Contracted Services: Mass Gas Analysis <Presentation of materials with explanations of the analysis system>
Contract analysis services using a high-precision quadrupole mass spectrometry system. Detection of ultra-microscopic leaks as well.
Our company offers a service for gas analysis (leak measurement) of samples received from customers using a high-precision quadrupole mass spectrometry system. We employ a vacuum structural material made of 0.2% BeCu alloy with "low gas emission" in our analytical equipment, enabling the detection of extremely small leaks below 10^-15 Pa·m³/s (He) through destructive testing of the device. This contributes to failure analysis, quality improvement, and quality control of semiconductor devices. [Measurement Examples] ■ Measurement of residual and emitted gases between layers of semiconductor chips ■ Measurement of gas emissions from semiconductor wafer substrates ■ Measurement of residual gases within MEMS device chips ■ Ultra-small leak checks for sealed devices * In addition to introducing this service, you can view materials that explain the analytical system by downloading the PDF. Please feel free to contact us with any inquiries.
- Company:東京電子
- Price:Other