一般財団法人材料科学技術振興財団　MST List of Products and Services

When ions are incident on the sample surface, various particles such as electrons, neutral particles, and ions are emitted from the sample surface. SIMS is a technique that detects these ions and measures the detection quantity at each mass to perform qualitative and quantitative analysis of the components contained in the sample. - High sensitivity (ppb to ppm) - Analysis of all elements from H to U is possible - Wide detection concentration range (from major component elements to trace impurities) - Quantitative analysis using standard samples is possible - Depth direction analysis is possible - Evaluation with depth direction resolution of a few to several tens of nm is possible - Measurement of micro-regions up to a few micrometers in size is possible - Isotope analysis is possible - Destructive analysis

This is a method for structural analysis of sample surfaces. It is suitable for identifying organic contamination on the very surface due to its sensitivity compared to other analytical devices. Using a sputter ion source, it is possible to analyze the distribution of inorganic and organic materials in the depth direction. - Structural analysis and identification of organic and inorganic compounds are possible. - Coordination data from foreign substance inspection devices can be linked. - Qualitative analysis is possible from micron-order microforeign substances to several centimeters. - It is possible to analyze the very surface with high sensitivity. - Image analysis is possible. - Qualitative analysis of depth direction analysis is possible.

Ion chromatography is a method for detecting ionic components in liquid samples. - Qualitative and quantitative analysis of ionic components is possible. - Analysis can be performed with a small amount of sample (a few mL).

Gas chromatography (GC) is classified as a type of chromatographic method that utilizes differences in the adsorption or distribution coefficients of gases against a stationary phase to separate components. Gas chromatography-mass spectrometry (GC/MS) allows for the qualitative and quantitative analysis of components by using a mass spectrometer to detect the components separated by GC, based on mass information. - Effective for analyzing components with relatively low molecular weights and high volatility - Capable of qualitative and quantitative analysis of trace organic components - Various introduction methods can be selected according to the state of the sample and the purpose - A wide range of organic component structure estimation is possible due to a rich library

Liquid chromatography (LC) is classified as a type of chromatographic method that separates components of a liquid sample based on chromatographic principles. The detection of the separated components using a mass spectrometer is referred to as liquid chromatography-mass spectrometry (LC/MS). LC/MS is an analytical technique for the qualitative and quantitative analysis of organic compounds. - Effective for analyzing components with relatively large molecular weights or relatively high polarity. - By selecting the ionization method, it can accommodate thermally unstable substances and others. - There are various ionization methods available, allowing detection using the most suitable ionization method for the component (Electrospray Ionization (ESI), Atmospheric Pressure Chemical Ionization (APCI), Atmospheric Pressure Photoionization (APPI)). - High mass resolution can be achieved using mass spectrometers that utilize the Time-of-Flight method.

GDMS is a method for analyzing the composition of solid samples, allowing simultaneous analysis from major components to trace elements, and performing semi-quantitative analysis of impurities present in the sample. The concentration conversion uses the relative sensitivity factor (RSF) associated with the device. The analytical values are derived from the ion intensities of the major component elements and the target elements, calculated using the RSF, resulting in semi-quantitative values. - Bulk analysis is possible from trace elements (ppb level) to major component levels. - Depth profile analysis on the order of micrometers and thin film analysis are possible. - By using conductive materials and auxiliary electrodes, analysis of semiconductor materials and insulating materials is also possible. - High mass resolution allows for the removal of interfering ions. - Measurement is possible for almost all elements below Li, excluding hydrogen and noble gases. - Isotope ratio measurement is possible.

TDS is a mass spectrometry method that allows monitoring of gases generated by vacuum heating/ramping at different temperatures. The TDS spectrum represents temperature on the horizontal axis and ion intensity on the vertical axis. This enables comparison of the amount of gas released and the desorption temperatures. Additionally, due to the vacuum environment, hydrogen and water can be analyzed with high sensitivity. - It is possible to understand the relationship between the gases desorbed from the sample, the pressure, and the temperature at which they are generated. - Since only the sample can be heated, the background is low, allowing for high-sensitivity analysis of low-mass molecules such as hydrogen, water, oxygen, and nitrogen. - It is possible to estimate the composition of the gases generated from the sample and perform quantitative analysis (counting the number of molecules).

