Vacuum destruction break filter "Reduces particles in vacuum equipment"
Try improving the throughput of vacuum devices and reducing/preventing particles!
The break filter is a high-performance diffuser for vacuum destruction that utilizes the extremely fine pores of a ceramic porous body and takes advantage of the pressure buffer effect. 【Features】 ■ Improved throughput By installing the break filter at the nitrogen gas outlet of the load lock chamber, slow venting becomes unnecessary, leading to improved throughput. ■ Prevention of particle suspension It demonstrates excellent effectiveness in reducing particles and has a significant impact on preventing sudden particle occurrences. ■ Reduced venting time ■ High corrosion resistance *For more details, please contact us.
- Company:M.WATANABE & CO.,LTD.
- Price:Other