List of Semiconductor Manufacturing Equipment products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Strong cold wind from room temperature to -13°C! Depending on the usage environment, you can choose between the combo type or the separate type!

• Cooling system

Automatic insertion of all probe pins. Exchange of any specified pins is also possible.

• Tester
• Semiconductor inspection/test equipment

The number of output channels and other output signals can also be customized according to your requests!

• Ammeter
• Testing Equipment and Devices
• Semiconductor inspection/test equipment

Compact yet high-performance. Compatible with a wide range of processes.

• Other semiconductor manufacturing equipment
• Heating device

The pure water pressure shortage and its fluctuations due to the expansion of factory facilities are resolved by the pure water booster unit! It ensures a stable supply.

• Other semiconductor manufacturing equipment
• Flow Control

It is a compactly designed manual auto-alignment exposure device (mask aligner).

• Other semiconductor manufacturing equipment

Fully automatic exposure device (mask aligner) compatible with Ø2” to 6”

• Other semiconductor manufacturing equipment

Exposure device (mask aligner) compatible with Ø200mm and Ø300mm.

• Other semiconductor manufacturing equipment

High-frequency cleaning machines suitable for precision cleaning (500kHz, 1MHz) ---- <<Test machine rental (for a fee), please contact us>>

• Other semiconductor manufacturing equipment

Introducing services that meet a wide range of needs, such as product structure verification! Useful for defective product analysis.

• Semiconductor inspection/test equipment
• Analysis Services
• LED Module

Comparing the heat dissipation characteristics of different materials! Introducing a case study of transient thermal resistance measurement.

• Semiconductor inspection/test equipment
• Circuit board design and manufacturing
• LED Module

Anode bonding device

• Hydraulic Equipment
• Granulating Equipment
• Other semiconductor manufacturing equipment

Package removal without causing physical or electrical damage! High selectivity etching.

• Etching Equipment
• Ultrasonic Cleaner
• Drying Equipment

Equipped with a flow management system! Processing of powders at high temperatures using CVD/PECVD is possible.

• CVD Equipment

Various plasma sources can be equipped! Customized design for CVD, MOCVD, and ALD equipment.

• CVD Equipment

Minimize radioactive contamination! Capable of proposing plasma excitation technology tailored to specific applications.

• Ion implantation equipment

We propose fine processing technology for next-generation package substrates using KrF excimer lasers!

• Other semiconductor manufacturing equipment

Metal, dielectric, and organic film deposition! Introducing the thermal evaporation device.

• Evaporation Equipment

The maximum film-forming temperature is 800°C! It can accommodate up to 4x DLI evaporators with the chamber heating mechanism.

• CVD Equipment

Due to lamp heating, RTP and RTCVD processing is possible! Quartz tube-type chamber.

• Annealing furnace

Turbo pump compatible! Low temperature (1100°C) / high temperature (1300°C) pyrometer.

• Annealing furnace

Supports a maximum substrate size of 156mm x 156mm! Compatible with vacuum or atmospheric transport systems and can be equipped with a load lock.

• Annealing furnace

Rapid cooling mechanism after annealing! Introducing the high-speed heat treatment equipment from Annealsys.

• Annealing furnace

Compatible with SI 500-1M, SI 500 PPD-1M, etc.! The transport chamber is available in three types.

• CVD Equipment

Control of ion density by ICP power! Achieving low-temperature film formation, low damage, and high conformality.

• CVD Equipment

High-selectivity etching! Optimization of radical supply by adjusting the spacing between the ICP source and the substrate electrode.

• Other semiconductor manufacturing equipment

Top-class throughput! Flexible modular design.

• Other semiconductor manufacturing equipment

Many safety measures specifications necessary for mass production! Compact device size with a film formation temperature of 50 to 285°C.

• Other semiconductor manufacturing equipment

500℃ wafer stage! Adoption of a remote ICP source with no plasma damage.

• Other semiconductor manufacturing equipment

For research and development, for small-scale batches! Standard equipped with a simple decontamination unit ALD Shield Vapor Trap.

• Other semiconductor manufacturing equipment

Substrate bias mechanism! Introducing our microwave PECVD/etching equipment.

• Etching Equipment

Introducing the ion beam sputtering device equipped with a maximum of 5 targets (220mm diameter) or 4 targets (300mm diameter)!

• Sputtering Equipment

Maximum 200mm diameter substrate! Double ring magnetron (Fraunhofer FEP)

• Sputtering Equipment

Mechanical clamp or electrostatic chuck compatible! Sub-nanometer etching mechanism.

• Etching Equipment

Supports wafers up to 150 or 200 mm! Etching angle and stage tilt/rotation mechanism.

• Etching Equipment

Interlock covers are also available! We have achieved further efficiency in polishing operations.

• Wafer processing/polishing equipment
• Other processing machines

Ideal for sample preparation for research and development! Successfully reduced vibration and noise significantly.

• Wafer processing/polishing equipment
• Other processing machines

High-precision angular bearings are adopted as the main axis! Achieving a flatness accuracy of ±10μm on the reference table.

• Wafer processing/polishing equipment
• Other processing machines

We offer a wide range of products, including vacuum chuck holders and adhesive holders!

• Wafer processing/polishing equipment
• Other processing machines
• Other machine elements

High-precision and high-efficiency polishing technology! A comprehensive catalog of precision polishing equipment is available as a gift.

• Wafer processing/polishing equipment

We will introduce a wide variety of grinding wheels, from fixed abrasive wheels to free abrasive wheels and polishing cloths.

• CMP Equipment
• Wafer processing/polishing equipment
• Other processing machines

More economical than manually spraying diamond liquid onto the grinding wheel! Introducing the automatic spraying device.

• Wafer processing/polishing equipment
• Other processing machines
• Other physicochemical equipment

There is no edge sagging, and there are no detachments of foreign substances, making it suitable for evaluation using methods such as EPMA!

• Wafer processing/polishing equipment
• Other processing machines

Samples for cross-sectional observation can be created precisely and easily! There is no need to touch or hold the samples directly by hand.

• Wafer processing/polishing equipment
• Other processing machines

Ideal for polishing small samples! Designed and developed to allow one machine to be used for one purpose.

• Wafer processing/polishing equipment
• CMP Equipment
• Other processing machines