Flexibly responding to a wide variety of needs! Numerous achievements in the field of cleaning machines for cleanroom use!
The "Sheet-type Cleaning Device" is a large-scale cleaning device compatible with sizes ranging from 1.5 inches to 10 generations.
With the increase in size, new issues (cleaning and drying of gap areas) have become key challenges. By combining cleaning units (brushes, HPMJ, two-fluid systems, etc.) and utilizing air knives, spot knives, and IR for drying, we achieve superior cleaning and drying performance.
Additionally, it is an excellent device in terms of maintenance and cost performance. It is suitable for LCD panels for PCs and TVs, automotive glass, solar panels, and more.
【Main Cleaning Methods】
■ Contact Type: Roll Brushes, Disc Brushes
■ Non-contact Type: Medium Pressure Shower, High Pressure Shower, Two-fluid Shower,
US (Low Frequency, Medium Frequency), MS (High Frequency)
■ Drying: Ultraviolet Irradiation (Excimer, Low Pressure Mercury), Plasma Irradiation, Ultrasonic
For more details, please refer to the catalog or feel free to contact us.