Vacuum-compatible 10nm feedback stage system
For positioning applications within a vacuum chamber, it features built-in linear encoders for positioning with a resolution of 10nm and a maximum movement range of 100mm.
A precision positioning device (feedback stage system) that achieves a resolution of 10nm and a reproducibility of ±20nm with an integrated optical linear encoder. It can be used in a vacuum chamber with a vacuum level of up to 10^-4 Pa. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.
- Company:シグマ光機
- Price:Other