Analytical Equipment Product List and Ranking from 261 Manufacturers, Suppliers and Companies

[Analysis Case] Thermal Desorption Gas Analysis of Metal (Sn)

TDS analysis of low melting point metals

Sn is used as the main raw material for solder, which is also used in semiconductor manufacturing. The gases in the solder can cause void formation, so it is important to control the amount of encapsulated gas in the solder and its main raw material, Sn. The results of investigating the gases released by heating Sn to a temperature above its melting point using TDS analysis are shown below. By heating the sample above its melting point, it is possible to evaluate the surface-adsorbed components and the components of the encapsulated gas in the sample.

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[Analysis Case] Evaluation of "Water" in Quartz and Glass Using SIMS

Depth-direction analysis of hydrogen using 'heavy water (D2O) treatment'

We will introduce a case where the permeability of water (H2O) in glass materials was evaluated by measuring the distribution of deuterium (D). When hydrogen (H) is already present, it is difficult to distinguish whether the hydrogen is due to the influence of water. Therefore, treatment with heavy water (D2O) was performed, and the distribution of the stable isotope deuterium was measured in depth using SIMS. By examining the depth distribution of deuterium, it is possible to estimate how deep the water has penetrated.

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[Analysis Case] Degassing Evaluation of Plating Samples

Thermal Desorption Gas Analysis of Ni/Au Plating (TDS)

If the plating film contains gas, it may cause defects such as peeling, blistering, and bubbles within the film. To investigate the gas contained in the plating film, TDS, which can measure the gas released by heating the sample in a high vacuum, is effective. The results of TDS analysis on a sample with Ni/Au plating on SUS material are presented. The release of H2, HCN, H2S, and HCl from the plating film was confirmed. Additionally, quantitative values were calculated.

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[Analysis Case] Evaluation of Transdermal Absorption of Indomethacin in Three-Dimensional Cultured Human Skin

Visualization of the distribution of active ingredients applied to cultured skin using TOF-SIMS.

TOF-SIMS identifies components from the mass of molecular ions, eliminating the need for labels such as fluorescent substances, allowing for imaging without their influence. Additionally, cross-sectional imaging enables the evaluation of distribution in the depth direction. In this study, a gel formulation of indomethacin was applied to three-dimensional cultured human skin, visualizing the distribution of the permeated active ingredient. As a result, it was found that indomethacin is concentrated on the surface side of the stratum corneum. Furthermore, depth profile analysis observed a gradual penetration towards the cell layers.

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[Analysis Case] De-gassing Analysis of Hydrogen Terminal Wafers

The hydrogen in the outermost single atomic layer can be evaluated using TDS.

TDS is a method that heats the sample, ionizes the released gases, and performs mass analysis. It can analyze the mass-to-charge ratio (m/z) from 2 to 199 in high vacuum (1E-7 Pa). In this case, we will introduce an example of TDS analysis conducted on a Si chip treated with hydrogen termination. The TDS was able to capture the desorption of hydrogen from the hydrogen-terminated surface.

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[Analysis Case] Elemental Analysis of Wire Bonding Interface

By using a combination of processing, elemental analysis of the interface is possible.

AES analysis is a method for obtaining compositional information and elemental distribution at the very surface (to a depth of a few nanometers). By combining it with cross-sectional processing, similar information can also be obtained within layered structures and at structural interfaces. This allows for the evaluation of alloy layers, elemental diffusion, and segregation, making it effective for failure analysis and defect investigation of devices. Below, we present a case where a cross-section was prepared using IP processing to evaluate the state near the bonding interface of wire bonding, followed by assessment through AES analysis.

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[Analysis Case] Evaluation of Material Structure of Organic EL (OLED)

It is possible to identify components for each layer, pixel by pixel.

