain characteristic molecular ions corresponding to each state. Using these molecular ions, it became possible to evaluate the depth profile of the natural oxide film on the surface of metallic Cu. Measurement method: TOF-SIMS. Product fields: Display, LSI, Memory, Electronic components. Analysis purpose: Evaluation of chemical bonding states. For more details, please download the materials or contact us.

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[Case Study] Development of a Simultaneous Analysis Method for Pesticides

We will develop a custom analysis method for the target component!

At MST, we can accept requests for the consideration and development of analytical methods based on customer needs. In this example, we developed a simultaneous analysis method for pesticide components in water. Traditionally, pesticide analysis has been complicated due to separate pretreatment and measurement methods for each component. If multiple components can be measured at once, it can reduce sample volume and analysis costs, enabling more efficient analysis. In this example, we established a method that allows for easy confirmation of the presence of approximately 70 pesticide components down to low concentration levels by using solid-phase extraction for pretreatment and LC/MS/MS for measurement.

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[Analysis Case] Evaluation of Nitrogen Components in Solution

It is possible to analyze inorganic nitrogen by form.

Nitrogen is utilized in various forms across a wide range of fields including chemistry, materials, food, and pharmaceuticals. Nitrogen compounds consist of inorganic nitrogen compounds such as nitrates, nitrites, and ammonia, as well as organic nitrogen compounds like amino acids. In the case of samples in aqueous solution, inorganic nitrogen compounds such as nitrate ions, nitrite ions, and ammonium ions can be evaluated using ion chromatography, while organic nitrogen can be assessed using HPLC or LC/MS. Total nitrogen, which includes both inorganic and organic nitrogen compounds, can be evaluated using spectrophotometry.

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[Analysis Case] Analysis of Evolved Gases during High-Temperature Heating in Air by Pyrolysis GC/MS

It is possible to track the thermal decomposition behavior in the presence of oxygen.

The decomposition behavior of materials when heated in a vacuum or in inert gases such as nitrogen can differ from that when heated in air. Therefore, when conducting gas emission analysis, it is desirable to heat the materials in an environment that closely resembles the actual conditions to which they are exposed. In this case, a comparison of the gases emitted during the pyrolysis of polystyrene at 550°C in helium and in air was conducted. Only hydrocarbon compounds were detected in helium, whereas reaction products with oxygen, such as benzaldehyde, were also detected in air.

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[Analysis Case] Residue Analysis of Cotton Swabs with Ethanol

Analysis of stains and cleaning residues that are not visible under an optical microscope is possible using TOF-SIMS.

In general, to remove dirt, a cotton swab may be dipped in ethanol and used for wiping. When the surface of a Si wafer was wiped with a cotton swab dipped in ethanol, an analysis was conducted using TOF-SIMS to determine what was distributed on the surface. The Si wafer wiped with the cotton swab showed stains that were not visible under an optical microscope, and it was found that these were due to the cotton swab. TOF-SIMS is effective for analyzing stains that are not visible under an optical microscope and for cleaning residues.

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[Analysis Case] Evaluation of Nickel Plating Peel-off Surface by TOF-SIMS

Investigation of the causes of coating peeling and poor adhesion through TOF-SIMS analysis.

To investigate the delamination issue that occurred on the nickel plating over bronze, TOF-SIMS analysis was conducted. By forcibly delaminating the affected area and performing qualitative analysis with TOF-SIMS, siloxanes and potassium compounds (such as potassium chloride and potassium sulfate) were detected from the delamination surface. These components are believed to be the cause of the delamination.

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[Analysis Case] Evaluation of Additives in Polymer Materials Using Dissolution-Reprecipitation Method

Qualitative analysis of components using LC/MS and LC/MS/MS.

When analyzing additives used in polymer materials such as resin products, it is necessary to separate the polymer materials from the additives. We will introduce a case where a sample pre-treated using the "dissolution-reprecipitation method," which involves dissolving commercially available resin products in a solvent and then precipitating the polymer components to extract the additive components, was analyzed. The results of the LC/MS analysis indicated that a component with a high abundance (m/z=548.50) was estimated to be a type of phenolic antioxidant through LC/MS/MS analysis.

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Analytical Equipment Product List and Ranking from 260 Manufacturers, Suppliers and Companies | IPROS GMS

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