ICP-MS allows for relatively easy preparation of standard samples that are difficult to produce for solid analysis, as it analyzes solutions. Therefore, it is frequently used for accurately quantifying trace inorganic elements in solutions. - It can detect the lowest concentrations (ppt or sub-ppt levels) due to its high sensitivity and low background, making it the most effective instrument for inorganic element analysis. (*: ppt: 10^-12 g/g) - It allows for flexible preparation of standard samples (standard solutions) that serve as a reference for quantitative analysis, resulting in lower uncertainty in the results. - It enables qualitative analysis by measuring many elements of the periodic table simultaneously. Additionally, it has a wide dynamic range, allowing for simultaneous analysis of major and trace components.

- Compounds that are relatively low molecular weight and highly polar, such as organic acids, can also be analyzed. - Low polarity compounds, such as lipids, can also be analyzed. - By using the post-column method, it is possible to eliminate the effects of interfering components that could not be completely separated. - Quantification of polymers and measurement of molecular weight distribution are possible.

Liquid chromatography (LC) is a method for separating components in a liquid based on differences in the interactions between the stationary phase and the mobile phase. Liquid chromatography-Fourier transform mass spectrometry (LC-FTMS) utilizes a Fourier transform mass spectrometer to detect components separated by LC, allowing for the acquisition of precise mass information to four decimal places with high resolution. Therefore, when focusing on secondary isotope ions, it is possible to separate peaks derived from 13C and 34S, enabling more accurate composition estimation with higher resolution and precision compared to quadrupole or time-of-flight mass spectrometers. Additionally, it is possible to perform multi-stage MS/MS (MSn) using an ion trap, allowing for the acquisition of fragment ions for specific ions. Various methods can be combined for MSn fragmentation, enabling accurate qualitative analysis of unknown compounds by performing MSn in combination.

Two-component epoxy resin cures by mixing the base agent and the hardener. Unlike one-component systems, it has the advantage of curing without the need for heating, making it widely used as adhesives, paints, and resins. In its qualitative analysis, the cured resin, which is insoluble in solvents, can primarily be evaluated for the base agent using thermal decomposition GC/MS. On the other hand, for the evaluation of the hardener, it may be necessary to measure it in its pre-cured state depending on the type. This document presents a case where a polymercaptan hardener was measured in its pre-cured solution state, and structural estimation was conducted using a combination of ionization methods (EI and FI methods).

Understanding the degradation mechanism of liquid crystal display panels is an essential theme for extending the lifespan of the panels. Among the degradation symptoms, a decrease in brightness can be attributed to various factors, including liquid crystals, alignment films, sealing materials, and TFTs. A comprehensive analysis will be conducted, incorporating surface, structure, composition, and computational science. By capturing the slight differences between good and defective products and conducting a comprehensive evaluation, we can elucidate the degradation mechanism of liquid crystal displays.

Ginsenoside is a saponin unique to Korean ginseng. It has a structure where sugars are bound to a basic skeleton of sapogenin, and approximately 40 related compounds have been discovered to date. They are mainly classified into diol types, which have central nervous system inhibitory effects, and triol types, which have central nervous system excitatory effects, and it is said that the balance between these is important. This document introduces a case of simultaneous analysis of 26 types of ginsenosides contained in Korean ginseng using LC/MS/MS. Measurement method: LC/MS Product field: Food Analysis purpose: Composition evaluation and identification For more details, please download the materials or contact us.

Optical fibers have a structure that consists of a core with a high refractive index surrounded by a cladding layer with a low refractive index. Due to the difference in refractive indices, light is totally internally reflected at the boundary and transmitted. Therefore, it is important to analyze the selection of materials, the presence of impurities, adhesion, coating conditions, and contaminants. Optical fibers can be broadly classified into two types: plastic and quartz. This document presents a case study in which the materials of the core and cladding were identified by analyzing the cross-section of plastic optical fibers using TOF-SIMS. Measurement method: TOF-SIMS Product field: Optical fibers, electronic components Analysis purpose: Qualitative evaluation, organic matter evaluation, composition distribution evaluation "For more details, please download the document or contact us."

