List of Transport and handling robots products

Achieves high collection efficiency through electrostatic methods. Offers a wide range of products from large to small sizes. Also compatible with water-soluble oil mist.

• air conditioning

It is possible to choose between base type and flange type according to the device layout.

• Transport and handling robots
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Suitable for small wafer transport, allowing for a compact device layout.

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It features an energy-saving design using a full-axis stepping motor.

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By reducing the footprint, the equipment layout can be downsized.

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The exchange of wafers can be done in a short time with two arms.

• Transport and handling robots
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It is suitable for wafer transport in semiconductor manufacturing equipment, inspection devices, etc.

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Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.

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The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

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It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.

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For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.

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Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.

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A buffer function has been implemented in the Alaina, allowing for wafer replacement.

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It is possible to position the susceptor at high speed and high precision using a gripping method in a vacuum environment.

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Alignment possible with minimized wafer damage using the Bernoulli method.

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It is possible to minimize contact with the wafer by adopting an edge grip method.

• Transport and handling robots
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