To improve the reliability of organic EL, which is expected to expand in demand in the future, detailed structural analysis, state analysis, and identification of degradation causes will become increasingly important. We will introduce examples of evaluating layer structures and materials using TOF-SIMS and LC/MS. With TOF-SIMS, we were able to evaluate the layer structure and the component information of each layer. We conducted analyses of the components revealed by TOF-SIMS using LC/MS and a fluorescence detector, allowing us to assess the emission wavelength and understand the structure of the components. Thus, the combination of TOF-SIMS and LC/MS enables detailed evaluations.

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[Analysis Case] Transdermal Absorption Evaluation Using Three-Dimensional Cultured Human Skin

Distribution evaluation and quantitative analysis of the same sample are possible.

In recent years, the development of alternative methods to animal testing has progressed in the efficacy and safety testing of pharmaceuticals and cosmetics, with particular attention being paid to testing methods using three-dimensional cultured human skin. In this case study, a permeation test of indomethacin was conducted using a Franz cell, and TOF-SIMS and LC/MS/MS measurements were performed on the same skin sample. LC/MS/MS was used to quantify skin concentration and skin permeation, while TOF-SIMS was used to evaluate the component distribution within the skin. Measurement methods: TOF-SIMS, LC/MS, cryo-processing, cutting Product fields: Biotechnology, pharmaceuticals, cosmetics Analysis objectives: Composition distribution evaluation, safety testing For more details, please download the materials or contact us.

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[Analysis Case] Evaluation of the Thermal Treatment Temperature Dependence of Organic Films by TDS

You can confirm the changes in degassing due to differences in the baking temperature of the sample using TDS.

TDS can evaluate the temperature dependence of the desorption of inorganic and organic gases that are released with increasing temperature. Therefore, it is effective for assessing the degassing of samples based on the baking temperature. The results of TDS analysis after baking the resist film at 50°C and 200°C are shown. It was confirmed that the degassing peaks detected up to 200°C after "baking at 50°C" were not detected after "baking at 200°C."

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[Analysis Case] Secondary Battery

Evaluation of the components distributed on the surface of a single particle of powder is possible.

We will introduce a case where a sheet coated with graphite negative electrode particles used in lithium-ion secondary batteries was analyzed using TOF-SIMS. It was confirmed that graphite and PVDF are distributed on the surface of a single powder particle. Time-of-flight secondary ion mass spectrometry (TOF-SIMS) is a method suitable for qualitative analysis and imaging of organic and inorganic substances on surfaces from the mass spectrum of secondary ions. It is effective for evaluating the distribution of minute foreign substances and stains due to its high resolution. Measurement method: TOF-SIMS Product field: Secondary batteries Analysis purpose: Composition distribution evaluation For more details, please download the materials or contact us.

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[Analysis Case] De-gassing Evaluation During Temperature Holding by TDS

You can investigate the changes in degassing intensity while maintaining the temperature.

TDS is a method for real-time detection of desorbed gases while heating the sample in high vacuum or maintaining a constant temperature. An example is shown where a SiN film on a Si substrate was held at 350°C to investigate the amount of H2 desorption. In simple heating, a desorption peak was observed around 500°C, but during the temperature hold at 350°C, the detection intensity of H2 decreased, and a desorption peak was observed upon re-heating.

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Memory
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Evaluation methods for organic compounds in clean rooms

GC/MS: Gas Chromatography-Mass Spectrometry

In clean rooms where the manufacturing of semiconductors and liquid crystals takes place, it is important to monitor not only particles but also molecular-level chemical contamination (molecular contamination). Floating molecular contaminants include acidic and basic gases, cohesive organic substances, dopants, and metals, and the analysis methods vary depending on the components. Here, we will introduce details about cohesive organic substances and the representative collection methods, "adsorbent collection" and "wafer exposure collection."

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[Analysis Case] Hair Component Analysis

It is possible to evaluate hair components according to the purpose.

TOF-SIMS allows for simultaneous elemental analysis and molecular information analysis of organic and inorganic substances, and it also enables imaging analysis, making it an effective method for analyzing the distribution and penetration of target components in samples. By combining measurement methods and processing for hair, it is possible to evaluate the surface, cross-section, and depth distribution of hair from various perspectives, allowing for component comparison and permeability assessment in hair according to specific objectives.