To investigate the causes of defects such as poor adhesion, it is important to gain insights into the surfaces of wafers and devices. In this instance, hydrophobic areas were observed on a silicon wafer, prompting wide-area imaging using TOF-SIMS. As a result, components estimated to be silicone oil, CF-based grease, and paraffin oil were identified from the hydrophobic areas. TOF-SIMS typically has a measurement field of view up to 500μm square, but by moving the stage during measurement, it is possible to evaluate wide-area distributions. Measurement method: TOF-SIMS Product fields: Devices, Displays, Electronic Components, Manufacturing Equipment Analysis objectives: Qualitative, Imaging, Composition Distribution Evaluation For more details, please download the materials or contact us.

To determine impurity concentrations using SIMS analysis, it is necessary to use a standard sample with the same composition as the analysis sample. By preparing various Al compositions of AlGaN standard samples for AlGaN used in ultraviolet LEDs and power devices, MST can achieve more accurate quantification of impurities. We will introduce a case where, after disassembling a commercially available deep ultraviolet LED, SIMS analysis was conducted to determine the concentration of the dopant Mg and the distribution of the main component Al composition. Measurement method: SIMS Product fields: Lighting, power devices, optical devices Analysis purposes: Trace concentration evaluation, impurity evaluation, distribution evaluation, product investigation For more details, please download the materials or contact us.

The response speed, driving voltage, and reliability characteristics of liquid crystal panels are attributed to the molecular structure of the liquid crystals. Therefore, analyzing the details of the molecular structure is essential for controlling the display characteristics of liquid crystal panels. Here, we introduce a case where the liquid components in commercially available panels were extracted and structurally estimated using GC/TOFMS. Approximately 10 components, including liquid crystal materials that exhibit negative dielectric anisotropy, were estimated from precise mass information. Measurement method: GC/MS Product fields: Displays, televisions, projectors Analysis objectives: Market research, molecular structure evaluation, degradation investigation For more details, please download the materials or contact us.

TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) is a method that can sensitively evaluate organic and inorganic substances on the very surface, and it can be used as an analytical tool for various quality control processes of products. For example, it can be used for regular checks of surface contaminants during product storage, investigating the causes when defects such as peeling or discoloration occur in products, and analyzing changes in key components before and after altering manufacturing conditions. This document presents an example of comparing the surfaces of silicon wafers stored under different environments, focusing on the representative contaminant polydimethylsiloxane (PDMS). Measurement method: TOF-SIMS Product fields: Electronic components, manufacturing equipment, parts, and others (general electronics) Analysis purposes: Surface analysis, evaluation of chemical bonding states, failure analysis, defect analysis, and others (contamination assessment, quality control) For more details, please download the document or contact us.

We have launched a new service using Glow Discharge Mass Spectrometry (GDMS) starting from May 15 (Monday). - Simultaneous analysis of over 70 elements, from major components to trace components at the ppb level, is possible. - Detection of C, N, and O at the ppm level, which was previously difficult. - Depth direction analysis is possible from nm to several tens of µm.

The combustion ion chromatography (IC) method allows for the investigation of the content of halogens (F, Cl, Br) and sulfur contained in solid materials such as plastics and resins, as well as in liquid materials like organic solvents. As shown in Figure 1, gases generated by combusting and decomposing the sample in a combustion furnace are collected in an absorbent solution. By measuring this absorbent solution using ion chromatography, it is possible to determine the content of halogens and sulfur in solid samples that are insoluble in water.

Both TOF-SIMS and MALDI-MS are techniques capable of imaging mass spectrometry (IMS), each with different strengths in terms of components, mass, and spatial resolution. TOF-SIMS excels in low-mass components and allows for imaging with high surface resolution. On the other hand, MALDI-MS specializes in high-mass components and has a wide variety of lipids that can be imaged. Here, we will introduce examples of measurements taken with TOF-SIMS and MALDI-MS, using the results of imaging mass spectrometry of lipids in mouse testes as an example.

LDI (Laser Desorption Ionization) is a method that uses only the energy of ultraviolet lasers to sublime and ionize molecules. On the other hand, MALDI (Matrix-Assisted Laser Desorption Ionization) is a method that sublimates and ionizes molecules by exposing a sample mixed with a matrix to ultraviolet lasers.

