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  6. Recycled CMP slurry

Recycled CMP slurry

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last updated:Oct 23, 2025

MFCテクノロジー
MFCテクノロジー
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Did you know that CMP slurry can be regenerated as CMP slurry?

Did you know that CMP slurry can be regenerated as CMP slurry? The water that is separated during regeneration is ultra-pure water originally used in the factory, and it can be recovered and reused as raw water for ultra-pure water production. If you are having trouble with CMP slurry recycling or the treatment of wastewater containing CMP slurry, please feel free to consult us.

    Other semiconductorsCeramics
MFC

Recycled CMP slurry

MFC Technology_再生CMPスラリーFlyer_20230322_1.jpg
MFC Technology_再生CMPスラリーFlyer_20230322_1.jpg

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In recent years, CMP (Chemical Mechanical Polishing) has become an essential technology in semiconductor manufacturing. A large amount of CMP slurry used in this process is discarded. Our company collects used CMP slurry discharged from semiconductor factories, reconditions it to have the same properties as new, and returns it to the semiconductor factories as part of our recycling efforts. Additionally, we also handle wastewater treatment facilities that include CMP slurry, as well as equipment for the reuse of moisture discharged during the recycling of CMP slurry.

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We have a proven track record of adoption at many domestic semiconductor factories. The regenerated CMP slurry can be used continuously for an extended period through repeated regeneration, and there are examples where regenerated products have been supplied for nearly 10 years.

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Recycled CMP slurry

Recycled CMP slurry

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MFCテクノロジー

MFCテクノロジー

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MFC Technology Co., Ltd. handles essential gas fuel cell components for fuel cell cell configurations aimed at the upcoming hydrogen and fuel cell society, chemical filters involved in the manufacturing of semiconductor chips widely used in the IoT society, and components for semiconductor manufacturing equipment such as CMP slurries.

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