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ナノテム

addressNiigata/Nagaoka-shi/3-2-10 Jōgōka, Chūō-ku
phone0258-22-6725
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last updated:Jun 01, 2026
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エアロフィックス エアロフィックス
ダイヤモンド砥石 ダイヤモンド砥石
加工装置 加工装置
コア技術 コア技術
エアロフィックス

エアロフィックス

浮く、止める、運ぶ。 高精度多孔質セラミックス真空チャック エアロフィックス

High-precision porous ceramic vacuum chuck "Aerofix"

Float, stop, transport! We solve the contamination issues of workpieces such as ultra-thin substrates as anti-static materials.

"Aerofix" is a vacuum chuck that solves the challenges of conventional through-hole type vacuum chucks through its unique ceramic sintering technology. It accommodates wet and dry environments as well as various work sizes. There is no need to prepare different types and sizes for each workpiece, achieving cost reduction and improved work efficiency. To eliminate static electricity without charging or discharging, additional equipment such as "ionizers" is unnecessary, making it safe for precision product workpieces. 【Features】 - Solves contamination issues for ultra-thin substrates and other workpieces as an anti-static material. - Capable of partial adsorption, allowing one unit to handle various work sizes. - Reduces the risk of workpiece contamination and enables non-contact floating transport. - Suitable for delicate thin workpieces with high-performance, high-precision uniform adsorption force. - Space-saving suction roll design. - Simply place it on existing equipment for convenience and cost reduction. *For more details, please refer to the PDF document or feel free to contact us.

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What is Aerofix?

It can be used in dry environments, of course, as well as in wet environments and high-temperature environments up to 150°C!

"Aerofix" is a vacuum chuck made of porous ceramics. It features a unique ceramic from Nanotem, controlled by the eutectic reaction of the main agent and the auxiliary agent. Sintering technology uniformly generates 2μm pores, achieving a porosity of 40%, balancing lightness and strength. It allows for "partial adsorption," enabling secure fixation even for workpieces like fine parts that only cover a portion of the adsorption surface. There is no need to change the chuck depending on the workpiece. [Features] ■ Vacuum chuck made of porous ceramics ■ Uniformly generates 2μm pores ■ 40% porosity ■ Balances lightness and strength ■ Usable in dry environments, as well as wet environments and high-temperature environments up to 150°C *For more details, please refer to the PDF document or feel free to contact us.

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[Aerofix Implementation Case] Company A

Partial adsorption demonstrates its power! Achieving improved work efficiency and quality through stable workpiece levitation.

Company A had difficulty focusing the laser on the workpiece due to the challenges of laser annealing, and wanted to apply the laser while keeping the workpiece suspended. However, they were struggling to secure it properly with conventional chucks. Therefore, they introduced "Aerofix." This allowed for precise and stable levitation, making it easier to focus the laser. Additionally, the effectiveness of fine micropores for partial adhesion significantly improved work efficiency. [Case Overview] - Client: Company A - Application: Levitation - Utilization: Levitation platform for excimer laser annealing equipment for small to medium-sized displays *For more details, please refer to the PDF document or feel free to contact us.*

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[Aerofix Implementation Case] Company B

Achieving stable fixation! Successful improvement in work efficiency through process reduction by eliminating the need for wax.

Company B was having trouble with the time and effort required for a series of tasks such as applying, removing, and cleaning the wax used to secure sapphire substrates during polishing. Therefore, they introduced "Aerofix." This solution achieved stable fixation without the use of wax, significantly improving work efficiency and reducing costs by eliminating wax-related tasks. 【Case Overview】 ■ Client: Company B ■ Application: Polishing ■ Use: As a fixture for polishing artificial sapphire for LCDs and LEDs *For more details, please refer to the PDF document or feel free to contact us.

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[Aerofix Implementation Case] Company C

With high technical skills, we overcome all challenges and aim for new challenges! Here is an introduction to our case studies.

Company C had quality issues with traditional vacuum chuck products due to film material being drawn into the air release holes on the suction surface, causing deformation. Therefore, they introduced "Aerofix." It received high evaluations in all categories: "no deformation during partial suction," "capable of handling large areas," "no dust generation," "no static electricity," and "high cost performance." 【Case Overview】 ■ Client: Company C ■ Application: Suction ■ Use: As a film holding platform for displays (OLED) *For more details, please refer to the PDF document or feel free to contact us.

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[Aerofix Introduction Case] Company D

Visit the equipment and technology! With innovative ideas, we look forward to the future and also consider collaboration in technology development!

Company D was engaged in the development and sales of polishing equipment, but they faced challenges with workpiece fixation during polishing and felt the need for product development utilizing new technologies. Therefore, they visited our actual facilities and technologies. They were impressed by our technical capabilities and uniqueness, which exceeded their expectations. Additionally, they recognized the potential of our technology, which is not mainstream at present, developed through techniques involving porous alumina and polishing. [Case Overview] ■ Client: Company D ■ Application: Adsorption and polishing ■ Utilization: Vacuum chuck, general polishing *For more details, please refer to the PDF document or feel free to contact us.

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AeroFix Sample Loan

If there is an environment where factory air can be used, verification using workpieces can be easily conducted!

We have sample chucks available for you. The lending period is one week. In principle, it is one week, but if you provide a reason, an extension is possible. As for the cost of the loan, it is free of charge, offset by the evaluation content and results provided by the customer. 【Features】 ■ Lending period is one week ■ When lending, please include the following two items: - Precautions for using the test samples - Evaluation form for the loaned samples ■ Lineup: □ 100 chuck, □ 220 chuck *For more details, please refer to the PDF document or feel free to contact us.

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High-precision porous ceramic vacuum chuck "Aerofix"

Float, stop, transport! We solve challenges with our unique ceramics sintering technology.

"Aerofix" is a vacuum chuck made of porous ceramics. Thanks to NanoTem's unique ceramic sintering technology, which controls the eutectic reaction between the main agent and the auxiliary agent, it uniformly generates pores of 2μm. It achieves a porosity of 40%, balancing lightness and strength. It can be used in dry environments, as well as wet environments and high-temperature environments up to 150°C. Please feel free to contact us when needed. 【Features】 ■ Solves contamination issues of workpieces such as ultra-thin substrates as an electrostatic prevention material ■ High-performance, high-precision uniform adsorption force ■ Partial adsorption capability ■ Suction roll that realizes space-saving ■ Achieves non-contact floating transport that reduces the risk of contamination of workpieces ■ Simple and cost-effective, just place it on existing equipment *For more details, please download the PDF or feel free to contact us.

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