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[Analysis Case] Imaging Analysis of Pesticide Active Ingredients in Formulations

You can visualize the distribution of pesticide active ingredients and inorganic components in the formulation.

TOF-SIMS can identify components from the mass of molecular ions, allowing for imaging analysis without the need for labels such as fluorescent substances. Additionally, by measuring not only organic components but also inorganic components, it is possible to image not only the active ingredients of pesticides but also the minerals mixed into the formulations. In this study, we visualized the active ingredients of pesticides and inorganic components in two types of formulations with different mixing ratios. In formulation A (high mixing ratio), the active ingredient was widely distributed throughout the formulation, whereas in formulation B (low mixing ratio), the active ingredient was localized.

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Chemicals
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[Analysis Case] Evaluation of Organic Component Desorption in a Vacuum

The temperature dependence evaluation of the desorption of specific organic components is possible through composite analysis.

TDS (Thermal Desorption Gas Analysis) is a method that allows for the confirmation of desorbed components and desorption temperatures while heating a sample in a vacuum (1E-7 Pa). Furthermore, by combining the results of TDS with GC/MS (Gas Chromatography-Mass Spectrometry), which can identify organic substances, it is possible to evaluate the desorption temperatures of specific desorbed components in a vacuum. Below, we present an example of a combined analysis of TDS and GC/MS conducted on graphene.

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Secondary Cells/Batteries
LCD display
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[Analysis Case] Degradation Analysis of Liquid Crystal Displays

We will comprehensively evaluate liquid crystals, alignment films, sealing materials, TFTs, and more.

Understanding the degradation mechanism of liquid crystal display panels is an essential theme for extending the lifespan of the panels. Among the degradation symptoms, a decrease in brightness can be attributed to various factors, including liquid crystals, alignment films, sealing materials, and TFTs. A comprehensive analysis will be conducted, incorporating surface, structure, composition, and computational science. By capturing the slight differences between good and defective products and conducting a comprehensive evaluation, we can elucidate the degradation mechanism of liquid crystal displays.

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[Analysis Case] Component Analysis of Water Repellent Areas

TOF-SIMS enables wide-area imaging evaluation of multiple components.

To investigate the causes of defects such as poor adhesion, it is important to gain insights into the surfaces of wafers and devices. In this instance, hydrophobic areas were observed on a silicon wafer, prompting wide-area imaging using TOF-SIMS. As a result, components estimated to be silicone oil, CF-based grease, and paraffin oil were identified from the hydrophobic areas. TOF-SIMS typically has a measurement field of view up to 500μm square, but by moving the stage during measurement, it is possible to evaluate wide-area distributions. Measurement method: TOF-SIMS Product fields: Devices, Displays, Electronic Components, Manufacturing Equipment Analysis objectives: Qualitative, Imaging, Composition Distribution Evaluation For more details, please download the materials or contact us.

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[Case Study] Quality Control through Surface Analysis

The surface adhesion components (such as polydimethylsiloxane) can be evaluated using TOF-SIMS.

TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) is a method that can sensitively evaluate organic and inorganic substances on the very surface, and it can be used as an analytical tool for various quality control processes of products. For example, it can be used for regular checks of surface contaminants during product storage, investigating the causes when defects such as peeling or discoloration occur in products, and analyzing changes in key components before and after altering manufacturing conditions. This document presents an example of comparing the surfaces of silicon wafers stored under different environments, focusing on the representative contaminant polydimethylsiloxane (PDMS). Measurement method: TOF-SIMS Product fields: Electronic components, manufacturing equipment, parts, and others (general electronics) Analysis purposes: Surface analysis, evaluation of chemical bonding states, failure analysis, defect analysis, and others (contamination assessment, quality control) For more details, please download the document or contact us.

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Mass array method: A gene analysis method using mass spectrometry.

Genetic analysis is a method that reads the nucleotide sequences of DNA to investigate gene mutations and functions.

