Submicron feedback stage controller FC-114
Positioning with 100nm resolution! Controller for long stages.
It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, ensuring high resolution and excellent reproducibility. The FC-114 is compatible with signal inputs from slow-down sensors and ORG sensors. This controller is used when employing a long-scale submicron feedback stage. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.
- 企業:シグマ光機
- 価格:100,000 yen-500,000 yen