This method is a gene analysis technique that utilizes mass spectrometry with MALDI-TOF-MS, allowing for the analysis of multiple SNP sites in a single measurement. Up to 40 SNPs can be measured simultaneously across 190 samples. The overall analysis follows the flow outlined below. Primers designed to amplify the target SNP regions without overlapping mass peaks, along with primers designed to extend only one base at each SNP site, are used to create mass differences in the DNA fragments, from which the bases are determined based on the detected mass peaks.

Impurities contained in semiconductor materials can affect product quality, leading to issues such as leakage current and early device failure. Therefore, understanding the amount of impurities in the materials is crucial for improving product quality. This document presents a case study on SiC substrates, which are gaining attention as power device materials, analyzing impurities adhered to the substrate surface using ICP-MS and impurities within the substrate using GDMS. Measurement methods: ICP-MS, GDMS Product fields: Power devices, manufacturing equipment, components Analysis purpose: Trace concentration evaluation For more details, please download the document or contact us.

GaN-based high electron mobility transistors, known as GaN HEMTs (High Electron Mobility Transistors), utilize an AlGaN/GaN heterostructure to achieve a two-dimensional electron gas layer (2DEG), resulting in high electron mobility. They are used in applications such as fast chargers, leveraging these characteristics. This document presents the disassembly and evaluation of normally-off GaN HEMT devices. We will introduce a case study that employs a combination of analytical methods to gather comprehensive insights about the samples. Measurement methods: SIMS, TEM, SCM, SMM. Product field: Power devices. Analysis objectives: Trace concentration measurement, shape evaluation, film thickness evaluation, structural evaluation, product investigation. For more details, please download the document or contact us.

Ceramics are inorganic compound materials widely used in everyday goods and electronic components. For evaluating the discoloration of ceramics caused by impurities and adherents, TOF-SIMS analysis, which allows for imaging analysis of trace components regardless of organic or inorganic substances at the focus area, is effective. This document presents a case study where the discoloration of aluminum oxide ceramics was analyzed using TOF-SIMS, demonstrating the cause of discoloration through ion images and line profiles. Measurement method: TOF-SIMS Product field: Manufacturing equipment and components Analysis purpose: Composition distribution evaluation For more details, please download the document or contact us.

Ceramics are inorganic compound materials widely used in everyday items and electronic components. Their surface condition significantly affects the properties and performance of materials such as everyday items and electronic components. Therefore, it is important to properly evaluate the surface condition when assessing the functionality of ceramics. This document introduces a case study evaluating the cleaning components that contribute to the wettability of ceramic surfaces made of zirconium oxide, using TOF-SIMS to assess surface distribution and depth distribution. Measurement method: TOF-SIMS Product field: Manufacturing equipment and components Analysis purpose: Qualitative and distribution evaluation For more details, please download the document or contact us.

Ceramics are inorganic compound materials widely used in everyday items and electronic components. They possess characteristics such as heat resistance and chemical resistance, and evaluating the surface condition is important for utilizing the functions of ceramics. This document introduces a case where the cause of decreased hydrophobicity in Zr oxide ceramic materials with hydrophobic surface treatment was evaluated using TOF-SIMS. Measurement method: TOF-SIMS Product field: Manufacturing equipment and components Analysis purpose: Composition evaluation and identification For more details, please download the document or contact us.

In the manufacturing of semiconductor devices, the control of impurities such as dopants is a crucial process. When focusing on ion implantation, even slight differences can affect quality and performance, making precise control necessary. The high reproducibility of SIMS analysis is ideal for the development and maintenance of these processes.

The tape stripping method is a technique for removing the stratum corneum from the skin surface using adhesive tape, and it is an effective method for evaluating the permeability of active ingredients in cosmetics and beauty devices to the skin. Products containing tranexamic acid, known for its whitening properties (such as lotions and emulsions), were applied to a person's arm, and the process of stripping the stratum corneum with adhesive tape was repeated 30 times after a certain period. By extracting multiple pieces of adhesive tape with a solvent and analyzing the extract using LC-MS/MS, the content of tranexamic acid in the stratum corneum was quantified to evaluate its permeability to the skin. Measurement method: LC/MS Product field: Cosmetics Analysis purpose: Composition evaluation and identification For more details, please download the materials or contact us.

