Inline filter for semiconductor process gases
Short delivery time available! Inline gas filter for high purity gas!
Developed for semiconductor manufacturing process gases. Achieves excellent removal efficiency and low pressure loss through complex flow paths! It has high particle removal efficiency and filtration accuracy, excelling in gas replacement characteristics, pressure resistance, and corrosion resistance. There are two types of filter elements: - Metal sintered type made of SUS316L - PTFE membrane type You can select according to the type of gas. The manufacturer's catalog includes a list of compatibility according to gas types, so please use it for equipment selection. 【Features】 - 100% He leak tested (1.0×10^-9 atm·cc/sec) - 100% particle tested (no detection of particles larger than 0.0025μm) - Manufactured, tested, and packaged in a Class 100 cleanroom - Available in a wide flow range (15–9,000 SPLM) - Metal face seal (MFS) fittings and double ferrule tube fittings Customers currently using products from other companies, if you provide your application or other product numbers, we will propose equivalent products! Please feel free to contact us. *The section "Reason for Interest" displayed during PDF download is generated by Ipros Inc.'s AI.
- Company:バリューインパクト
- Price:Other