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pump Product List and Ranking from 1018 Manufacturers, Suppliers and Companies | IPROS GMS

Last Updated： Aggregation Period:Aug 19, 2026～Sep 15, 2026
This ranking is based on the number of page views on our site.

pump Manufacturer, Suppliers and Company Rankings

Last Updated： Aggregation Period:Aug 19, 2026～Sep 15, 2026
This ranking is based on the number of page views on our site.

  1. 荏原製作所 Tokyo//Industrial Machinery
  2. タクミナ Osaka//Industrial Machinery
  3. null/null
  4. 4 AQUASYSTEM head office・Sugoshi Factory・Overseas Subsidiary（CHINA・THAILAND・VIETNAM） Shiga//others
  5. 5 Nakakin Co., Ltd. Osaka//Industrial Machinery
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pump Product ranking

Last Updated： Aggregation Period:Aug 19, 2026～Sep 15, 2026
This ranking is based on the number of page views on our site.

  1. Ebara Standard Pump 60Hz Comprehensive Catalog 荏原製作所
  2. Home Water Supply Pump Comprehensive Catalog 荏原製作所
  3. Rotary Piston Pump: Non-contact × Accuracy × Precision Nakakin Co., Ltd.
  4. 4 Reduce pump power consumption by an average of 35%! Adjust rotation speed with an inverter. 荏原製作所
  5. 5 Hose Pump 'No Need for Vacuum Truck! Sludge and Slurry Collection DVP' タクミナ

pump Product List

1081～1110 item / All 7350 items

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Inclined Axis Hydraulic Piston Motor "MXP Series Motor" (hl)

Inclined Axis Hydraulic Piston Motor "MXP Series Motor" (hl)

A lightweight and compact hydraulic motor designed for applications primarily involving intermittent operation. It features a gearless design between the barrel and shaft for low noise!!

The "MXP" series motor is a slant-axis type motor with a 40° angle, enabling high performance in a compact casing. It is ideal for intermittent operation primarily used in vehicles and industrial applications (e.g., trucks, construction/agricultural machinery). This motor can be used in both open and closed circuits. 【Features】 ○ Lightweight and compact ○ High efficiency exceeding 90% ○ Long lifespan 　　- Prevents radial mechanical stress through appropriate design and manufacturing methods ○ Low noise 　　- Achieved by a design without gears between the rotating barrel and shaft ○ Smooth rotation and consistent torque 　　- Made possible by a 7-piston design ● For more details, please contact us or download the catalog.

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  • Hydraulic Equipment
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Fixed displacement inclined plate piston pump "PA/PAC/PAD" (hl)

Fixed displacement inclined plate piston pump "PA/PAC/PAD" (hl)

For truck applications! This high-pressure series can be used at a maximum instantaneous pressure of 500 bar for all types! It is resistant to contamination and suitable for harsh environments!

The "PA/PAC/PAD" series consists of piston pumps made up of three ranges. All types can be used for truck applications, with a continuous operating pressure of 5800 psi (400 bar) and a peak of 7252 psi (500 bar)! Thanks to its unique design, it provides a robust solution and long service life for high-pressure oil applications in trucks. 【Features】 ○ Three types for high-pressure truck specifications 　- PA: Single flow/Twin flow (supports different flow rates) 　- PAC: The most compact in the series, single/twin flow 　- PAD: Low pulsation with 10 pistons, compact, twin flow (supports different flow rates) ○ Unique design allows for use in clockwise/counterclockwise rotation without any action required from the customer ○ Two shaft seals positioned at the front of the pump 　- Outer: Designed to withstand high temperatures from the gearbox 　- Inner: Matches the requirements for hydraulic shaft seals ○ A flexible tube that discharges dirt and high-pressure wash water that has passed through the outer seal ○ High efficiency with a volumetric efficiency of over 90% proven in test labs ● For more details, please contact us or download the catalog.

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  • Hydraulic Equipment
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Fixed displacement axial piston motor "MA series motor" (hl)

Fixed displacement axial piston motor "MA series motor" (hl)

It is a "compact," "long-lasting," and "low-noise" piston motor that complies with SAE standards.

The "MA" series is a hydraulic piston motor suitable for applications that require compact size and high torque. It achieves high reliability and long service life through the use of high-quality materials and advanced design technology. It can be used in agricultural machinery such as lawn mowers and blowers, as well as in construction machinery for driving, winch drives, and fan drives. 【Features】 ○ Long service life 　- Adoption of high-load bearings 　- Automatic centering design of the barrel and valve plate (structure eliminates radial load) ○ Low noise achieved by a design without gears between the barrel and drive shaft ○ Smooth and consistent torque guaranteed by a 7-piston design ○ Lubrication piston head hole reduces wear and heat generation ● For more details, please contact us or download the catalog.