Fluoropolymer materials are chemically stable and possess various properties, making them widely used in industrial machinery, semiconductors, and electronics. LDI-MS (Laser Desorption Ionization Mass Spectrometry) is an analytical method that can ionize fluoropolymers with molecular weights of around several thousand while maintaining their molecular structure, allowing for the determination of the repeating units and molecular weights of fluoropolymers, as well as the estimation of end group compositions and structures. This document presents a case study on the structural analysis of perfluoropolyether (PFPE), which is used as a base oil in lubricants and heat transfer fluids. Measurement method: MALDI-MS Product field: Polymer materials Analysis purpose: Composition evaluation and identification, chemical bonding state evaluation For more details, please download the document or contact us.

The analysis of odor components is effective for evaluating the scent that characterizes a product and for identifying the causes of unpleasant odors. Many odor components exist as stereoisomers, and isomers can have completely different scents from each other. When distinguishing and analyzing stereoisomers, methods such as NMR may be used; however, this case will introduce an example using GC/MS. Chromatography allows for the clear separation and evaluation of target components from other components. Additionally, by using columns designed for isomer separation, it is possible to evaluate various stereoisomers that cannot be separated using general-purpose columns. Measurement method: GC/MS Product fields: Cosmetics, daily necessities, food, environment Analysis objectives: Composition evaluation, identification, product investigation For more details, please download the materials or contact us.

When impurities are mixed into metallic materials, depending on the combination of elements, it can affect the reduction of toughness and corrosion resistance. Therefore, it is important to understand the amount of impurities in metallic materials for quality control. GDMS can simultaneously analyze 77 elements without standard samples, making it effective for impurity analysis of samples with unknown contained elements, regardless of the matrix. This document presents a case study of impurity analysis of FeCoNi alloys using GDMS. Measurement method: GDMS Product field: Manufacturing equipment and parts Analysis purpose: Trace concentration evaluation For more details, please download the document or contact us.

Rosmarinic acid, carnosol, and carnosic acid, which are abundant in plants of the Lamiaceae family represented by rosemary, are said to have antioxidant and anti-aging effects. In particular, rosmarinic acid is known as a functional ingredient included in some functional foods because of its effectiveness in reducing temporary irritability and daytime drowsiness. This document presents a case of quantifying rosmarinic acid, carnosol, and carnosic acid in cosmetics containing rosemary leaves and rosemary extract using HPLC. Measurement method: HPLC Product field: Food and cosmetics Analysis purpose: Product investigation, composition evaluation, identification, quantification For more details, please download the document or contact us.

In precision machinery, vacuum devices, and semiconductor manufacturing equipment, contamination of the materials used can adversely affect product quality and the stable operation of the equipment. In this case, we handled glass components with disposable gloves of different types and analyzed the organic contamination adhered to the glass components using GC/MS analysis with a gas concentration device. By evaluating the contamination of the materials, it is possible to identify the components causing defects, eliminate the sources of material contamination, and consider changes to the materials.

In semiconductor manufacturing processes, the contamination of impurities can lead to a decrease in characteristics and manufacturing yield, making the prompt identification and quantification of impurity elements crucial. At MST, we qualitatively analyze impurity elements using TOF-SIMS (Static-SIMS) and quantitatively measure the detected elements in the depth direction using D-SIMS (Dynamic-SIMS), enabling the evaluation of impurities within devices. This document presents a case study of measuring metal impurities in alkali-free glass.

Perovskite solar cells have excellent conversion efficiency in a film form and can be manufactured at low cost, leading to active research and development towards practical application. TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) is effective for component analysis of the HTM layer (hole transport layer), evaluation of main components, dopants, and the depth distribution of impurities. This document presents a case study of depth analysis from the HTM layer to the perovskite layer. Measurement method: TOF-SIMS Product field: Solar cells Analysis purpose: Identification, distribution evaluation For more details, please download the document or contact us.

