4-axis horizontal multi-joint clean robot GCR4280-AM series
Ideal for transporting wafers and other items within semiconductor manufacturing equipment compatible with 300mm and 450mm.
The multi-axis type for super clean rooms, the 4-axis horizontal articulated clean robot GCR4280-AM series, is suitable for transporting wafers, small glass substrates, and other items within semiconductor manufacturing equipment and inspection devices, compatible with 300mm and 450mm sizes. You can choose between base type and flange type according to the equipment layout. It is possible to accommodate optimal chucks tailored to the items being transported and the equipment layout. For more details, please contact us or refer to the catalog.
- Company:ジェーイーエル
- Price:Other