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  3. 一般財団法人材料科学技術振興財団 MST
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Testing, Analysis and Measurement
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一般財団法人材料科学技術振興財団 MST

EstablishmentAugust 1, 1984
addressTokyo/Setagaya-ku/Kitaomi 1-18-6
phone03-3749-2525
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last updated:May 26, 2025
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一般財団法人材料科学技術振興財団 MST List of Products and Services

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Mass spectrometry Mass spectrometry
Photoelectron spectroscopy Photoelectron spectroscopy
[Measurement Method] Electron Microscopy Observation and Analysis [Measurement Method] Electron Microscopy Observation and Analysis
Vibrational spectroscopy Vibrational spectroscopy
Measurement Method: X-ray Diffraction Related Measurement Method: X-ray Diffraction Related
[Measurement Method] Related to SPM [Measurement Method] Related to SPM
Measurement Method: Failure Analysis Measurement Method: Failure Analysis
[Measurement Method] Other Measurement Methods [Measurement Method] Other Measurement Methods
Processing methods and treatment methods Processing methods and treatment methods
Other services and support information Other services and support information
[Analysis Case] LSI・Memory [Analysis Case] LSI・Memory
[Analysis Case] Optical Devices [Analysis Case] Optical Devices
[Analysis Case] Solar Cells [Analysis Case] Solar Cells
[Analysis Case] Fuel Cell [Analysis Case] Fuel Cell
[Analysis Case] Display [Analysis Case] Display
[Analysis Case] Oxide Semiconductors [Analysis Case] Oxide Semiconductors
[Analysis Case] Power Device [Analysis Case] Power Device
[Analysis Case] Electronic Components [Analysis Case] Electronic Components
[Analysis Case] Secondary Battery [Analysis Case] Secondary Battery
[Analysis Case] Lighting [Analysis Case] Lighting
[Analysis Case] Manufacturing Equipment and Components [Analysis Case] Manufacturing Equipment and Components
[Analysis Case] Biotechnology [Analysis Case] Biotechnology
[Analysis Case] Cosmetics [Analysis Case] Cosmetics
[Analysis Case] Food [Analysis Case] Food
[Analysis Case] Pharmaceuticals [Analysis Case] Pharmaceuticals
[Analysis Case] Medical Devices [Analysis Case] Medical Devices
Analysis Case: Daily Necessities Analysis Case: Daily Necessities
[Analysis Case] Environment [Analysis Case] Environment
[Analysis Case] Others [Analysis Case] Others
Materials from the exhibition where MST exhibited. Materials from the exhibition where MST exhibited.
Measurement

Measurement Method: Failure Analysis

◆[EMS] Emission Microscopy Method ◆[OBIRCH] Optical Beam Heating Resistance Variation Method ◆Lock-In Thermal Analysis Method

[EMS] Emission Microscopy Method

Rapid identification of the malfunctioning area.

EMS is a method that quickly identifies the location of faults by detecting weak light emissions caused by abnormal operation of semiconductor devices. It is also referred to as EMMS, PEM, or EMI. - Only transparent materials can be evaluated in the measurement wavelength range (from the visible to near-infrared region). - It is possible to capture internal defects such as cracks, crystal defects, oxide film breakdown due to ESD, and shorts caused by Al spikes with low damage.

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[OBIRCH] Light Beam Heating Resistance Variation Method

OBIRCH is a method that utilizes the change in resistance caused by the heat generated at defect locations when light is applied, to identify abnormal areas.

OBIRCH is a method that utilizes the change in resistance caused by the heat generated at defect locations when light is applied, allowing for the identification of abnormal areas. - It can identify the locations of voids and deposits within wiring and vias. - It can identify abnormal contact resistance. - It can identify short circuits in wiring. - It visualizes the DC current path. - It is capable of detecting micro-leaks in gate oxide films.

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Lock-in thermal analysis method

The lock-in thermal analysis method detects slight temperature increases in the current path.

- The IR-OBIRCH function is also included, allowing for further narrowing down of the fault location after identifying the heat generation area through IR-OBIRCH measurement. - By detecting infrared, it is possible to non-destructively identify fault locations without the need for opening the package through etching or removing electrodes. - By using lock-in signals, it is possible to identify heat generation areas with high S/N, enabling cross-sectional analysis such as Slice & View.

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[C-SAM] Ultrasonic Microscopy Method

C-SAM is a non-destructive method for observing defects such as delamination within a sample.

C-SAM is also known as SAT: Scanning Acoustic Tomography. - It is effective for confirming the "bonding state of electrodes" and "adhesion of bonded wafers," which are difficult to verify with X-ray CT observations. - In addition to reflected waves, transmission waves can also be acquired.

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[SXES] Soft X-ray Emission Spectroscopy

SXES is a method that evaluates the chemical bonding state using soft X-rays emitted from materials.

- It is possible to evaluate the chemical bonding states focusing on specific elements in the sample (especially light elements such as B, C, N, O). - The spectral shape reflects the partial density of states of the targeted elements in the valence band. - Evaluation of the band structure is also possible through simultaneous measurement with X-ray absorption spectroscopy (XAS). - Since information from the bulk is obtained, it is less affected by the influence of the surface region within a few nanometers. - Evaluation can be performed without being affected by charging effects, even for insulators. - The detection limit is low (<1 atomic%), allowing for the evaluation of trace components.

