ピー・ジェイ List of Products and Services

The Pureon pressure sensor PC-302-HT-AN series offers two types: gauge pressure and absolute pressure, with high-temperature compatibility and a full scale of ±0.25% gauge pressure or better, making it a highly accurate pressure sensor. (For the 300KPG absolute pressure type, it is ±0.5%.)

• transformer

The Pureon pressure sensor PC-302-HT-AN series offers two types: gauge pressure and absolute pressure, with high-temperature compatibility and high precision, achieving ±0.25% of full scale for gauge pressure (±0.5% for the 300KPG absolute pressure type).

• filter

- It is possible to introduce a known flow rate of almost any gas (including mixed gases) into a vacuum container, etc. - The flow rate is proportional to the upstream pressure. - It is easy to generate various flow rates (conductance is constant with respect to primary pressure). - There is little temperature dependence.

• Analytical Equipment and Devices

Calibration leaks use membrane types and capillary types, but depending on the usage conditions and environment, frequent replacements due to damage or clogging may be necessary. As a solution to these issues, we have developed SCE in collaboration with the National Institute of Advanced Industrial Science and Technology.

• Analytical Equipment and Devices

■Compact and High Flow Rate This is a standard-sized inline gas filter that allows for high flow rate filtration. High Particle Removal Performance ■It efficiently removes particles larger than 0.003μm. ■Excellent Corrosion Resistance All filter media and support materials are made of fluoropolymer, and the housing is made of SUS316L material. *It can be used for a wide range of applications, including semiconductor manufacturing equipment and bulk gas supply lines for PV.

• CVD Equipment
• Etching Equipment
• Evaporation Equipment

This is a vent filter manufactured by Pureron Japan, used in semiconductor manufacturing equipment. In load lock chambers and transfer chambers, the generation of particles and transient turbulence during vacuum break can lead to particle adhesion and damage to wafers. Traditionally, this phenomenon was prevented by slowly introducing nitrogen gas through a slow vent; however, using Pureron's vent filter significantly improves throughput.

• Gas Filters

This is a pressure sensor manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines and other applications. It features a measurement medium temperature range from -10°C to a maximum of 300°C (environmental temperature: -10 to 250°C). The body is made of SUS316L material, and the gas (liquid) contact part is treated with electrolytic polishing. Additionally, the diaphragm is made of Hastelloy material, providing excellent corrosion resistance. The accuracy is ±1% F.S., ensuring high precision. It is also compatible with vacuum applications. The piping connection is available in two types: straight and T-angle, allowing compatibility with various fittings. It will be shipped in clean double packaging. Regarding the output signal, the amplification circuit can be externally mounted (standard included) and can be selected from 4-20mA or 0-5V. Furthermore, we offer a variety of high-precision pressure sensors, chemical pressure sensors (using Teflon for the liquid contact part), and display units.

• Semiconductor inspection/test equipment
• Circular Connectors
• Pressure Control

This is a digital meter relay manufactured by Pureon Japan Co., Ltd. It features Hi and Lo comparison outputs (relay output) and an analog output. It complies with the RoHS directive.

• CVD Equipment
• relay
• Display

■It can be installed as a standalone gasket for the surface seal joint of the piping. ■It can be installed on existing piping without any modifications.

• Semiconductor inspection/test equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

This is a jacket heater made by Purelon Japan Co., Ltd.

• Semiconductor inspection/test equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

This is a pressure sensor manufactured by Pureon Japan, characterized by high precision and high corrosion resistance, used for various integrated gas systems such as semiconductor manufacturing gas lines.

• Semiconductor inspection/test equipment
• CVD Equipment
• Circular Connectors

This is a pressure sensor manufactured by Purelon Japan Co., Ltd., used in semiconductor manufacturing lines and other applications. The PC-500 series uses Teflon in the wetted parts, making it safe to use in lines for semiconductor manufacturing, chemical manufacturing, and other processes, handling everything from ultra-pure water to highly corrosive media.

• Semiconductor inspection/test equipment
• others
• Circular Connectors

This is a pressure sensor manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. In the manufacturing process of semiconductor devices, reactive and corrosive special gases such as HBr and HCl, which are halogen-based, are widely used. These corrosive gases react with even the slightest moisture adsorbed on the inner surface of stainless steel materials used in pressure sensors and gas filters in the gas supply piping system, forming corrosive byproducts. These byproducts generate particles, which can lead to contamination in semiconductor processes. Pureon has developed the PC-601 series pressure sensor for corrosive special gases, utilizing Hastelloy, which has far superior corrosion resistance compared to stainless steel SUS316L, to address these corrosive special gases.

