プレテック　静岡製作所 List of Products and Services

The proximity megasonic cleaning unit "PA10-Q60AE-S" directly irradiates high-frequency sound waves of 1.0MHz or 3.0MHz onto the substrate, efficiently removing fine particles and residues in a non-contact manner. Equipped with a unique liquid supply system, it ensures a uniform cleaning area up to the outer edge of the substrate. It minimizes liquid splatter and energy loss, making it suitable for the precise cleaning of semiconductor wafers and photomask substrates with fine structures. The main body is made of high-purity quartz, which has low dust generation and excellent chemical resistance, allowing for combined cleaning with strong acids and strong alkalis. Its direct irradiation method above the substrate is compatible with single-wafer cleaning devices, enabling flexible design for each process. [Applications] - Removal of fine particles from semiconductor wafers - Cleaning of residues after photoresist stripping - Cleaning after TSV, MEMS structures, and film formation, etc. *Demo units are available for you to check the usability. *For more details, please download the PDF or feel free to contact us.

• Ultrasonic Cleaner

The Sonic Checker (PT-VM02) is an ultrasonic sound pressure sensor suitable for the maintenance, inspection, and aging deterioration management of cleaning tanks for semiconductor cleaning equipment and parts cleaning. Despite being the lightest handheld type that can be held with one hand, it supports a wide frequency range from 20 kHz to 8 MHz. It prevents cross-contamination in semiconductor cleaning tanks and employs a unique detection algorithm that enables the detection of fine ultrasonic energy, which was difficult with conventional detectors. 【Main Applications】 ■ Daily management and aging deterioration management of cleaning tanks ■ Performance comparison of cleaning equipment ■ Evaluation of cavitation intensity *For more details, please download the PDF or feel free to contact us. *We also have demo units available for you to check the usability.

• Other measurement, recording and measuring instruments

The "LEO Unit PT-0878LEO" is a high-power infrared (UV) LED cleaning unit that features a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates. It achieves long running times compared to mercury lamps. By combining deep ultraviolet light with ozone water, it generates highly efficient OH radicals, contributing to the breakdown of organic substances. This product is expected to be utilized in the medical and food sectors due to its high sterilization power against viruses and other pathogens. 【Features】 ■ Achieves a cleaning liquid processing unit equipped with deep ultraviolet LEDs for a mercury-free society ■ Achieves long running times compared to mercury lamps ■ Realizes a compact design and localized ultraviolet irradiation, enabling process treatment at low flow rates *For more details, please download the PDF or feel free to contact us.

• UV/Ozone Sterilization Systems and Equipment

The "Sonic Checker PT-VM02" is a sound pressure meter that employs a compact amplifier that can be held with one hand, providing a stable user experience. It features a 7-segment LED display for improved visibility of values, and it is equipped with an auto-range function that ensures even weak sound pressures are clearly displayed. With measures taken against surrounding nozzles, it achieves a stable analog output method. Additionally, it offers a dual power supply option, allowing users to switch between AC adapter and battery operation as needed. 【Features】 ■ The sensor can be made of quartz, preventing contamination from cleaning solutions. ■ It uses a compact amplifier that can be held with one hand, ensuring a stable user experience. ■ The 7-segment LED display enhances the visibility of values, and the auto-range function ensures that even weak sound pressures are clearly displayed. *For more details, please download the PDF or feel free to contact us.

• Other measurement, recording and measuring instruments

The "Proximity Type Megasonic PA10-Q60AE-S" is a cleaning unit that emits sound waves at 1.0MHz or 3.0MHz from the nozzle tip. It enables high linearity oscillation from a low output range. Since it cleans very close to the substrate, it can remove sub-micron particles. It allows for liquid supply with a cavitation prevention function and enables a sweeping motion on the substrate, achieving highly reproducible cleaning across the entire substrate. 【Features】 ■ The nozzle material is quartz, which has low particle generation and is durable against chemical solutions. ■ Emits sound waves at 1.0MHz or 3.0MHz from the nozzle tip. ■ Enables high linearity oscillation from a low output range. ■ Cleans very close to the substrate, allowing for the removal of sub-micron particles. *For more details, please download the PDF or feel free to contact us.

• Ultrasonic Cleaner

Our company offers "Ultrasonic Cleaning Units" that support various precision cleaning applications using advanced ultrasonic technology. The ultrasonic oscillator employs high-performance transistors, allowing for the selection of output and frequency suitable for specific applications, known as "Ultrasonic." Additionally, we provide "Sweep Sonic," which continuously varies the wavelength of standing waves generated by ultrasound to completely clear the intensity of ultrasonic energy. Please contact us for inquiries. 【Ultrasonic Features】 ■ Removes particles through cavitation generated by liquid resonance of ultrasound ■ The ultrasonic oscillator uses high-performance transistors, allowing for the selection of output and frequency suitable for specific applications ■ Effective for removing particles larger than 1μ from silicon wafers, magnetic disks, lenses, cassettes (carriers), etc. *For more details, please refer to the related links or feel free to contact us.

• Ultrasonic Cleaner
• Other cleaning machines

We offer the "Fine Series Cleaning Units," including a batch cleaning unit that uses 750kHz. The "Fine Sonic (Batch Cleaning Unit)" efficiently transmits sound waves through a specially designed vibrating element, removing sub-micron particles without damaging the workpiece. Additionally, we provide the "Fine Jet (Spray Cleaning Tool)," suitable for cleaning silicon wafers and photomasks, as well as the "Fine Scall (Shower Cleaning Tool)," which sprays ultra-pure water infused with 1.5MHz sound waves for cleaning. 【Features】 < Fine Sonic > ■ Batch cleaning unit using 750kHz ■ Efficiently transmits sound waves through a specially designed vibrating element, removing sub-micron particles without damaging the workpiece ■ Suitable for cleaning silicon wafers, photomasks, and magnetic disks *For more details, please refer to the related links or feel free to contact us.

