Auto Focus Microscope LSAF2
AF device for high-resolution microscope inspection of wafer chip patterns.
This is an AF device for high-resolution microscope inspection of wafer chip patterns. Even when the workpiece is moved using an electric XY stage, pattern matching inspection can always be performed with a focused image. It also has a function for auto-review image files of sample height at the optimal magnification for inspection, controlled by coordinates from file data. After inspection, a macro MAP can be displayed to confirm defect locations.
- Company:アイティ・テック
- Price:Other