Analytical Equipment Product List and Ranking from 260 Manufacturers, Suppliers and Companies

SIMS (Secondary Ion Mass Spectrometry)

This is a method for qualitative and quantitative analysis of components contained in a sample by detecting secondary ions and measuring the detection amount at each mass.

When ions are incident on the sample surface, various particles such as electrons, neutral particles, and ions are emitted from the sample surface. SIMS is a technique that detects these ions and measures the detection quantity at each mass to perform qualitative and quantitative analysis of the components contained in the sample. - High sensitivity (ppb to ppm) - Analysis of all elements from H to U is possible - Wide detection concentration range (from major component elements to trace impurities) - Quantitative analysis using standard samples is possible - Depth direction analysis is possible - Evaluation with depth direction resolution of a few to several tens of nm is possible - Measurement of micro-regions up to a few micrometers in size is possible - Isotope analysis is possible - Destructive analysis

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[TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry

This is a method for structural analysis of the sample surface. Due to its sensitivity to the surface compared to other analytical devices, it is suitable for identifying organic contaminants on the very surface.

This is a method for structural analysis of sample surfaces. It is suitable for identifying organic contamination on the very surface due to its sensitivity compared to other analytical devices. Using a sputter ion source, it is possible to analyze the distribution of inorganic and organic materials in the depth direction. - Structural analysis and identification of organic and inorganic compounds are possible. - Coordination data from foreign substance inspection devices can be linked. - Qualitative analysis is possible from micron-order microforeign substances to several centimeters. - It is possible to analyze the very surface with high sensitivity. - Image analysis is possible. - Qualitative analysis of depth direction analysis is possible.

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Inductively Coupled Plasma Mass Spectrometry (ICP-MS)

This is a method for inorganic element analysis using inductively coupled plasma (ICP) as the excitation source.

ICP-MS allows for relatively easy preparation of standard samples that are difficult to produce for solid analysis, as it analyzes solutions. Therefore, it is frequently used for accurately quantifying trace inorganic elements in solutions. - It can detect the lowest concentrations (ppt or sub-ppt levels) due to its high sensitivity and low background, making it the most effective instrument for inorganic element analysis. (*: ppt: 10^-12 g/g) - It allows for flexible preparation of standard samples (standard solutions) that serve as a reference for quantitative analysis, resulting in lower uncertainty in the results. - It enables qualitative analysis by measuring many elements of the periodic table simultaneously. Additionally, it has a wide dynamic range, allowing for simultaneous analysis of major and trace components.

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[Analysis Case] Evaluation of the Depth Distribution of B near the Si Surface using SIMS

High-precision B profile analysis through sample cooling.

The concentration distribution of boron (B) in silicon (Si), which significantly affects the characteristics of device design, can be evaluated with high sensitivity and high depth resolution through SIMS analysis. However, it has been found that under general analysis conditions, distortions occur in the concentration distribution of B due to measurement-related factors. In MST, it has been confirmed that sample cooling is effective for correcting these distortions, enabling a more accurate evaluation of the concentration distribution.

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[Analysis Case] LC/MS Analysis of Ergothioneine

Evaluation of the yield and purification level of amino acids derived from natural sources.

Ergothioneine, an amino acid homologue found abundantly in edible mushrooms of the Pleurotaceae family, is gaining attention in the fields of food, medicine, and beauty as a natural substance with high antioxidant properties. Recently, chemical synthesis techniques have also been established, but there is still a need for the development of high-efficiency separation and purification techniques from natural food resources, and it is required to accurately measure the yield and evaluate the level of purification.

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[Analysis Case] Evaluation of Metal Distribution within Hair

Evaluation of component distribution in hair cross-sections using TOF-SIMS analysis.

Measuring hair and obtaining the distribution of components within it is effective when investigating the effects of hair care and dyeing. We will introduce a case where gray and black hair were collected from the same individual and the internal component distribution was evaluated. A cross-section of the hair was created, and TOF-SIMS measurements were conducted. TOF-SIMS can provide distribution information on inorganic substances such as metals and organic molecules. This time, we focused on measuring the distribution of metals in the hair cross-section.

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[Analysis Case] Identification and Estimation of Foreign Substances and Contaminants in LCD Panels

We capture foreign substances and dirt from microns to centimeter order as an image.

In the mass production of LCD panels, it is necessary to remove defects (foreign substances and dirt). Therefore, investigating the causes of these foreign substances and dirt is effective for improving yield. Here, we introduce a case study evaluating foreign substances and dirt on LCD panels. TOF-SIMS can capture cleaning residues in the order of micrometers to centimeters as images. Additionally, by comparing with standard spectra, it is possible to estimate the components.