• Ultrasonic Cleaner
• Batch type cleaning machine
• Spray Cleaner

The "precision cleaning device" is a highly reliable system widely used in the cleaning processes of various precision parts and products. With the adoption of touch panels and other features, operability, safety, and maintainability have been further improved. Additionally, high-grade parts are used throughout the system to enhance its overall quality. The sophisticated ultrasonic cleaning unit achieves super clean cleaning. 【Applications】 ■ CD/LD master discs ■ Plastic lenses and optical lenses ■ Memory discs, aluminum/glass ■ LCD TFT/CF ■ Cases/cassettes *For more details, please refer to the related links or feel free to contact us.

• Ultrasonic Cleaner
• Ozone Generator
• Other cleaning machines

Our company offers a "Disk Cleaning Device" that is highly effective for cleaning memory disks and LCD glass. By adopting a cassette-less system, we have achieved improved cleaning capability and energy savings. The batch cleaning section can be selected from our wide variety of ultrasonic cleaning units according to the application, allowing for particle removal at the appropriate frequency without causing damage. [Features] - The adoption of a cassette-less system enables both batch cleaning and brush cleaning in a single device. - The brush cleaning section uses a sand scrub method, allowing for simultaneous cleaning of both sides. - The combination of the batch cleaning unit and brush cleaning unit is flexible. *For more details, please refer to the related links or feel free to contact us.

• Ultrasonic Cleaner
• Batch type cleaning machine
• Other cleaning machines

The "cassette-less cleaning device" is a product that allows for smooth robot transport without chipping and significantly reduces running costs. It uses Fine Sonic (high-frequency oscillator/transducer) to remove particles without causing damage. By adopting various super clean technologies, it resolves all the issues related to cassettes in cleaning. 【Features】 ■ Eliminates uneven cleaning in cassette contact areas ■ Achieves greater cleanliness with a smaller amount of cleaning solution in the tank ■ Significantly reduces power consumption ■ Minimizes the amount of cleaning solution during inter-tank transfers *For more details, please refer to the related links or feel free to contact us.

• Ultrasonic Cleaner
• Bio-related products Cleaning equipment

Introducing the "SpinSonic Cleaner," which achieves high cleaning capability through the adoption of a wafer horizontal placement and sheet-fed fine jet method. It can remove sub-micron particles, reduce the number of processes, and eliminate the need for chemical management and heaters. It demonstrates excellent performance that enables a reduction in cleaning time and savings in running costs. 【Features】 - High cleaning capability achieved with chemical-compatible fine jets and 400kHz fine jets - Maintenance-free and damage-free cleaning through non-contact (brushless) cleaning - Capability to perform all cleaning and drying processes in one stage - No need for heaters due to a completely ambient temperature process, significantly reducing power consumption - Compact installation area and high layout flexibility achieved through function-specific unit configuration *For more details, please refer to the related links or feel free to contact us.

• Ultrasonic Cleaner
• Bio-related products Cleaning equipment

"Fine Sonic" is a cleaning unit that achieves uniform sound pressure. It allows for stable output adjustment in 1W increments. It is suitable for cleaning various types of wafer substrates, photomasks, magnetic disks, and more. Additionally, it contributes to the expansion of the cleaning area with maximum output increase. Please feel free to contact us when you need assistance. 【Features】 ■ Achieves uniform sound pressure ■ Various frequencies available for selection [750kHz/(1000kHz)/(1500kHz)/2000kHz] ■ Fine output adjustment: stable output adjustment in 1W increments ■ Maximum output increase: expansion of the cleaning area ■ Communication function: monitoring of oscillator status, external settings (PT-150MV) ■ Compliance with various standards (FCC, CE, RoHS) *For more details, please download the PDF or feel free to contact us.

• Other cleaning equipment

"Fine Score" is a cleaning unit suitable for FPD substrate cleaning and various wafer substrate cleaning. The cleaning width ranges from 160mm to 2210mm, offering a detailed size variation. Additionally, the maximum output increase contributes to the expansion of the cleaning area and cost reduction. Please feel free to contact us if you have any inquiries. 【Features】 ■ Detailed size variation ■ Cleaning width ranges from 160mm to 2210mm ■ Fine output adjustment: stable output adjustment in 1W increments (PT-150MV) ■ Maximum output increase: expansion of the cleaning area and cost reduction ■ Communication functions: monitoring of oscillator status, external settings ■ Compliance with various standards (FCC, CE, RoHS) *For more details, please download the PDF or feel free to contact us.

• Other cleaning equipment

The "Fine Jet" is a cleaning unit that allows for the selection of various frequencies. It meets a wide range of needs for single wafer cleaning with stable oscillation from low to high output. It is suitable for various applications such as cleaning wafer substrates, magnetic disks, and post-CMP cleaning of wafers. Additionally, there are various nozzle options available, including chemical resistance and metal contamination-free types. 【Features】 ■ Fine output adjustment: Stable output adjustment in 1W increments (PT-010J50) ■ Selection of various frequencies available (400kHz/1500kHz/3000kHz) ■ Variety of nozzle options: Chemical resistance, metal contamination-free ■ Enhanced detection function: Capable of detecting transducer degradation (PT-010J50) ■ Enhanced communication function: Monitoring of oscillator status and external settings (PT-010J50) *For more details, please download the PDF or feel free to contact us.

• Other cleaning equipment