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Fixed displacement axial piston hydraulic motor "MSI series motor" (hl)

Fixed displacement axial piston hydraulic motor "MSI series motor" (hl)

It is a "compact," "long-lasting," and "low-noise" semi-integrated motor that complies with ISO standards.

The "MSI" series is a hydraulic piston motor suitable for applications that require compact size and high torque. It achieves high reliability and long service life through the use of high-quality materials and advanced design technology. The main applications include agricultural machinery such as lawn mowers and blowers, as well as driving systems for construction machinery like planetary gearboxes. 【Features】 ○ Long service life 　- Adoption of high-load bearings 　- Automatic centering design of the barrel and valve plate (structure eliminates radial load) ○ Low noise achieved by a design without gears between the barrel and drive shaft ○ Smooth and consistent torque guaranteed by a 7-piston design ○ Lubrication piston head hole reduces wear and heat generation ● For more details, please contact us or download the catalog.

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Silent Pump "2VHL Continuum Series"

Silent Pump "2VHL Continuum Series"

Capable of handling various fluids without noise! An ideal transfer pump for lubrication, filtration, and cooling.

The "2VHL Continuum Series" is a transfer pump designed to handle various fluids without noise. It features a spiral-shaped rotor from the highly efficient pump "Continuum," which boasts excellent silent and energy-saving performance. It is optimal for processing medium to high viscosity fluids, and its dimensions and flange are designed to be compatible with existing gear pumps. 【Features】 ■ Smooth pressure increase ■ High efficiency operation ■ Silent operation ■ Energy-saving effect *For more details, please refer to the PDF document or feel free to contact us.

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  • Special Pump
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Agile with inverter

Agile with inverter

Achieving improved performance of the turning system, increased reliability, and reduced system costs!

Using an electric motor equipped with the "Agile Inverter" results in a significantly more space-saving solution compared to conventional inverters with separate electric motors for turning. Additionally, using a turning device equipped with the "Agile Inverter" improves the performance of the turning system, increases reliability, and reduces system costs. 【Features】 ■ Space-saving ■ Improved performance of the turning system ■ Reduced system costs ■ Power: 1.1 kW to 11 kW ■ Built-in EMC filter for simplified EMC compliance *For more details, please refer to the PDF document or feel free to contact us.

  • Inverter
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Smooth Hydraulic Coupling Connection by Releasing Residual Pressure – Purge Adapter

Smooth Hydraulic Coupling Connection by Releasing Residual Pressure – Purge Adapter

Struggling to connect due to residual pressure? Our purge adapter solves it instantly - one button is all it takes! *Video available

The PAD Series is a purge adapter that allows for quick and easy elimination of residual pressure in piping. The lineup includes the 'PAD-2 Type,' which enhances the speed of residual pressure removal, and the 'PAD-FM Type,' which is ideal for slim inline piping. Additionally, we offer CUPLA with a built-in residual pressure purge function, which enables smooth connection even when residual pressure is present during connection work, as well as the 'ZN Series' residual pressure release jig. Features: ■ Quick and easy elimination of residual pressure in piping ■ Smooth connection with 'CUPLA' ■ Simple one-push operation ■ If the button is stiff, operation with a screwdriver is also possible (PAD-2 Type) ■ Suitable for mounting screw sizes of 3/8 or larger (PAD-FM Type) For more details, please refer to the PDF document or feel free to contact us.

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  • Pipe Fittings
  • pump

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Application Examples – Compact Compressor & Vacuum Pump Series

Application Examples – Compact Compressor & Vacuum Pump Series

Low Vibration & Quiet Operation – Discover Our Versatile Lineup for Every Application.

This catalog introduces 'Small Compressors/Vacuum Pumps.' It features a diverse lineup of products tailored to various purposes and applications, including AC-driven vacuum pumps like "AC0102" and "AC0105/AC0110," as well as AC-driven compressors like "VC0100-A2" and DC-driven compressors like "DAH110." Additionally, it provides "structural images" and "application examples." Please make use of this for product selection. [Included Content (Partial)] ■ Structural Images ■ Line-up ■ Application Examples for Small Compressors/Vacuum Pumps ■ List of AC-driven Vacuum Pump Models ■ List of AC-driven Compressor Models For more details, please refer to the PDF materials or feel free to contact us.

