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ナノテム

addressNiigata/Nagaoka-shi/3-2-10 Jōgōka, Chūō-ku
phone0258-22-6725
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last updated:Jun 01, 2026
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エアロフィックス エアロフィックス
ダイヤモンド砥石 ダイヤモンド砥石
加工装置 加工装置
コア技術 コア技術
エアロフィックス

エアロフィックス

浮く、止める、運ぶ。 高精度多孔質セラミックス真空チャック エアロフィックス

High-precision porous ceramic vacuum chuck "Aerofix"

Float, stop, transport! We solve the contamination issues of workpieces such as ultra-thin substrates as anti-static materials.

"Aerofix" is a vacuum chuck that solves the challenges of conventional through-hole type vacuum chucks through its unique ceramic sintering technology. It accommodates wet and dry environments as well as various work sizes. There is no need to prepare different types and sizes for each workpiece, achieving cost reduction and improved work efficiency. To eliminate static electricity without charging or discharging, additional equipment such as "ionizers" is unnecessary, making it safe for precision product workpieces. 【Features】 - Solves contamination issues for ultra-thin substrates and other workpieces as an anti-static material. - Capable of partial adsorption, allowing one unit to handle various work sizes. - Reduces the risk of workpiece contamination and enables non-contact floating transport. - Suitable for delicate thin workpieces with high-performance, high-precision uniform adsorption force. - Space-saving suction roll design. - Simply place it on existing equipment for convenience and cost reduction. *For more details, please refer to the PDF document or feel free to contact us.

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What is Aerofix?

It can be used in dry environments, of course, as well as in wet environments and high-temperature environments up to 150°C!

"Aerofix" is a vacuum chuck made of porous ceramics. It features a unique ceramic from Nanotem, controlled by the eutectic reaction of the main agent and the auxiliary agent. Sintering technology uniformly generates 2μm pores, achieving a porosity of 40%, balancing lightness and strength. It allows for "partial adsorption," enabling secure fixation even for workpieces like fine parts that only cover a portion of the adsorption surface. There is no need to change the chuck depending on the workpiece. [Features] ■ Vacuum chuck made of porous ceramics ■ Uniformly generates 2μm pores ■ 40% porosity ■ Balances lightness and strength ■ Usable in dry environments, as well as wet environments and high-temperature environments up to 150°C *For more details, please refer to the PDF document or feel free to contact us.

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[Aerofix Implementation Case] Company A

Partial adsorption demonstrates its power! Achieving improved work efficiency and quality through stable workpiece levitation.

Company A had difficulty focusing the laser on the workpiece due to the challenges of laser annealing, and wanted to apply the laser while keeping the workpiece suspended. However, they were struggling to secure it properly with conventional chucks. Therefore, they introduced "Aerofix." This allowed for precise and stable levitation, making it easier to focus the laser. Additionally, the effectiveness of fine micropores for partial adhesion significantly improved work efficiency. [Case Overview] - Client: Company A - Application: Levitation - Utilization: Levitation platform for excimer laser annealing equipment for small to medium-sized displays *For more details, please refer to the PDF document or feel free to contact us.*

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[Aerofix Implementation Case] Company B

Achieving stable fixation! Successful improvement in work efficiency through process reduction by eliminating the need for wax.

Company B was having trouble with the time and effort required for a series of tasks such as applying, removing, and cleaning the wax used to secure sapphire substrates during polishing. Therefore, they introduced "Aerofix." This solution achieved stable fixation without the use of wax, significantly improving work efficiency and reducing costs by eliminating wax-related tasks. 【Case Overview】 ■ Client: Company B ■ Application: Polishing ■ Use: As a fixture for polishing artificial sapphire for LCDs and LEDs *For more details, please refer to the PDF document or feel free to contact us.

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[Aerofix Implementation Case] Company C

With high technical skills, we overcome all challenges and aim for new challenges! Here is an introduction to our case studies.

Company C had quality issues with traditional vacuum chuck products due to film material being drawn into the air release holes on the suction surface, causing deformation. Therefore, they introduced "Aerofix." It received high evaluations in all categories: "no deformation during partial suction," "capable of handling large areas," "no dust generation," "no static electricity," and "high cost performance." 【Case Overview】 ■ Client: Company C ■ Application: Suction ■ Use: As a film holding platform for displays (OLED) *For more details, please refer to the PDF document or feel free to contact us.

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[Aerofix Introduction Case] Company D

Visit the equipment and technology! With innovative ideas, we look forward to the future and also consider collaboration in technology development!