Perovskite solar cells are composed of various types of organic materials depending on their purpose and role. This document presents an example of qualitative analysis of organic materials using LC/MS. By utilizing high-resolution MS spectra and MS/MS spectra, we were able to identify hole transport materials and additives in the hole transport layer. It is also possible to quantify the identified materials by comparing between samples or using standard samples. Measurement method: LC/MS Product field: Solar cells Analysis purpose: Composition evaluation and identification For more details, please download the document or contact us.

The characteristic of methods such as ESI and FD, which are other soft ionization techniques, is that they can ionize polymers with molecular weights of tens of thousands, which are difficult to ionize using other methods. In MALDI-MS analysis, which combines MALDI with time-of-flight (TOF) mass spectrometry, mass spectra of polymer materials can be measured, allowing for qualitative analysis. By utilizing a mass spectrometer that switches between the high mass resolution spiral mode and the wide mass range linear mode, a broad range of materials can be evaluated. Furthermore, it is also possible to perform MS/MS analysis by colliding the sample molecular ions separated and detected in spiral mode with inert gas to induce fragmentation, allowing for the mass spectrum of the generated fragment ions to be measured. This enables the molecular structure analysis of polymer materials.

Rubber products contain various additives such as vulcanization accelerators, antioxidants, plasticizers, and lubricants. This document presents case studies of the analysis of additives found in commercially available rubber products. After immersing the rubber in an organic solvent, the resulting solution was analyzed using LC/MS/MS, revealing the presence of several additive components, including N-(1,3-dimethylbutyl)-N'-phenyl-1,4-phenylenediamine, which is commonly used as an antioxidant. By conducting LC/MS/MS analysis, comprehensive qualitative analysis is possible.

EI method: It is capable of detecting both inorganic and organic compounds, making it suitable for initial qualitative analysis. PI method: It allows detection while maintaining the molecular structure through soft ionization.

The gas chromatography time-of-flight mass spectrometer (GC-TOF MS) allows for the acquisition of precise mass information by using a time-of-flight mass spectrometer to detect components separated by GC. Compared to the integer mass information obtained from a typical quadrupole mass spectrometer, the accuracy of qualitative analysis is improved. Additionally, it is equipped with various ionization methods; the hard ionization method, EI, provides partial structural information, while the soft ionization method, FI, yields molecular weight information. By combining different ionization methods, the range of analytes that can be qualitatively analyzed is expanded. Furthermore, it is also possible to directly introduce samples into the ionization chamber, allowing for the evaluation of samples that are difficult to introduce via GC, such as thermally unstable substances and non-volatile compounds.

Among the various forms of medication, tablets are widely used, but not much is known about the state of each component within them. To gain insights into the distribution of active ingredients within tablets, we conducted TOF-SIMS analysis on the cross-section of commercially available cold medicine tablets. In the outer layer of the tablet, SiO2, presumed to be derived from lubricant components, was detected almost uniformly, while inside, the active ingredients acetaminophen, anhydrous caffeine, dl-methyl ephedrine, and noscapine were found to be dispersed in different areas.

The Corona Charged Aerosol Detector (CAD) detects components after they have been separated by HPLC and nebulized, followed by solvent removal. Therefore, volatile substances cannot be detected, but everything else is subject to detection. In CAD, particles are given a charge, and by measuring the amount of that charge, an area value corresponding to the amount of the component is obtained. In the case of a UV detector, the area value can vary significantly depending on the component, even at the same concentration, but in CAD, the difference in area values is about 10%. 1. Non-volatile and semi-volatile substances can be detected even if they do not have UV absorption. 2. Consistent responsiveness is obtained depending on the weight of the substance, allowing for semi-quantitative analysis even without standard samples. 3. High sensitivity detection is possible regardless of chemical structure (detection limits are around several hundred pg to several ng). 4. Gradient analysis is possible.

The Corona Charged Aerosol Detector (CAD) shows almost identical area values for different components if they are at the same concentration under the same analytical conditions. In gradient separation, the organic solvent composition when each component reaches the detector differs, leading to changes in sensitivity; however, this can be corrected using a reverse gradient system. Semi-quantification can be performed using calibration curves created from different components, allowing for the estimation of the quantity of components without standard samples.