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Maintenance-Free Vacuum Pump & Compressor – Model DP0410T

Maintenance-Free Vacuum Pump & Compressor – Model DP0410T

Compact and Durable – Cup seal mechanism enables high vacuum, high airflow, and oil-free operation.

"DP0410T" is a twin-head flow type vacuum pump and compressor. It is equipped with a brushless motor, allowing for controlled operation. It can be easily incorporated into equipment. Additionally, we offer the "DP0410T-Y1" specifically for vacuum pumps and the "DP0410T-Y2" specifically for compressors. Features: ■ Controlled operation possible (equipped with a dedicated board) ■ Equipped with a brushless motor ■ Easy equipment integration ■ Control functions ・Variable flow rate and pressure ・Prevention of overcurrent and overload ・Protection against reverse connection For more details, please refer to the PDF document or feel free to contact us.

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Portable! Vacuum Pump/Compressor "Linicon Series"

Portable! Vacuum Pump/Compressor "Linicon Series"

Introducing vacuum pumps weighing only 1.5 kg and compressors weighing 2.3 kg! Examples of applications and product configurations are also included. *Catalog available.

This catalog introduces the "Linicon Series." "Linicon" refers to a portable air and vacuum source that can be used immediately with a power outlet and switch. It includes a detailed list of Linicon series models such as the vacuum pumps "LV-125A/LV-140A" and "LV-435A," as well as examples of applications and product configurations. Please make use of this information for product selection. 【Contents (partial)】 ■ Index by capacity ■ Performance distribution chart and pages ■ Examples of applications ■ List of Linicon series models ■ Product configuration *For more details, please refer to the PDF materials or feel free to contact us.

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BIMOR Pump BPHS Series - High-Flow Liquid Pump

BIMOR Pump BPHS Series - High-Flow Liquid Pump

Up to 40% higher flow rate compared to previous models! Suitable for chemical and liquid transfer applications. *Free catalog available upon request.

The high-flow BIMOR PUMP BPHS Series is suitable for integration into devices and equipment that utilize pressure for liquid suction, discharge, or transfer. It offers long service life and is compatible with various liquids. With its unique chamber design, the BPHS Series delivers up to 40％ higher flow than the previous BPH Series. Features: ■ Up to 40% higher flow rate compared to the BPH Series ■ Long service life ■ Compatible with various liquids ■ Easy control of flow rate and discharge pressure via voltage and frequency adjustment ■ Low-noise operation driven by piezoelectric elements For more details, please refer to the PDF catalog or feel free to contact us.

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"Compressor / Vacuum Pump / Liquid Pump" Linear Product Utilization Proposal Collection

"Compressor / Vacuum Pump / Liquid Pump" Linear Product Utilization Proposal Collection

I didn't know there were such uses! Introducing various application examples such as drip machines and chemical testing equipment! *Explaining terminology you can't ask about now and key points for adoption.

This document is a collection of utilization proposals for linear products handled by Nitto Kohki. It includes detailed information on "adopted models," "purposes of suction," and "points of adoption." Our compressors, vacuum pumps, and liquid pumps are used in various fields. Please feel free to download and take a look. 【Contents】 ■ Terminology explanation ■ Mark explanation ■ Utilization proposals for linear products - Purposes for suction/pressurization/vacuum - Points of adoption - Adopted models *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum pump
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Proposal for pumps and couplers for equipment installation! (Pumps and fittings)

Proposal for pumps and couplers for equipment installation! (Pumps and fittings)

Published a comparison chart of pump performance! Solving the problem of "There are so many types, I don't know which one to choose..."!

This catalog is a proposal catalog regarding the equipment installation of linear products such as pumps and compressors handled by Nitto Kohki, as well as the quick fluid connector "Coupler." We have included a performance summary table of pumps that solves the troubles of product selection during equipment installation. We hope you find it helpful. At the end of the catalog, we introduce case studies of pump applications and adoptions. Please feel free to download and take a look. [Contents] ■ Performance summary table of linear products ■ Introduction of the features of linear products ■ Introduction of the "Coupler" ■ Application examples *For more details, please refer to the PDF materials or feel free to contact us.

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  • Vacuum Equipment
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Portable Magnetic Application Drilling Machine "Atla Master M-250D"

Portable Magnetic Application Drilling Machine "Atla Master M-250D"

For drilling holes in soft steel materials! Commercially available twist drills (up to φ25mm) can be used.