In this method, the differences in the mass of bases are analyzed using MALDI-TOF-MS to determine the DNA base sequence. This allows for the detection of SNPs (single nucleotide polymorphisms), INDELs (insertions/deletions), CNVs (copy number variations), and more. It is characterized by the ability to analyze a large number of samples and detect a wide range of genes at once. - Multiplex PCR and MALDI-TOF-MS enable simultaneous analysis of up to 40 mutation sites. - Mass spectrometry specialized for the detection of bases (A/T/G/C) is possible. - A variety of analytical tools are available that have been pre-designed to detect target genes based on specific purposes. - Custom designs for analytical tools are also possible.

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MST [Chitose Sales Office] OPEN!

We aim to further improve our services for customers in the Hokkaido area, based at the Chitose Sales Office.

We will open the Chitose Sales Office, the first in the Hokkaido area as MST. Based in the Chitose Sales Office, we aim to further improve our services for customers in the Hokkaido area. We will also achieve satisfactory quality and delivery times through close collaboration with our Tokyo headquarters (lab). Please look forward to it! Opening date: Thursday, April 11, 2024 Address: Room 160, Chitose Arcadia Plaza, 1-3-1 Kashiwadai Minami, Chitose City, Hokkaido *Please send samples to the headquarters located in Setagaya, Tokyo. Headquarters address: 1-18-6 Kitami, Setagaya, Tokyo Phone number: 090-4001-1578 (Contact: Yanagimachi)

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[Analysis Case] Impurity Analysis of FeCoNi Alloy

It is possible to simultaneously analyze 77 elements using GDMS.

When impurities are mixed into metallic materials, depending on the combination of elements, it can affect the reduction of toughness and corrosion resistance. Therefore, it is important to understand the amount of impurities in metallic materials for quality control. GDMS can simultaneously analyze 77 elements without standard samples, making it effective for impurity analysis of samples with unknown contained elements, regardless of the matrix. This document presents a case study of impurity analysis of FeCoNi alloys using GDMS. Measurement method: GDMS Product field: Manufacturing equipment and parts Analysis purpose: Trace concentration evaluation For more details, please download the document or contact us.

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[FIB-MS] Focused Ion Beam Mass Spectrometry

This is a method that allows simultaneous shape observation and elemental imaging of small areas using a FIB and a TOF mass spectrometer mounted on an SEM device.

? Surface analysis of solid materials is possible ? Light elements such as Li, which are difficult to evaluate with EDX, can be assessed ? By using Ga ions as primary ions, evaluation can be performed with high surface resolution (on the order of tens of nm) ? The detection limit is as low as a few ppm (depending on the element), making it suitable for trace impurity element analysis compared to EDX ? Measurements can be conducted without atmospheric exposure by using a dedicated holder ? Since it is mounted on a SEM device, morphological observation and elemental analysis can be performed within the same chamber

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SSDP-SIM

SSDP： Substrate Side Depth Profile

In secondary ion mass spectrometry (SIMS), due to phenomena such as surface roughness, the knock-on effect where atoms present on the surface are pushed inward by ion irradiation, and crater bottom roughness, it may not be possible to obtain sharp elemental distributions. To address this issue, the SSDP method (Back-Side SIMS) involves performing SIMS analysis from the substrate side (the back side) after thinning the sample. This technique allows for a more accurate evaluation of elemental distribution without being affected by the sample shape or measurement conditions.

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Selection of Ionization Methods for TG-DTA-MS: EI Method and PI Method

TG-DTA-MS Thermogravimetric Differential Thermal Mass Spectrometry

EI method: It is capable of detecting both inorganic and organic compounds, making it suitable for initial qualitative analysis. PI method: It allows detection while maintaining the molecular structure through soft ionization.

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[Analysis Case] Evaluation of Component Distribution in Skin Cross-Section

It is possible to visualize molecular information of organic and inorganic substances.