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[Analysis Case] Investigation of the Causes of Surface Stains and Water Repellency on Parts Using TOF-SIMS

Properly sampling and measuring surface contamination even on large parts that cannot be cut.

It was found that there are water-repellent stains on the surface of the aluminum material. The stained area was adhered to tape (transferred), and analysis was conducted using TOFSIMS. Fragments identical to those from the stained area on the aluminum surface were detected from the "tape surface where the stained area was transferred," suggesting that the substance causing the stain has been transferred to the tape. This method of transferring and collecting the causative substance onto tape is effective for parts that cannot be cut.

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[Analysis Case] Identification of Fluorine-based Lubricants and Polymers using TOF-SIMS

Identify the contaminating components and estimate the contamination occurrence process.

There are various types of fluorine-based compounds. During the investigation of contamination sources, performing qualitative analysis of the types of fluorine compounds allows us to examine the processes that caused the contamination. Therefore, we conducted an analysis using surface-sensitive TOF-SIMS to determine what is adhering to areas with good water repellency. By utilizing the fact that the fragment patterns of the fluorine-based oils used in each process differ by type, we performed a fingerprint matching and found that a substance corresponding to the oil from process B was adhering.

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[Analysis Case] Evaluation of Adhesive Tape Residue

We will identify the surface adsorbate components using TOF-SIMS.

Residue from adhesive tape can cause poor adhesion and peeling during the manufacturing process. When residue is suspected to be the cause of defects, TOF-SIMS, which can analyze the composition and distribution of surface contaminants, is effective. We will present a case where the surface of a silicon wafer was adhered with adhesive tape and measured with TOF-SIMS after peeling it off.

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[Analysis Case] Depth Direction Analysis of TFT Wiring Intersection Using SSDP-SIMS

Analysis using SSDP is also possible for microdomains and glass substrates.

An example is shown where secondary ion mass spectrometry (SIMS) was used to analyze the intersection (4μm×10μm) of the data signal wiring and gate electrode wiring of a commercially available TFT LCD from the substrate side (SSDP-SIMS). By measuring from the substrate side (SSDP-SIMS), it becomes possible to provide data free from the influence of high-concentration layers or metal films on the surface side.

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[Analysis Case] Component Analysis of Lithium-Ion Secondary Battery Binders

Identification of organic components by pyrolysis GC/MS.

Lithium-ion secondary batteries use a wide variety of materials, ranging from metals and inorganic substances to organic materials, and from solids to liquids. The physical properties and combinations of each material significantly reflect the characteristics and reliability of the device, making accurate analysis and evaluation of the materials necessary. In this study, the anode of the lithium-ion secondary battery was measured using pyrolysis GC/MS (pyro-GC/MS), and it was found that the binder material is based on SBR (styrene-butadiene latex). Additionally, decomposition products of the binder and aromatic substances presumed to be reaction products were also detected.

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[Analysis Case] Evaluation of Degradation of Lithium-Ion Battery Anode Surface

Measurements and observations will be conducted from pre-treatment to measurement without atmospheric exposure.

As a result of evaluating the surface of lithium-ion secondary battery anodes, which showed a decrease in capacity, without exposure to the atmosphere, a coating layer containing approximately 100-200 nm of Co was confirmed, and it was found that Co is in a metallic state. Applicable observation methods: FIB-TEM, SEM Surface analysis: SIMS, XPS, AES, TOF-SIMS Other structural evaluations are also possible. Measurement methods: SEM, FIB, TEM, XPS, EDX Product field: Secondary batteries Analysis objectives: Evaluation of chemical bonding states, shape evaluation, composition evaluation, identification For more details, please download the materials or contact us.

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[Analysis Case] Comprehensive Evaluation of Lighting Emitting Devices

We will conduct analysis of various materials, including the disassembly of LEDs, phosphors, and LED chips.

We will disassemble commercially available LED lighting, conduct composition analysis of each material, identify defects, perform physical analysis, and analyze impurities for energy-saving key devices.

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[Analysis Case] Evaluation of Solid Polymer Electrolyte Membrane for Fuel Cells

Molecular structure evaluation by TOF-SIMS and chemical state evaluation by XPS.

Solid polymer fuel cells (PEFC) are attracting attention for their high output at room temperature, making them suitable for automotive applications, home cogeneration, and mobile use. This time, we will introduce examples of molecular structure evaluation using TOF-SIMS, bonding state analysis using XPS, and quantitative evaluation of solid polymer electrolyte membranes. Additionally, MST allows for comprehensive evaluation of battery materials using various analytical methods under controlled atmospheric conditions.

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[Analysis Case] Component Analysis of Hair Roots

Visualization of biological components such as cholesterol and fatty acids using TOF-SIMS.