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X-ray CT method

X-ray Computed Tomography

By irradiating the sample with X-rays, a two-dimensional transmission image of the internal structure of the sample is obtained. Additionally, X-ray CT (Computed Tomography) images are constructed from continuous imaging data obtained by rotating the sample. - Non-destructive, allowing for the examination of the internal structure and defect shapes of the sample. - Capable of constructing 3D images and cross-sectional images at arbitrary locations. - The X-ray energy can be set between 30 kV and 160 kV, making it suitable for a wide range of materials from organic substances to electronic components. - With a dedicated stage, X-ray CT measurements of the sample can be performed under tensile/compressive or cooling/heating conditions. This document introduces application examples, principles, and data examples. For more details, please download the document or contact us.

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Case studies related to EV (Electric Vehicle) analysis

Analyze the EVolution of EV development!

We provide suitable analysis menus for essential components of EVs, including onboard batteries and devices.

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Thermal shock test

We evaluate the durability of electronic components and devices when repeatedly exposed to high and low temperatures.

It is also possible to apply voltage to the sample, measure the temperature profile in the chamber, and conduct sampling evaluations during the specified cycle.

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Joint strength test

We evaluate the bonding strength of products and parts.

- We accommodate tests not only in accordance with standards but also tests tailored to your requests, even if they fall outside the standards. - We have a variety of fixtures for gripping and securing. Additionally, we can also handle the creation of custom fixtures.

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Vibration test

We evaluate the effects of vibrations and durability on electronic components, electronic devices, and other products during use or transportation.

We evaluate the effects of vibrations and durability on electronic components, electronic devices, and other products during use or transportation.

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Impact test

We evaluate the impact of shocks and durability that electronic components, electronic devices, and other products experience during use or when dropped.

We evaluate the impact of shocks that electronic components, electronic devices, and other products experience during use or when dropped, as well as their durability.

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Constant temperature and humidity test

It is possible to evaluate the resistance when a certain load (temperature, humidity, pressure, voltage) is applied to materials and components.

1. Temperature and Humidity Cycle Test By repeatedly applying temperature differences between high and low temperatures, the resistance to temperature changes and humidity is evaluated in a short time. 2. Condensation Test Humidity is controlled during high-temperature exposure to evaluate the effects of condensation that occurs due to repeated high-temperature and high-humidity environments.

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Air tightness test

We evaluate and determine the sealing performance of sealed states in hollow structure components and the like.

We evaluate and determine the sealing performance of sealed conditions for hollow structure components and the like.

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Solder Wetting Test

Testing can be conducted using the solder pot balance method, solder ball balance method, and solder paste method.

It is compatible with both leaded and lead-free solder.

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Solder heat resistance test

We will evaluate the impact of thermal stress on electronic components in the implementation process.

Bake, perform moisture absorption pre-treatment to reproduce storage conditions, and after reflow, check for the occurrence of delamination or cracks.

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TCC (Rapid Temperature Change) Test

Temperature cycle testing is possible with sample temperature control and air temperature control.

- Temperature gradient control of up to 15°C/min based on sample temperature is possible. - Complies with standard tests JESD22-A104E and IEC60749-25. - Accurate standard testing of sample temperature lamp plate at 15°C/min or below (-40 to 125°C) is possible.

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PIND test

By detecting the sound generated when tiny foreign objects inside the hollow structure collide with the wall, it is possible to prevent troubles such as shorts before they occur.

By applying shock or vibration to the sample and detecting the sound generated when tiny foreign objects within the hollow structure collide with the walls, it is possible to prevent issues such as shorts before they occur.

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ESD test

We evaluate the effects and destruction tolerance when semiconductors and electronic components are subjected to stress from static electricity.

- MM (Machine Model) test: A test that simulates damage caused by the discharge of static electricity accumulated in metals and other materials. - HBM (Human Body Model) test: A test that simulates damage caused by the discharge of static electricity accumulated in the human body. - CDM (Charged Device Model) test: A test that simulates damage caused by the discharge of static electricity occurring when a charged conductor comes into contact with terminals of different potentials. - Latch-up test*: Evaluates the resistance to the phenomenon of latch-up, where excessive current continues to flow in devices with a parasitic thyristor structure. *Corresponds to pulse current injection method and power supply overvoltage method.

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[Analysis Case] Evaluation of Metal Impurities in the Metal Film and Interface of the Device

Impurities in films and interfaces such as plating can be evaluated using TOF-SIMS.

Impurities from components of the film formation device, target materials, and plating solutions can contaminate the device and have adverse effects, making the qualitative assessment of impurities on surfaces, within films, and at interfaces important. TOF-SIMS can sensitively evaluate unknown elements present on surfaces, within films, and at interfaces in a single measurement due to the following three characteristics: 1. For metallic elements, ions from m/z 1 to 800 can be detected simultaneously in one measurement. 2. Detection sensitivity of a few ppm can be achieved (varies depending on materials and ions). 3. The use of a sputter gun allows for the evaluation of depth distribution.

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Observation of structural changes in metallic materials through tensile testing using in situ X-ray CT.

Capable of evaluating three-dimensional structural changes according to tensile stress.

In situ X-ray CT measurements allow for internal structure analysis under conditions where a load (tension or compression) is applied to the sample. In this document, in situ X-ray CT measurements were conducted using an aluminum plate as the sample, both in its normal state and in an extended state. We calculated the tensile stress applied to the sample and monitored the internal structural changes under each stress condition. By combining in situ X-ray CT measurements with image analysis technology, it is possible to evaluate under actual usage conditions, which was previously difficult, and assess the impact of stress on the product.

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