The "AtlaMaster M-250D" is a portable magnetic drilling machine that can accommodate commercially available twist drills. It combines strong magnetic holding power with a wide range of positional adjustment, supporting powerful drilling. 【Standard Accessories】(Cutting tools are not included) - Wrench 7×8mm: 1 piece - Wrench 35×41mm: 1 piece - Hexagonal rod wrench 2.5mm: 1 piece - Handle rod: 3 pieces

  • Drill press
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For Liquid Filling Equipment and More - Vacuum Pump “DVH145”

For Liquid Filling Equipment and More - Vacuum Pump “DVH145”

Palm-sized 10 cm vacuum pump for built-in applications

The DVH145 is a DC-powered, linear-motor-driven free piston vacuum pump designed for built-in applications. In a linear-motor-driven free piston system, the piston reciprocates through the combined action of electromagnetic force and spring force. It achieves low vibration and quiet operation. This product can be used for precise liquid filling into small containers such as soy sauce bottles for bento boxes. Features: ■ Compact and lightweight ■ Quiet operation ■ Low vibration ■ Oil-free / Clean ■ Reduced pulsation ...and more

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  • Vacuum pump
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DC Pump "DP0125A", Compact and Weighing Approximately 75 g

DC Pump "DP0125A", Compact and Weighing Approximately 75 g

Newly redesigned for enhanced durability and size reduction

The DP0125A is a DC motor-driven pump that functions as both a vacuum pump and compressor. Compared to our previous model DP0125, it offers more compact design and 2.5 times greater durability. Ideal for integration into devices such as disinfectant sprayers and caregiver toothbrushes. Features: 1. Compact design 2. 2.5 times more durable (compared to previous model DP0125) 3. Dual-function: vacuum pump and compressor For more details, please refer to the PDF catalog or feel free to contact us.

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  • Vacuum pump
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DC-Driven Diaphragm Pump “DVC0301B”

DC-Driven Diaphragm Pump “DVC0301B”

Diaphragm pump with output control function for adjustable flow rate and pressure

The "DVC0301B-Y1" is a DC-driven diaphragm pump that functions as both a compressor and vacuum pump. The "DVC0301B-Y2" is a DC-driven diaphragm pump designed exclusively for compressor use. Both models feature an output control function, enabling adjustment of flow rate and pressure. Features: - Oil-free design for clean air supply - Long service life - Low operating noise and vibration Please refer to the PDF catalog for specifications and external dimensions. https://nitto-kohki.meclib.jp/L17en/book/data/L17en-a_DVC0301B.pdf

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  • Vacuum pump
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Achieving low flow and high chemical resistance! Bimor Pump "BPS-265P"

Achieving low flow and high chemical resistance! Bimor Pump "BPS-265P"

It is a piezoelectric pump that achieves high chemical resistance with a compact design and low flow rate.

The "BPS-265P," driven by a piezoelectric element, is a compact and lightweight bimorph pump that is ideal for low flow applications. With its fluororesin and perfluoro rubber construction, it exhibits excellent chemical resistance, accommodating various chemical transport in semiconductor manufacturing processes and medical and scientific instruments. Despite its compact design weighing approximately 80g, it achieves a flow rate of 36mL per minute. It employs a low-noise, long-life piezoelectric drive system, supporting precise and stable liquid transport. This model is perfect for integration into devices that require low flow control.

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Automatic control device "Motor valve with manual handle"

Automatic control device "Motor valve with manual handle"

With a manual handle! Used for various fluids, it allows for precise flow control.

This product is an automatic control device used as a flow control valve for various fluids, enabling precise flow control. It can be used in a wide range of applications, including high temperature, high pressure, and corrosive fluids, utilizing cast steel and stainless steel valves. We also offer the area-type flow relay "Flow Relay" in our lineup. 【Features】 ■ Enables precise flow control ■ Usable in a wide range of applications *For more details, please refer to the PDF document or feel free to contact us.

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Pressure-resistant explosion-proof automatic control device 'dMC-6'

Pressure-resistant explosion-proof automatic control device 'dMC-6'

Control motor used for opening and closing dampers and small butterfly valves for air conditioning.

