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Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S Series
By reducing the footprint, it is suitable for the transport of small-diameter wafers within semiconductor manufacturing equipment and inspection equipment, allowing for a more compact equipment layout.
By reducing the footprint, the equipment layout can be downsized.
The Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S series is suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, thanks to its reduced footprint, allowing for a more compact equipment layout. You can choose between base type and flange type according to your equipment layout. For more details, please contact us or refer to the catalog.
It features an energy-saving design using a full-axis stepping motor.
The SSCR2090S series of super clean room two-axis cylindrical coordinate clean robots is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. Each axis retains the specifications of higher-end models, including encoders, latch-type solenoid valves, and pressure switches with digital displays. For more details, please contact us or refer to the catalog.
Suitable for small wafer transport, allowing for a compact device layout.
The SSCR3115S series of 3-axis cylindrical coordinate clean robots for super clean rooms is suitable for transporting small-diameter wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, thanks to its reduced footprint and lightweight design, allowing for a more compact equipment layout. It is compatible with the SSCR2090S-PM and can be modified to have a link arm specification or a Z-axis-less specification. For more details, please contact us or refer to the catalog.
A clean robot that allows for miniaturization of device layout!
The "SCR3100S-PM series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. Its small footprint makes it suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 - Arm variation: 100mm - Z-axis variation: 200mm and 300mm - Load capacity: 0.5kgf or less at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.
A clean robot that achieves a small footprint and lightweight design!
The "SSCR3115S series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It allows for a compact device layout. Additionally, due to its small footprint and lightweight design, it is ideal for transporting small wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Maximum load capacity is 0.2 kgf or less at the third joint of the arm (work only) - Equipped with a motion monitor - Control methods include RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.
A clean robot that is optimal for wafer transport in semiconductor manufacturing equipment, such as inspection devices!
The "SCR3000CS Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is suitable for wafer transport within semiconductor equipment and inspection devices, and can accommodate optimal chucks tailored to the transported items and equipment layout. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations: 100mm, 130mm, 160mm, 200mm - Z-axis variations: selectable from 200mm onwards - Maximum load capacity: 3kgf or less based on the third joint of the arm - Equipped with operation monitoring - Control methods: RS232C and parallel photo I/O *For more details, please refer to the catalog or feel free to contact us.
Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!
The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.
Clean robot for small wafer paths!
The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.
It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.
The SCR3000CS series of three-axis cylindrical coordinate clean robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Depending on the equipment layout, you can choose between base type and flange type, and the S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. For more details, please contact us or refer to the catalog.
It is possible to choose between base type and flange type according to the device layout.
The SHR3000 series of 3-axis cylindrical coordinate robots for super clean rooms is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. You can choose between base type and flange type according to the equipment layout. The S-curve acceleration and deceleration control allows for high-speed and high-precision transport of wafers. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Optimal for wafer transport in semiconductor manufacturing equipment and inspection devices compatible with 300mm.
The GCR4000-PM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport within semiconductor manufacturing equipment and inspection devices that accommodate 300mm. It is possible to choose between base type and flange type according to the equipment layout. It can be equipped with optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
A twin-arm robot optimal for wafer transport in semiconductor manufacturing equipment!
The "STHR4000 Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. Equipped with two arms, it enables quick wafer exchanges and is primarily suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations available in two sizes: 95mm and 156mm - Z-axis variations available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Adoption of twin arms reduces wafer exchange time - Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.
A clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices!
The "STCR4000S Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. With its two arms, it enables quick wafer exchanges. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 ■ Arm variations can be selected from 100mm and above ■ Z-axis variations can be selected from 200mm and above ■ Load capacity is 3kgf or less based on the third joint of the arm ■ Adoption of twin arms reduces wafer exchange time ■ Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.
The exchange of wafers can be done in a short time with two arms.
The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