• Semiconductor inspection/test equipment
• Circular Connectors

This is a pressure sensor manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines and other applications. The PCD-905 series is a high-precision pressure sensor with a display that has excellent temperature characteristics, and it features outstanding corrosion resistance by using SUS316L material in the gas (liquid) contact part.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a digital strain gauge meter manufactured by Purelon Japan. It can be used in conjunction with Purelon pressure sensors PC-302, 501, and 601. Additionally, the power circuit and signal system are isolated, making it less susceptible to noise even when multiple displays are driven by a single power source.

• Semiconductor inspection/test equipment
• CVD Equipment
• Display

This is a digital strain gauge meter manufactured by Pureon Japan Co., Ltd. Settings can be made using a flexible jog lever for ease of operation.

• Semiconductor inspection/test equipment
• CVD Equipment
• Display

This is a digital strain gauge meter manufactured by Purelon Japan Co., Ltd. It is equipped with a high-brightness large LED for high visibility, displaying characters approximately 20 mm in height.

• Semiconductor inspection/test equipment
• CVD Equipment
• Display

This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It is capable of high-temperature baking at 200°C to ensure the removal of impurities such as water and oxygen.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a pressure sensor manufactured by Pureon Japan Co., used in semiconductor manufacturing gas lines and other applications. The PC-300 series is a high-precision sensor with excellent temperature characteristics, and it features outstanding corrosion resistance by using SUS316L double melt material in the gas (liquid) contact part.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a filter cartridge for liquid developed by Purelon Japan Co., Ltd. It is designed to effectively remove fine particles from liquids, and the media is made of Teflon, which has excellent chemical resistance and heat resistance. All materials are thermally welded, and there are no elutables.

• Hazardous material processing
• Water treatment equipment
• others

This is a pressure sensor manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications. The PC-920 series achieves a compact structure, high precision, and low cost.

• Semiconductor inspection/test equipment
• CVD Equipment
• Circular Connectors

This is a plastic filter housing made by Purelon Japan Co., Ltd.

• Hazardous material processing
• Food Cleaning Equipment
• Water treatment equipment

This is a gas purifier manufactured by Purelon Japan Co., Ltd. It is equipped with ultra-precise gas filter elements and high-purity activated carbon, efficiently removing fine particles, gaseous organic substances, and acidic impurities from dry air and inert gases at the use point.

• Semiconductor inspection/test equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

This is a pressure sensor manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications. The PC-302 series offers two types of measurements: gauge pressure and absolute pressure, with a high-temperature option available, and features a high-precision pressure sensor with a full scale of ±0.25%. For digital panel meters (displays), a dedicated Lo/Hi two-stage setting digital strain gauge meter for the PC-302 series is provided.

• Semiconductor inspection/test equipment
• Circular Connectors

This is a pressure sensor manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. In the manufacturing process of semiconductor devices, halogen-based reactive and corrosive special gases such as HBr and HCl are widely used. These corrosive gases react with even the slightest moisture adsorbed on the inner surface of stainless steel materials used in pressure sensors and gas filters in the gas supply piping system, forming corrosion products. These products generate particles, which can lead to contamination in semiconductor processes. Pureon has developed the PC-600 series pressure sensor for corrosive special gases, utilizing Hastelloy® which has far superior corrosion resistance compared to stainless steel SUS316L.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a filter cartridge for chemical liquids manufactured by Purelon Japan Co., Ltd. The media, composed of 100% polypropylene, exhibits excellent chemical resistance and heat resistance. All materials are thermally welded, ensuring there are no leachables. Additionally, the pleated filtration membrane has a large surface area, allowing for low pressure loss and high flow rates.

• Hazardous material processing
• Water treatment equipment
• others

This is a gas purifier manufactured by Pureon Japan Co., Ltd. At the use point, it removes impurities such as moisture, oxygen, and hydrocarbons contained in inert gases and special gases to a maximum of 1 PPB or less, depending on the conditions. All filter media for coarse filtration are made of SUS316L as standard. There is also a compact and lightweight type with a spacing of 84 mm and weighing 120 g. By reactivating it through baking at temperatures between 350°C and 400°C, depending on the type of gas, it can be reused repeatedly until its full lifespan.

• Semiconductor inspection/test equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

This is a stainless steel filter housing manufactured by Purelon Japan Co., Ltd.