Company D was engaged in the development and sales of polishing equipment, but they faced challenges with workpiece fixation during polishing and felt the need for product development utilizing new technologies. Therefore, they visited our actual facilities and technologies. They were impressed by our technical capabilities and uniqueness, which exceeded their expectations. Additionally, they recognized the potential of our technology, which is not mainstream at present, developed through techniques involving porous alumina and polishing. [Case Overview] ■ Client: Company D ■ Application: Adsorption and polishing ■ Utilization: Vacuum chuck, general polishing *For more details, please refer to the PDF document or feel free to contact us.

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AeroFix Sample Loan

If there is an environment where factory air can be used, verification using workpieces can be easily conducted!

We have sample chucks available for you. The lending period is one week. In principle, it is one week, but if you provide a reason, an extension is possible. As for the cost of the loan, it is free of charge, offset by the evaluation content and results provided by the customer. 【Features】 ■ Lending period is one week ■ When lending, please include the following two items: - Precautions for using the test samples - Evaluation form for the loaned samples ■ Lineup: □ 100 chuck, □ 220 chuck *For more details, please refer to the PDF document or feel free to contact us.

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High-precision porous ceramic vacuum chuck "Aerofix"

Float, stop, transport! We solve challenges with our unique ceramics sintering technology.

"Aerofix" is a vacuum chuck made of porous ceramics. Thanks to NanoTem's unique ceramic sintering technology, which controls the eutectic reaction between the main agent and the auxiliary agent, it uniformly generates pores of 2μm. It achieves a porosity of 40%, balancing lightness and strength. It can be used in dry environments, as well as wet environments and high-temperature environments up to 150°C. Please feel free to contact us when needed. 【Features】 ■ Solves contamination issues of workpieces such as ultra-thin substrates as an electrostatic prevention material ■ High-performance, high-precision uniform adsorption force ■ Partial adsorption capability ■ Suction roll that realizes space-saving ■ Achieves non-contact floating transport that reduces the risk of contamination of workpieces ■ Simple and cost-effective, just place it on existing equipment *For more details, please download the PDF or feel free to contact us.

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"Aerofix" for preventing misalignment of thin films for printing.

Solving the film fixation issues in the printing industry. Without misalignment, beautifully.

In the printing industry, it is anticipated that the warping and shifting of materials in the fixation of thin films can lead to quality issues. Particularly during precision printing, even slight movements of the film are not tolerated, and accurate positioning is required. In conventional vacuum chucks, the film is drawn into the air release holes of the suction surface, causing warping, which leads to printing misalignment and a decline in quality. Our high-precision porous ceramic vacuum chuck, "Aerofix," addresses these challenges by achieving localized suction without warping and ensuring reliable fixation, thereby contributing to improved print quality. 【Usage Scenarios】 - Fixation of thin films - Prevention of misalignment in precision printing processes - Film fixation platform for displays (OLED) 【Benefits of Implementation】 - Suppression of film warping and shifting - Achievement of high-quality printed materials - Reduction of dust generation and static electricity occurrence

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Introduction case of 'Aerofix' capable of adhering thin films for logistics.

Adhesion technology that supports the efficiency of picking operations.

In the logistics industry, particularly in picking operations, reliable and efficient handling of lightweight items and film materials is required. Traditional vacuum chucks often draw materials into holes on the suction surface, causing deformation, which can make accurate picking and stable holding difficult. This has led to decreased work efficiency and an increased risk of mis-picking. Therefore, the introduction of the high-precision porous ceramic vacuum chuck "Aerofix" contributes to solving these issues. 【Application Scenarios】 - Picking operations for thin film materials - Reliable handling of lightweight items - Dust suppression in the work area 【Effects of Introduction】 - Reliable handling through localized suction without deformation - Wide applicability due to large area compatibility - Maintenance of a clean work environment without dust generation - Compatibility with materials that suppress static electricity generation - High cost performance

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AeroFix for Wafer Protection in Semiconductor Manufacturing

Achieving stable adhesion without deflection for wafer protection.