The "dMC-6" is a control motor used in conjunction with various electric regulators for opening and closing dampers and small butterfly valves in air conditioning systems. The pressure-resistant explosion-proof structure refers to a fully enclosed design that can withstand the pressure in the event of an explosion of explosive gases inside the container, while also preventing the risk of igniting external explosive gases. 【Specifications】 ■ Torque: 60N-m ■ Stroke: 90° ■ Timing: 30/25, 60/50 sec ■ Power supply voltage: 1φAC 100V/110V 200/220V 50/60Hz DC 24V, 100V ■ Coating color: Munsell N5.0 ■ Installation conditions: -20℃ to +40℃ ■ Weight: 13.5kg, 15kg ■ Motor: Type E/Type B 30-minute rated *For more details, please refer to the PDF document or feel free to contact us.

  • Torque Control
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Pressure-resistant explosion-proof automatic control device 'dMC-10/20'

Pressure-resistant explosion-proof automatic control device 'dMC-10/20'

Introducing automatic control devices with pressure-resistant explosion-proof construction!

The "dMC-10/20" is a control motor used in conjunction with various electric regulators for opening and closing dampers and butterfly valves in air conditioning systems. The pressure-resistant explosion-proof structure refers to a fully enclosed design that can withstand the pressure of an explosion occurring inside the container due to explosive gases, while also preventing the risk of igniting external explosive gases. 【Specifications】 ■ Torque: dMC-10 100N-m; dMC-20 200N-m ■ Stroke: 90° ■ Timing: 30/25, 60/50 sec ■ Power supply voltage: 1φAC100V/110V, 200/220V, 50/60Hz ■ Coating color: Munsell N5.0 ■ Installation conditions: -20℃ to +40℃ ■ Weight: dMC-10 27kg, 29kg; dMC-20 27.5kg, 29.5kg ■ Motor: Class E, 30-minute rated *For more details, please refer to the PDF document or feel free to contact us.

  • Torque Control
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Pressure-resistant explosion-proof automatic control device 'dMPZ-200'

Pressure-resistant explosion-proof automatic control device 'dMPZ-200'

For opening and closing the airflow control dampers of high-pressure systems such as thermal power plants and cement plants.

The "dMPZ-200" is a pressure-resistant explosion-proof automatic control device that can be used for opening and closing air volume control dampers in high-pressure ducts such as those in power plants and cement plants. It is also used for position control of high-torque applications such as opening and closing sluice gates and switching conveyors. 【Specifications】 ■ Torque: 2000, 4000, and 7500 N-m ■ Stroke: 90° ■ Timing: 30/25 sec ■ Motor: 0.2, 0.4, and 0.75 kW, Type E/B, 30-minute rating ■ Coating color: Munsell N5.0 ■ Installation conditions: -20℃ to +40℃ ■ Weight: 140, 210, and 335 kg *For more details, please refer to the PDF document or feel free to contact us.

  • Torque Control
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Small Syringe Pump Centris Pump

Small Syringe Pump Centris Pump

Supports ultra-slow and low-pulsation dispensing.

Long-lasting New Concept Syringe Pump Now Available ＝＝＝＝＝ Overview ＝＝＝＝＝ The Centris Pump is a compact syringe pump module for OEM laboratory equipment that offers high accuracy, reliability, and reproducibility. The new Centris Pump features a simple yet robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ For technical specifications of the Centris Pump, please download the catalog ★ ＝＝＝＝＝ Features ＝＝＝＝＝ - Utilizes long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

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Cavro(R) Centris Syringe Pump 【Case Study】

Cavro(R) Centris Syringe Pump 【Case Study】

Case study of the introduction of Cavro® Centris syringe pump to Picarro's atmospheric water vapor isotope analyzer.

Picarro, Inc. uses the Cavro(R) CentrisPump as a component of its atmospheric water vapor isotope analyzer. The company's high-sensitivity devices are designed to operate fully automatically in remote locations, providing environmental scientists with data that helps understand the Earth's climate. For more information, please contact us or download the catalog.

  • Syringe Pump
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8-Roller Equipped Peristaltic Pump Cavro Smart Peristaltic Pump

8-Roller Equipped Peristaltic Pump Cavro Smart Peristaltic Pump

Speed control, peristaltic pump equipped with a step encoder. High-precision peristaltic pump compliant with ISO9001 and QSR.

A more reliable syringe pump for liquid handling, with a level of precision that is a cut above the rest. Advanced specifications at a low price. ● Speed control, flow direction switching, and loss control of the step encoder are managed by a stepper motor; ● Number of steps: 3200 steps in microstepping mode; ● Tube inner diameter options: 2 mmφ and 3 mmφ; ● Flow rate: 0.2 – 175 mL/min (when using a 3 mmφ inner diameter tube); ● Compliant with ISO9001 and QSR ● RS232/485/CAN bus communication method. *For more details, please download the PDF or contact us.

