Metal Ion Removal Filter "3M MIP Series" <Materials Provided>
Reduces metal ions in the chemical solution to 50 ppt level in a single pass with high metal removal performance. Adopts a depth filter structure.
The "3M MIP Series" is a metal ion removal filter capable of reducing metal ions in chemical solutions used in semiconductor manufacturing processes to levels below 50 ppt. Due to its large ion exchange capacity, it allows for effective removal in a single pass, and it also has low metal elution, enabling a reduction in pre-treatment time and simplification of operations. It offers a lineup of sizes ranging from φ47mm disks for screening evaluation to 20-inch cartridges, allowing for easy scale-up from small volume chemical tests. It can be easily added to existing processes and contributes to the reduction of various metal species with two types available. 【Product Lineup】 ◎ 47mm Disk Type (for screening) ◎ 2-inch Cartridge Type (for scale-up evaluation and small volume filtration) ◎ 10-inch/20-inch Cartridge Type (for mass production scale) The filter media is available in ion exchange type (SCP) and chelate type (APP). *You can view documents containing product details and test data, as well as English version materials related to this product's research results, from the "PDF Download" section.