In the semiconductor manufacturing industry, the wafer protection process requires precise fixation to prevent fine scratches and contamination. Particularly when handling thin and delicate wafers, there have been cases where the warping caused by the material being drawn into the air release holes of conventional vacuum chuck products has led to quality issues. Our high-precision porous ceramic vacuum chuck, "Aerofix," was developed to address such challenges. It enables partial adsorption without warping, stabilizing and protecting the wafer. 【Usage Scenarios】 - Transporting and fixing wafers - Processes requiring precise positioning 【Benefits of Implementation】 - Reduces the occurrence of suction marks on wafers - Ensures stable adsorption of delicate materials

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High-precision porous ceramic vacuum chuck for semiconductor manufacturing

Solving the challenges of wafer transport! Uniform adhesion with unique ceramics sintering technology.

In the semiconductor manufacturing industry, wafer transport requires stable adhesion without damaging the fine circuits. Particularly in handling delicate wafers, uniform adhesion is essential, as even slight variations in adhesion can lead to reduced product yield. Additionally, the use in clean room environments and the ability to respond to temperature changes are also important challenges. Our high-precision porous ceramic vacuum chuck, "Aerofix," addresses these challenges with uniform adhesion and excellent durability. 【Usage Scenarios】 - Wafer adhesion and transport - Use in clean room environments - Use in environments with temperature changes 【Benefits of Implementation】 - Stable adhesion and safe transport of wafers - Improved product yield - Compatibility with clean room environments - Adaptation to various transport environments

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High-precision porous ceramic vacuum chuck for LCD panel manufacturing

For fixing glass substrates. Solving challenges with unique ceramics sintering technology.

In the liquid crystal panel manufacturing industry and in the fixation of glass substrates, precise positioning and stable adhesion are required. Especially when handling thin and delicate glass substrates, uniform and reliable adhesive force is essential, as even slight misalignments or shocks can affect product quality. Additionally, responding to environmental changes during the manufacturing process (dry, wet, high temperature) is also important. The high-precision porous ceramic vacuum chuck "Aerofix" addresses these challenges with high-performance and high-precision uniform adhesive force. 【Application Scenarios】 - Fixation of glass substrates - Processes requiring precise positioning - Use in dry, wet, and high-temperature environments 【Benefits of Implementation】 - Improved quality through stable fixation of glass substrates - Increased efficiency in the manufacturing process - Enhanced versatility through use in a wide range of environments

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High-precision porous ceramic vacuum chuck for precision machining.

Float, stop, transport! Solving the challenges of component adhesion with unique ceramic sintering technology.

In the precision machining industry, the adhesion of parts is a crucial process that directly affects machining accuracy and production efficiency. Particularly when handling fine parts or workpieces with delicate surfaces, a uniform and stable adhesion force, along with a reduction in damage to the workpiece, is required. Inappropriate adhesion methods can lead to misalignment, damage, and surface contamination of parts, potentially resulting in decreased product quality and the need for reprocessing. The high-precision porous ceramic vacuum chuck "Aerofix" addresses these challenges by providing a uniform adhesion force through its unique ceramic sintering technology, ensuring reliable holding of the workpiece. 【Usage Scenarios】 - Precise positioning and adhesion of fine parts - Handling of workpieces with delicate surfaces - Parts transportation in clean rooms - Fixing parts in high-temperature environments 【Benefits of Implementation】 - Improved machining accuracy - Reduced risk of contamination of workpieces - Enhanced production efficiency - Cost reduction through easy integration into existing equipment

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High-precision porous ceramic vacuum chuck for optical lens manufacturing

Solving the challenges of lens holding. High-precision adhesion with unique ceramics technology.

In the optical lens manufacturing industry, reliable adhesion is required while preventing the attachment of scratches and dirt during the precise holding of lenses. In particular, damage to delicate lens surfaces directly affects product quality, necessitating careful handling. Additionally, to enhance production efficiency, rapid and stable adhesion and release are crucial. The high-precision porous ceramic vacuum chuck "Aerofix" addresses these challenges, ensuring the safe and efficient holding of lenses. 【Usage Scenarios】 - Holding during lens polishing and processing - Fixing lenses during inspection processes - Holding lenses during transportation 【Benefits of Implementation】 - Reduction of the risk of scratches and contamination on lens surfaces - Improved work accuracy due to stable adhesion - Reduced risk of workpiece contamination through non-contact floating transport

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High-precision porous ceramic vacuum chuck for automotive parts manufacturing

Solving challenges in sensor fixation for automotive parts manufacturing with unique ceramics technology.