We created skin tissue samples and evaluated the distribution of biogenic components in freeze-dried samples using TOF-SIMS. Since TOF-SIMS identifies components based on the mass of molecular ions, it does not require labels such as fluorescent substances, allowing for the evaluation of distribution without the influence of labeled materials. The mapping results confirmed that arginine, a natural moisturizing factor (NMF), and cholesterol, which retains moisture as an intercellular lipid, are localized in the stratum corneum. This method is also effective for assessing the permeation state during drug application.

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[Analysis Case] Evaluation of the Component 18-MEA on Hair Surface

It is possible to evaluate 18-MEA, a component of the hair surface, using TOF-SIMS.

The surface of the hair cuticle is covered with a lipid called 18-MEA (18-methyl eicosanoic acid). 18-MEA is said to be the source of hair shine and smoothness, and when it decreases due to UV rays or hair coloring, the cuticle becomes more susceptible to damage. In this case, we will present the results of evaluating the differences in 18-MEA on the surfaces of healthy hair (hair near the root that has not been treated with hair color) and damaged hair (hair that has been treated with hair color) using TOF-SIMS.

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[Analysis Case] Analysis of α-Alumina (α-Al2O3) by TDS

Thermal desorption gas analysis of ceramics

Thermally stable α-alumina is used in a wide range of applications, including heat-resistant materials, semiconductor packages, and components of semiconductor manufacturing equipment. Among these, dense α-alumina is also used as a material for vacuum devices. However, the gases generated when such materials are heated can adversely affect products and equipment, making it important to understand the outgassing from these materials. In this report, we present a case study comparing the outgassing amounts of porous and dense α-alumina using TDS analysis (temperature-programmed desorption gas analysis).

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[Analysis Case] XPS Analysis of Metal Pipe Inner Wall Using Combined Cutting Processing

We provide one-stop solutions from sample cutting processing to investigating the causes of discoloration and corrosion.

The inner walls of metal pipes, such as SUS, used in various fields can discolor and corrode due to reactions with incoming gases and liquids, leading to a decline in equipment functionality. Understanding the locations prone to discoloration and corrosion, as well as their causes, is an important issue in equipment maintenance. At MST, we provide a comprehensive evaluation from sample cutting to analysis. This document presents a case study of XPS analysis conducted on the inner walls of SUS pipes used in vacuum equipment, highlighting both normal and discolored areas.

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[Analysis Case] Evaluation of Metal Impurities in the Metal Film and Interface of the Device

Impurities in films and interfaces such as plating can be evaluated using TOF-SIMS.

Impurities from components of the film formation device, target materials, and plating solutions can contaminate the device and have adverse effects, making the qualitative assessment of impurities on surfaces, within films, and at interfaces important. TOF-SIMS can sensitively evaluate unknown elements present on surfaces, within films, and at interfaces in a single measurement due to the following three characteristics: 1. For metallic elements, ions from m/z 1 to 800 can be detected simultaneously in one measurement. 2. Detection sensitivity of a few ppm can be achieved (varies depending on materials and ions). 3. The use of a sputter gun allows for the evaluation of depth distribution.

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Wafer
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Other semiconductors
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[Analysis Case] Qualitative Analysis of Fluorinated Gases

Qualitative analysis of specific freons (CFC/HCFC) and alternative freons (HFC) is possible.

Freon gases are utilized in various applications such as refrigerants, foaming agents, semiconductors, and cleaning agents for precision parts due to their chemically stable nature and minimal impact on human health. On the other hand, they are substances that contribute to ozone layer depletion and global warming, which is why they are regulated by law. In this case, Freon gases were analyzed using GC/MS, and the separation analysis of CF4, which has low polarity and is difficult to separate among PFCs, was conducted. By using GC/MS, it is possible to qualitatively analyze specific Freons such as CFCs, HCFCs, and alternative Freons like HFCs and PFCs.

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Analytical Equipment Product List and Ranking from 261 Manufacturers, Suppliers and Companies | IPROS GMS

Analytical Equipment Manufacturer, Suppliers and Company Rankings

Analytical Equipment Product ranking