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robot(cfrp) - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS

Last Updated: Aggregation Period:Jun 10, 2026~Jul 07, 2026
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robot Product List

31~35 item / All 35 items

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4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • robot

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5-axis horizontal multi-joint clean robot GTCR5000-AM series

While it is a single arm, it maintains the functionality of a twin arm.

The GTCR5000 series is a 5-axis horizontal multi-joint clean robot compatible with 300mm, which ensures the functionality of a twin arm while being a single arm by incorporating a twin chuck. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. Depending on the equipment layout, you can choose between a base type and a flange type. It is possible to accommodate with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • robot

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

It can be used for transporting wafers inside a vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • robot

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Vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series

Compared to STVHR, the portable weight has doubled, resulting in excellent cost performance.

The vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series can be used for transporting wafers within a vacuum chamber. Compared to the STVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the STVHR for installation, allowing for a smooth transition during replacement. The adoption of a twin-arm design has reduced wafer exchange time. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • robot

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3330S series

It can be used for transporting trays weighing 4 kgf or less within the vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3330S series has a payload capacity equivalent to 10 kgf at the third joint of the arm (including chuck and work), and can accommodate a maximum allowable bending moment of 25 N·m. Due to its high rigidity and high load capacity, it is capable of transporting trays with wafers and small glass substrates. The adoption of a shuttle-type twin chuck allows for a reduction in work exchange time. The vacuum sealing method uses a magnetic fluid field-through (2-axis type) and a welded bellows (stroke 60 mm), achieving a vacuum level of 1.33×10^-6 Pa. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • robot

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