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New product Cavro's maintenance-free high-precision low-cost piston pump PBC.

New product Cavro's maintenance-free high-precision low-cost piston pump PBC.

1μl has a CV of less than 1%. No maintenance is required even after 5 million cycles of operation. Liquid dispensing of 0.7 seconds with a piston of 100 to 5000μl. The mechanism is inexpensive.

0.7 seconds high-speed dispensing. Proven performance in a wide variety of applications. Equipped with a pressure sensor to detect nozzle clogs and other issues. Robust design and maintenance-free operation reduce service costs for embedded devices. Contributes to a lower failure rate of the equipment. The full configuration with a base allows for easy control of valve and piston movements via commands. Report functions and error logs are also automatically sent. Control base, solenoid valves, pressure sensors, etc., are optional. A cost-effective option is available if only the mechanism is needed. *For more details, please download the PDF or contact us.

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New product Cavro PSR high-speed maintenance-free high-precision piston pump

New product Cavro PSR high-speed maintenance-free high-precision piston pump

A 3μl CV of a few percent. No maintenance required even after 15 million cycles of operation. Liquid dispensing in 0.4 seconds with a piston of 100 to 4000μl.

Proven performance in a wide variety of applications. Rugged design with a 2-year free warranty. It is also possible to discharge small amounts of liquid accurately and at high speed and pressure. Equipped with a pressure center that detects nozzle blockages. The rugged design and maintenance-free operation also reduce service costs for embedded devices, contributing to a lower failure rate of the equipment. The movement of valves and pistons can be easily controlled via commands. Report functions and error logs are also automatically sent. *For more details, please download the PDF or contact us.

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High-precision piston pump that requires no maintenance even after 5 million uses.

High-precision piston pump that requires no maintenance even after 5 million uses.

The piston movement range is 1/100 of the total, yet the coefficient of variation is in the 0.1% range. It maintains the same level of precision even after 5 million full cycles of operation.

Designed to satisfy users of compact devices with maintenance-free and stable high precision, significantly reducing the costs borne by equipment and reagent manufacturers. ■ Regarding the selection of customization options: Material of the piston Material of the piston manifold Position of the ports on the piston manifold Type of solenoid valve Material of the solenoid valve Incorporation of an encoder Position of the screws for pump installation Presence or absence of a control board Presence or absence of a pressure sensor Thickness and shape of the power cables connected to each drive unit Others *For more details, please download the PDF or contact us.

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[Case Study Collection] Ultra-High Precision Syringe Pump - Tecan's Centris

[Case Study Collection] Ultra-High Precision Syringe Pump - Tecan's Centris

Examples of utilizing a high-precision syringe pump capable of delivering and dispensing liquids finer than nanoliter units. Supports low-pulsation dispensing.

Please click on the "catalog" example collection below to download the examples. Centris Pump The Centris Pump is a compact syringe pump module for device integration that offers high accuracy, reliability, and reproducibility, with extremely low pulsation. The new Centris Pump requires almost no maintenance due to its simple and robust mechanical design. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ＝＝＝＝＝　Features　＝＝＝＝＝ - Long-life ceramic valves can also be equipped Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps (liquid delivery volume and flow rate can be adjusted in 0.3 nl increments) - Programmable flow rate: 5 nl/s to 5 ml/s (up to one stroke in 50 hours) - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

  • _DSC2799 syringe closeup.jpg
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【半導体向け】精密マイクロポンプによる薬液塗布

【半導体向け】精密マイクロポンプによる薬液塗布

半導体製造における薬液塗布を、より的確に、より正確に。装置の仕様要求を簡単にクリア。

半導体業界における薬液塗布では、ウェーハへの均一な塗布が製品の品質を左右します。特に、微細なパターン形成や高度なプロセス制御が求められる半導体製造においては、薬液の正確な分注が不可欠です。不適切な分注は、歩留まりの低下や製品不良につながる可能性があります。当社のマイクロポンプは、1μl～50mlの範囲で精密な液送を実現し、お客様の装置への組み込みを容易にするため、最適なソリューションを提供します。 【活用シーン】 ・ウェーハへのレジスト塗布 ・エッチング液の供給 ・洗浄液の供給 ・CMPスラリーの供給 【導入の効果】 ・高精度な液量制御による歩留まり向上 ・多様な薬液への対応 ・装置の小型化、省スペース化 ・メンテナンス性の向上

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