Clean Robot "SHR3000 Series"
Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!
The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.
- Company:ジェーイーエル
- Price:Other