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  3. 一般財団法人材料科学技術振興財団 MST
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Testing, Analysis and Measurement
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一般財団法人材料科学技術振興財団 MST

EstablishmentAugust 1, 1984
addressTokyo/Setagaya-ku/Kitaomi 1-18-6
phone03-3749-2525
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last updated:May 26, 2025
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一般財団法人材料科学技術振興財団 MST List of Products and Services

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Mass spectrometry Mass spectrometry
Photoelectron spectroscopy Photoelectron spectroscopy
[Measurement Method] Electron Microscopy Observation and Analysis [Measurement Method] Electron Microscopy Observation and Analysis
Vibrational spectroscopy Vibrational spectroscopy
Measurement Method: X-ray Diffraction Related Measurement Method: X-ray Diffraction Related
[Measurement Method] Related to SPM [Measurement Method] Related to SPM
Measurement Method: Failure Analysis Measurement Method: Failure Analysis
[Measurement Method] Other Measurement Methods [Measurement Method] Other Measurement Methods
Processing methods and treatment methods Processing methods and treatment methods
Other services and support information Other services and support information
[Analysis Case] LSI・Memory [Analysis Case] LSI・Memory
[Analysis Case] Optical Devices [Analysis Case] Optical Devices
[Analysis Case] Solar Cells [Analysis Case] Solar Cells
[Analysis Case] Fuel Cell [Analysis Case] Fuel Cell
[Analysis Case] Display [Analysis Case] Display
[Analysis Case] Oxide Semiconductors [Analysis Case] Oxide Semiconductors
[Analysis Case] Power Device [Analysis Case] Power Device
[Analysis Case] Electronic Components [Analysis Case] Electronic Components
[Analysis Case] Secondary Battery [Analysis Case] Secondary Battery
[Analysis Case] Lighting [Analysis Case] Lighting
[Analysis Case] Manufacturing Equipment and Components [Analysis Case] Manufacturing Equipment and Components
[Analysis Case] Biotechnology [Analysis Case] Biotechnology
[Analysis Case] Cosmetics [Analysis Case] Cosmetics
[Analysis Case] Food [Analysis Case] Food
[Analysis Case] Pharmaceuticals [Analysis Case] Pharmaceuticals
[Analysis Case] Medical Devices [Analysis Case] Medical Devices
Analysis Case: Daily Necessities Analysis Case: Daily Necessities
[Analysis Case] Environment [Analysis Case] Environment
[Analysis Case] Others [Analysis Case] Others
Materials from the exhibition where MST exhibited. Materials from the exhibition where MST exhibited.
Processing

Processing methods and treatment methods

【Processing Methods and Treatments】 ◆FIB Method (Focused Ion Beam) ◆Processing for SSDP (Measurement Processing from the Substrate Side) ◆IP Method (Ar Ion Polishing) ◆Processing under Atmosphere Control ◆Cryo Processing

[IP Method] Ar Ion Polishing Processing

The IP method is a type of polishing technique that uses ion beams for processing.

The IP method is a technique that utilizes the sputtering phenomenon, where sample atoms are ejected from the sample surface when an ion beam with aligned energy and direction is irradiated onto the sample. The ion species used is typically a noble gas (Ar in MST) that does not pose concerns about chemical reactions with the sample. In the AES analysis of the processed surface, the components of the shielding plate (Ni, P) were below the detection limit.

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Ar ion milling processing

This is a processing method for producing thin film samples for transmission electron microscopy with a thickness of less than 50 nm by performing mechanical polishing followed by finishing with a low-energy Ar ion beam.

The Ar ion milling method is a processing technique used to create thin film samples for transmission electron microscopy with a thickness of less than 50 nm by performing mechanical polishing followed by finishing with a low-energy Ar ion beam.

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Ultramicrotome processing

This is a processing method for cutting bulk samples using a diamond knife to produce ultra-thin sections for transmission electron microscopy with a thickness of less than 100 nm.