The hair roots of human hair (both shed hair and pulled hair) were pressed against a Si wafer, and imaging measurements (surface analysis) were conducted on the transferred components. Shed hair shows a strong tendency for ■K and ●phospholipids to be present only at the tip of the hair root. Additionally, it is believed that the entire hair root contains ■CnHmCOOH (n=17–31) fatty acids (derived from human sebum), ●amide components derived from keratin plugs, ◆nitrogen-containing organic acids with a mass of 500–700, and ◆organic substances with a mass around 800 that are aggregated. However, the organic substances containing two COOH groups derived from human sebum, which are observed in pulled hair, show a weak tendency.

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[Analysis Case] Observation of Pigment and Dye Dispersion

Micron-order imaging measurement using TOF-SIMS.

We investigated the distribution of the blue pigment "Cu phthalocyanine" dispersed on the polyethylene surface. TOF-SIMS analysis allows us to capture the distribution of organic materials with a pigment size of 1μm.

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[Analysis Case] Evaluation of the Interface between the Alq3 Layer and the Emission Layer of Organic EL Devices

Degradation assessment by depth profiling using TOF-SIMS.

As a result of performing pre-treatment to depth direction analysis without exposing the organic layer of the degraded brightness element to the atmosphere, diffusion was observed at the Alq3/emission layer interface in the samples after applying voltage. Similar results were obtained from both Slope Mapping (Figure 1) and depth direction analysis using ion sputtering (Figure 2).

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[Analysis Case] Comprehensive Evaluation of Lithium-Ion Secondary Battery Materials

We will conduct an evaluation that combines various methods to solve the problem.

Lithium-ion secondary batteries have excellent characteristics among secondary batteries and are widely used as power sources for various portable devices. However, there are still various challenges remaining, such as increasing output, capacity, longevity, and reliability. Comprehensive evaluation of battery materials is possible using various analytical methods.

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[Analysis Case] Contamination Assessment of Si Wafer Bevel Area

It is possible to evaluate both metal components and organic components simultaneously.

In semiconductor device manufacturing, from the perspective of improving yield, it is necessary to enhance the cleanliness of the backside of the wafer and to remove substances that remain on the bevel area of the wafer. In this study, we conducted TOF-SIMS analysis of the bevel inclined surface to evaluate the distribution of contamination (Figure 2). Additionally, by comparing the mass spectra of the adhered substances with those of the normal area and the contamination source, we found that the adhered substances matched the metal (Cr) and organic components of the contamination source. TOF-SIMS can capture the contamination generation process in the bevel area (edge and inclined surface).

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[Analysis Case] Component Analysis of Organic EL Devices

TOF-SIMS component analysis of slope-polished organic multilayer structure samples.

We conducted TOF-SIMS analysis on an organic EL device (Figure 1) estimated to be formed from four layers of different organic compounds (or organometallic complexes) using XPS. For multilayer structural samples, depth profiling analysis using sputtering is also performed; however, in this case, we created a slope surface to expose each layer without breaking the bonds of the constituent components. Molecular weight-related ions and fragment ions presumed to be Alq3, NPD, and CuPc were obtained, confirming that TOF-SIMS analysis of the slope surface is an effective method for component analysis of organic multilayer films.

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[Analysis Case] Evaluation of Ultra-Shallow Implant Profiles by SIMS

Evaluation of dopant distribution and junctions is possible even in extremely shallow regions.

The miniaturization of devices has increased the need for evaluating the depth distribution of impurities in extremely shallow regions. To conduct an accurate assessment, SIMS analysis using a primary ion beam with lower energy (below 1 keV) is required. Figure 1 shows examples of measurements of Si wafers implanted with BF2+ 1 keV, P+ 1 keV, and As+ 1 keV, using a primary ion beam energy of 250 eV to 300 eV.

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[Analysis Case] High-Precision Analysis of Ultra-Shallow Dopant Distribution Using SIMS

Can be evaluated with high reproducibility.

Due to the miniaturization of devices, it is necessary to evaluate the depth distribution of impurities in extremely shallow regions. To perform an accurate evaluation, SIMS analysis using a primary ion beam with lower energy (below 1 keV) is required. In this study, the relative standard deviation of the surface density of B calculated from six measurements conducted over multiple days using a 1 keV oxygen ion beam on Si wafers implanted with B+ at low energy was found to be less than 3%, demonstrating that high reproducibility can be achieved in the evaluation of extremely shallow impurity distributions, similar to conventional SIMS analysis.

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[Analysis Case] Evaluation of the Depth Direction State of Stainless Steel Passive Film

Waveform analysis and evaluation of the depth distribution of bonding states by Ar sputtering.

