Clean Robot×ジェーイーエル - List of Manufacturers, Suppliers, Companies and Products

3-Axis Cylindrical Coordinate Clean Robot MCR3000C Series

It offers superior cost performance compared to conventional MHR.

The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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4-axis cylindrical coordinate clean robot MTCR4000 series

It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.

The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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4-axis horizontal multi-joint clean robot GCR4000-AM series

Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.

The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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Vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series

It can be used for transporting wafers inside a vacuum chamber.

The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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3-Axis Cylindrical Coordinate Clean Robot LHR3000 Series

For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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4-axis cylindrical coordinate clean robot LTHR4000 series

It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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4-axis cylindrical coordinate vacuum-compatible clean robot FTVHR4000

Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

Company：ジェーイーエル
Price：Other

Transport and handling robots
Other industrial robots

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Clean Robot "SHR3000 Series"

Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!

The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
Other factory equipment and parts

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Clean Robot "STWHR4156 Series"

Ideal for wafer transport in acidic and alkaline mist environments!

The "STWHR4156 series" is a waterproof twin-arm 4-axis cylindrical coordinate clean robot. It is suitable for wafer transport in an acidic and alkaline mist atmosphere during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 ■ Arm variation is 156mm ■ Z-axis variation is 200mm and 300mm ■ Load capacity is 3kgf or less when calculated at the third joint of the arm ■ The arm section is coated with Teflon to ensure corrosion resistance ■ The arm joint section uses V-seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
Other factory equipment and parts

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Clean Robot 'SSCR2090S Series'

Clean robot for small wafer paths!

The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
Other factory equipment and parts

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Clean Robot×ジェーイーエル - List of Manufacturers, Suppliers, Companies and Products

Clean Robot Product List