Ultramicrotome processing is a method that uses a diamond knife to cut bulk samples and produce ultra-thin sections for transmission electron microscopy with a thickness of less than 100 nm. Unlike processing using ion beams, it allows for the production of a wide range of sections in the atmosphere. Biological materials and soft polymer materials, which are difficult to cut at room temperature, can also be made into ultra-thin sections by cryofixation.

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Treatment under non-atmospheric exposure

It is possible to evaluate the sample in its original state.

■Features ? By handling samples under atmospheric non-exposure, it is possible to minimize alteration and changes even for highly reactive samples. ? Cutting, peeling, and surface preparation under atmospheric non-exposure can reduce secondary contamination and oxidation from the atmosphere. ? Methods that can be evaluated under atmospheric non-exposure: SIMS, TOF-SIMS, AES, XPS, SEM, TEM, STEM, Raman, XRD, FIB, etc.

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[FIB] Focused Ion Beam Processing

FIB refers to a focused ion beam with a diameter ranging from a few nanometers to several hundred nanometers, which can be used to scan the sample surface to etch or deposit material in specific areas.

FIB refers to a focused ion beam with diameters ranging from several nanometers to several hundred nanometers, which can be used to etch specific areas (sputtering) or deposit materials such as carbon (C), tungsten (W), and platinum (Pt) onto specific regions by scanning the sample surface. Additionally, the shape of the processed sample can be recognized through SIM images, which detect secondary electrons generated by irradiating the sample with the ion beam. - Arbitrary shape processing through etching in micro-regions (several nanometers to several tens of micrometers) is possible (typical processing size: around 20 μm) - Sample preparation for SEM, SEM-STEM, and TEM imaging (cross-sections of specific areas can be produced) - Fine pattern deposition and thin film formation (C, W, Pt deposition) are possible in the range of several micrometers to several tens of micrometers - High-resolution SIM (Scanning Ion Microscope) imaging is possible (acceleration voltage 30 kV: 4 nm) - Observation of metal crystal grains (Al, Cu, etc.) is possible with SIM images.

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Cryo processing

Cooling and hardening the soft sample to make it machinable.

Features - Soft samples can be hardened and machined by cooling. - Cooling to temperatures near liquid nitrogen is possible. - The temperatures of the sample, atmosphere, and microtome blade can be set independently. - It is mainly effective for processing soft materials (such as biological samples and polymer materials) at room temperature, and gel-like materials can also be processed by cooling.

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[Analysis Case] Investigation of the Causes of Wettability Changes Due to Plasma Treatment

Evaluation of the top surface of modified layers of polymers, resins, and films using TOF-SIMS is possible.

On the surface of cell culture dishes, treatments are performed to convert hydrophobic plastic surfaces to hydrophilic ones in order to enhance cell adhesion. In this study, the surfaces of dishes that underwent hydrophilic treatment were evaluated using XPS and TOF-SIMS, revealing an increase in OH and CHO groups. By conducting quantitative evaluations with XPS and qualitative evaluations with TOF-SIMS, it is possible to capture how the surface has changed.

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SSDP-SIM

SSDP: Substrate Side Depth Profile

In secondary ion mass spectrometry (SIMS), due to phenomena such as surface roughness, the knock-on effect where atoms present on the surface are pushed inward by ion irradiation, and crater bottom roughness, it may not be possible to obtain sharp elemental distributions. To address this issue, the SSDP method (Back-Side SIMS) involves performing SIMS analysis from the substrate side (the back side) after thinning the sample. This technique allows for a more accurate evaluation of elemental distribution without being affected by the sample shape or measurement conditions.

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Cross-sectional processing using the ion polish method.

A method for removing the surface of a sample by utilizing the sputtering phenomenon, where sample atoms are ejected from the sample surface.