XPS allows for the evaluation of bonding states of oxidized components (components bonded with oxygen) and metallic components (components bonded with metals). Additionally, by using argon ion sputtering, it is also possible to evaluate bonding states in the depth direction. * Regarding the passive film on the surface of stainless steel (with a thickness of several tens of nm to several hundred nm), the results of the above measurements showed that (1) there are many Fe oxidized components on the surface side, (2) Cr oxidized components exist below the Fe oxide layer, and (3) Ni oxidized components are almost nonexistent. * Since it includes changes in bonding states due to sputtering, the evaluation is primarily based on relative comparisons.

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How to send a sample

I have summarized how to send samples for analysis to MST.

If you have any questions, please feel free to contact us. ◆ Other Notes - Please provide instructions so that the measurement surface is clear. - Please be careful not to touch the sample surface (measurement surface). - If the sample is at risk of deterioration due to exposure to the atmosphere, please consult us separately. - For fragile samples, please ship them in a cardboard box with cushioning material.

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[TDS] Thermal Desorption Gas Analysis Method

A mass spectrometry method that allows monitoring of gases generated by vacuum heating/warming at different temperatures, with high sensitivity for detecting hydrogen and water.

TDS is a mass spectrometry method that allows monitoring of gases generated by vacuum heating/ramping at different temperatures. The TDS spectrum represents temperature on the horizontal axis and ion intensity on the vertical axis. This enables comparison of the amount of gas released and the desorption temperatures. Additionally, due to the vacuum environment, hydrogen and water can be analyzed with high sensitivity. - It is possible to understand the relationship between the gases desorbed from the sample, the pressure, and the temperature at which they are generated. - Since only the sample can be heated, the background is low, allowing for high-sensitivity analysis of low-mass molecules such as hydrogen, water, oxygen, and nitrogen. - It is possible to estimate the composition of the gases generated from the sample and perform quantitative analysis (counting the number of molecules).

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[XRF] X-ray fluorescence analysis method

This is a method for conducting elemental analysis and compositional analysis by detecting fluorescent X-rays generated by irradiating with X-rays and spectrally analyzing them using energy or a spectroscopic crystal.

X-ray fluorescence analysis (XRF) is a method that detects fluorescent X-rays generated by irradiated X-rays and performs elemental and compositional analysis by spectrally analyzing the energy and using a spectroscopic crystal. - The entire energy measurement range (from Na to U) can be measured simultaneously in a short time. - Suitable for the analysis of unknown samples. - Non-destructive analysis. - No pre-treatment is required except for special samples, allowing for easy analysis in the atmosphere. - Elemental analysis of large samples that cannot be moved is possible with a handheld device.

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[Analysis Case] Condition Assessment of Highly Degraded Organic Materials

It is possible to accurately evaluate materials through sampling under controlled atmospheric conditions.

Organic EL has advantages such as high brightness, high-resolution color, and thinness due to its self-emission principle, and it is expected to be one of the next-generation devices. Accurate analysis and evaluation of materials are crucial for improving characteristics, extending lifespan, and enhancing reliability; however, caution is required in handling them due to the use of highly reactive materials. A comparison between samples exposed to the atmosphere and those handled under a high-purity argon atmosphere confirms that oxidation (such as molecular ions +O, +OH, etc.) observed in atmospheric exposure is suppressed when handled in a high-purity argon environment.

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[Analysis Case] Impurity Evaluation of Crystalline Si Solar Cells

Trace analysis of metallic elements and atmospheric component elements.

We propose a method for evaluating the control of impurity levels required in each process from substrate growth to cell formation of crystalline silicon solar cells, using high-sensitivity analysis for element concentration measurement. Metal elements can be measured at concentrations below ppb, and atmospheric component elements containing hydrogen can be measured at concentrations below ppm. Measurement methods: SIMS, ICP-MS, etching, disassembly Product field: Solar cells Analysis purpose: Trace concentration evaluation, product investigation For more details, please download the materials or contact us.

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[Analysis Case] Investigation of Causes of Peeling in Plating and Coating

Identification of contamination sources on the cleavage surface using TOF-SIMS.

When delamination occurs, it is important to identify the components that have worsened the adhesion at the interface. By using a peeling process to physically delaminate at the interface of interest and measuring the components present on that surface with TOF-SIMS, it is possible to investigate the cause of delamination. TOF-SIMS detects secondary ions that are ionized while maintaining the structure of organic materials, allowing us to obtain information about the origin of the components present at the delamination surface, making it effective for investigating the causes of delamination and the process. Measurement methods: TOF-SIMS, peeling, disassembly Product fields: LSI, memory, manufacturing equipment, components Analysis purposes: Evaluation of chemical bonding states, failure analysis, defect analysis For more details, please download the materials or contact us.

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Analytical Equipment Product List and Ranking from 260 Manufacturers, Suppliers and Companies | IPROS GMS

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