In the automotive parts manufacturing industry, particularly in sensor fixation, precise and stable positioning of fine components is required. The performance and durability of sensors are greatly influenced by the accuracy of their fixation, so even slight misalignments or vibrations are unacceptable. Additionally, improving manufacturing line efficiency and reducing costs are also important challenges. Our high-precision porous ceramic vacuum chuck, "Aerofix," addresses these challenges by providing uniform suction power and reducing the risk of workpiece contamination through non-contact transport. 【Application Scenarios】 - Precise positioning and fixation of automotive sensor components - Stable transport of workpieces on assembly lines - Handling of fine components in clean room environments 【Benefits of Implementation】 - Stabilization of product quality through improved sensor fixation accuracy - Reduction of workpiece contamination risk through non-contact transport - Cost reduction and space-saving through easy integration into existing equipment

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High-precision porous ceramic vacuum chuck for robot hands

Even unusual shapes can be handled lightly and reliably. Innovating grip with unique ceramics technology.

In the gripping of irregularly shaped objects with robotic hands, stable adhesion force is required regardless of the shape of the workpiece. Particularly in the case of complex shapes or delicate materials, conventional adhesion methods can be difficult to apply, leading to risks of transport errors or workpiece damage. Our high-precision porous ceramic vacuum chuck, "Aerofix," addresses these challenges by providing uniform adhesion force, enabling reliable gripping even for irregular objects. 【Application Scenarios】 - Automated transport of complex-shaped parts - Non-contact transport of delicate materials - Robotic hands that accommodate diverse workpieces 【Benefits of Implementation】 - Achieves stable gripping even for irregular objects - Reduces the risk of workpiece damage - Improves transport accuracy

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High-precision porous ceramic vacuum chuck for clean rooms

We support dust-free transportation in clean rooms with lightness and strength.

In cleanroom dust-free transport, it is essential to prevent the contamination of fine foreign substances and maintain product quality. Particularly in the transport of delicate workpieces, it is crucial to minimize the risk of contamination and damage due to contact. Our high-precision porous ceramic vacuum chuck and roll, "Aerofix," addresses these challenges by enabling non-contact transport, thereby reducing the risk of workpiece contamination. 【Usage Scenarios】 - Substrate transport within cleanrooms - Wafer transport in semiconductor manufacturing processes - Dust-free transport of precision parts - Non-contact transport of films 【Benefits of Implementation】 - Reduced risk of workpiece contamination - Prevention of scratches during transport - Improved quality through maintained cleanliness

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High-Precision Porous Ceramic Vacuum Chuck for the Printing Industry

Positioning the sheet more accurately and smoothly.

In the printing industry, precise positioning of sheets is required to produce high-quality printed materials. Especially in cases of complex designs or multi-color printing, even slight misalignments can affect the final output and potentially lead to defective products. There are also concerns about scratches or dirt adhering to the sheets during transport. Our high-precision porous ceramic vacuum chuck, "Aerofix," addresses these challenges and achieves stable sheet positioning. 【Usage Scenarios】 - Positioning during sheet supply to printing machines - Positioning during sheet transport to cutting machines - Positioning during sheet lamination in laminating machines 【Benefits of Implementation】 - Reduction of defective products due to improved positioning accuracy - Stabilization during sheet transport - Reduced risk of contamination of the workpiece

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[Yield Improvement] Vacuum Chuck for Ultra-Thin Glass and Film | Zero Adhesion Marks

<Free sample available!> Are you struggling with defects caused by adhesion marks or the need to change chucks for each workpiece? Uniformly secure thin materials on a surface with 2μm pores!

Are you struggling with yield loss due to "suction marks" or "distortion and cracks" that occur when adhering thin glass or films? The porous ceramic vacuum chuck "Aerofix" holds the entire workpiece uniformly with ultra-fine and uniform pores of 2μm. It eliminates localized suction loads like those found in traditional perforated chucks, preventing deformation and damage to delicate thin workpieces. 【Main Features】 ■ Reduces exchange labor: Supports partial suction, eliminating the need to change chucks for each workpiece size change. ■ Streamlines polishing processes: Significantly reduces related processes such as wax fixation and cleaning during polishing. ■ No additional equipment required: Reduces ionizer installation costs due to the material's inherent static elimination properties. ■ Immediate operation with simple placement: Easy introduction with a "top plate" that simply sits on existing chucks. ■ Compatible with special environments: Dust-free operation. Supports high temperatures up to 150°C, wet environments, and roll shapes. ■ Customizable: Composition, shape, and size adjustments are possible according to application needs. Flexible response to technical requests. Currently, we are accepting requests for free sample loans and on-site experiments where you can directly test the effects with your existing workpieces! \ Please download the product documentation to check the details. Feel free to contact us! /

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