• Hazardous material processing
• Food Cleaning Equipment
• Water treatment equipment

This is a jacket heater manufactured by Purelon Japan Co., Ltd. The controller unit is equipped with a heating prevention interlock function and a disconnection detection function for safety. It can be easily attached and detached from the filter. Temperature and time settings can be easily operated via a digital controller that allows remote operation. The heater unit is slim and lightweight, taking up minimal space.

• Semiconductor inspection/test equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

This is a pressure sensor manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines, among others. The PC-700 series features our unique electromagnetic wave shielding structure and the adoption of EMI filters and through capacitors, which effectively repel strong high-frequency noise.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment

This is a resistivity meter manufactured by Purelon Japan. The cell body is designed with a cable and connector connection method, which prevents the cable from getting in the way during installation work, such as piping. The structure of the cell part is an integrated design of the body and outer electrode, eliminating concerns about liquid intrusion into the interior. The transmitter part has been made smaller and lighter compared to conventional products, and it connects to the cell part via a connector relay, allowing for easy installation in any desired location.

• Semiconductor inspection/test equipment
• CVD Equipment
• Other semiconductor manufacturing equipment

This is a liquid filter cartridge manufactured by Purelon Japan Co., Ltd. It is made of 100% polypropylene filter material, which offers excellent heat resistance and chemical resistance.

• Hazardous material processing
• Food Cleaning Equipment
• Water treatment equipment

It is ideal for cylinder cabinets and devices with limited installation space.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is an inline ceramic gas filter manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines and other applications.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications. The filter's structural components include Hastelloy C-22 for the filter housing and ceramics for the filter element. All of these materials exhibit very high corrosion resistance and outstanding performance against halogen-based reactive corrosive specialty gases such as HBr and HCl.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a gas filter manufactured by Purelon Japan Co., Ltd. It supports a wide range of filtration precision from 0.1 to 10 μm under steady flow and pulsation conditions. Corrosive materials are not used in the filter components, so there is no risk of corrosion or secondary byproducts. By using a dedicated baking heater in conjunction, we achieved a degassing (moisture content) of 1.2 ppb in APIMS measurements. With continued use, levels down to 0.1 ppb are possible.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a gas filter manufactured by Purelon Japan Co., Ltd. All filter components are made of SUS316L, ensuring high corrosion resistance and excellent heat resistance without the risk of secondary generation of substances. When nitrogen gas (N2) is flowed at an inlet pressure of 0.2 MPa, the outlet pressure loss is △0.05 MPa, achieving a flow rate of 90 SLM. Additionally, under steady flow and pulsation conditions, a filtration precision of 0.003 μm has been confirmed using CNC, significantly improving yield in submicron ULSI manufacturing.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a gas filter manufactured by Purelon Japan Co., Ltd. It uses SUS316L for all materials. It efficiently removes particles larger than 0.003μm even under high flow rates and high differential pressures. Compared to conventional products, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size. We offer a wide range of options from low flow rates of about 10L/min to medium flow rates of about 250L/min.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a gas filter manufactured by Purelon Japan Co., Ltd. It efficiently removes particles larger than 0.003 μm even under high flow rates and high differential pressures. We offer a wide range of products from low flow rates of about 10 L/min to medium flow rates of about 250 L/min. Compared to conventional metal filters, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

We are conducting particle capture tests for particles of 0.003 μm using a total number of condensation nucleus particle counters.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a gas filter compatible with the integrated gas system manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications.

• CVD Equipment
• Stepper
• Gas Filters

This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It can handle approximately twice the flow rate with the same external dimensions as the conventional PGF series.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment
• Gas Filters

The filter membrane is made of a two-layer structure of PTFE, which has almost no elongation due to aging or vibration, ensuring stable filtration performance. A total number of particle counters using the condensation nucleus method have been used to conduct particle capture tests for particles as small as 0.003 μm.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a gas filter manufactured by Purelon Japan Co., Ltd. The filtration membrane is made of PTFE with a two-layer structure, exhibiting minimal elongation due to aging or vibration, and provides stable filtration performance. A particle capture test for 0.01 μm particles has been conducted using a fully calibrated condensation nucleus particle counter.

• Semiconductor inspection/test equipment
• CVD Equipment
• Gas Filters

This is a liquid filter cartridge manufactured by Purelon Japan Co., Ltd. It is a long-lasting filter material made of fine polypropylene fibers (non-woven fabric) arranged in a multi-layer structure with a density gradient.

• Hazardous material processing
• Food Cleaning Equipment
• Water treatment equipment