Glovebox-connected organic vapor deposition and sputtering device

Transport between chambers is achieved by the transfer rod! Continuous film formation is possible without releasing into the atmosphere!

This product is designed for 50×50 substrates and is a device that connects a resistance heating evaporation system for organic transistors and EL elements, as well as an RF sputtering system for oxides, to a glove box. It transports materials between chambers using a transfer rod, allowing for continuous film deposition without releasing to the atmosphere. Please feel free to contact us when you need assistance. 【Features】 ■ Compatible with 50×50 substrates ■ Continuous film deposition possible without releasing to the atmosphere ■ Connects a resistance heating evaporation system for organic transistors and EL elements, and an RF sputtering system for oxides to a glove box *For more details, please refer to the PDF materials or feel free to contact us.

Sputtering EquipmentEvaporation Equipment