The IP method utilizes the sputtering phenomenon, where sample atoms are ejected from the sample surface when an ion beam with aligned energy and direction is irradiated onto the sample. It is also referred to as the CP method (Cross-section Polish). The ion species used is typically a noble gas (Ar in MST) that does not pose concerns for chemical reactions with the sample. In the AES analysis of the processed surface, the components of the shielding plate (Ni, P) were below the detection limit. ■Features - Wide-area cross-section processing is possible (approximately 500μm to 1mm) - No impact from mechanical polishing damage - Minimal surface contamination - Non-exposure to the atmosphere, cooling processing is possible

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Electronic dyeing

By bonding heavy elements to polymer chains, the contrast of structures and forms derived from the polymers can be enhanced, allowing for clearer observation under an electron microscope.

There are mainly three types of dyes, which are used according to the observation target. - Osmium tetroxide (OsO4) It selectively reacts with the unsaturated polymer material's ?CH=CH- (double bond). - Ruthenium tetroxide (RuO4) It cross-links with the amorphous parts of saturated polymer materials such as polyolefins. - Phosphotungstic acid (H3[P(W3O10)4]·xH2O, abbreviated as PTA) It reacts with polyamides and other materials containing the -CONH functional group.

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Laser processing

Using an ultra-short pulse laser with micron-level processing position accuracy, samples can be produced quickly and with low damage.

? High-speed sample processing is possible with pico-second pulse lasers. ? Light-transmitting samples such as glass can also be processed.

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Structural analysis using Xe-plasma FIB.

Precision processing/structural evaluation is possible over a wide area of several hundred micrometers.

It achieves high positional accuracy and wide-area cross-section production, making it usable as a new large-capacity analysis application. Even small structures within a large area can be targeted for processing, enabling wide-area structural analysis.

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[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes

Distribution of resistance values in the electrode cross-section, visualization of conduction paths, and comparison with ion distribution.

The charge and discharge characteristics of lithium-ion secondary batteries are influenced by electronic conductivity. I will introduce a case where the decreased conductivity of active materials, due to degradation or blockage of conduction paths, was visualized as a resistance value distribution using SSRM. By comparing the results obtained from SSRM with the elemental distribution of Li and other elements measured by TOF-SIMS, it is possible to confirm the correlation between resistance values and elemental distribution. Additionally, it is feasible to classify conductive additives and binders based on resistance values, perform statistical processing, and quantify the mixing degree for each material.

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[Analysis Case] Impurity Evaluation of MLCC Using Diagonal Processing MLCC

Evaluation of impurity distribution in ceramic layers using diagonal processing.

Multilayer ceramic capacitors (MLCCs) are capacitors designed to increase capacitance by layering ceramic dielectric and electrodes. The electrical properties of MLCCs are significantly affected by impurities, making the evaluation of impurities in the ceramic layers and the diffusion of electrode components important. With the miniaturization of MLCCs, the ceramic layers have become thinner, making it difficult to evaluate impurities. This document introduces the results of evaluating impurities in the ceramic layers by innovating the pretreatment process.

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[Analysis Case] Evaluation of Mechanical Properties of Hair Cross-Sections Prepared by Microtome Method

It is possible to evaluate the elastic modulus of the internal structure of soft materials.

When evaluating the internal structure of materials, it is necessary to expose the internal structure while maintaining it through cross-sectional processing techniques such as cutting and polishing. This document introduces a case where the microtome method, which has a relatively small impact from processing damage, was used to create cross-sections of hair, followed by AFM observation of the internal structure and evaluation of elastic modulus. The microtome method is a cutting processing technique widely used in the field of soft materials, such as rubber materials and biological samples, and this approach has made it possible to evaluate the mechanical properties of the internal structure of these materials. [Measurement and Processing Methods] [AFM] Atomic Force Microscopy [AFM-MA・AFM-DMA] Mechanical Property Evaluation (Elastic Modulus Measurement, Dynamic Viscoelasticity Measurement) Ultra Microtome Processing *For more details, please download the PDF or feel free to contact us.

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