Submicron feedback stage controller FC-111
Positioning with 100nm resolution! Reproducibility is achieved with position feedback from a linear encoder!
It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Therefore, it is used in precision inspections and research where reproducibility is required. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
- Company:シグマ光機
- Price:100,000 yen-500,000 yen