For devices that cannot be realized with just the standard ultrasonic motor stage, we design and manufacture custom-made stages ★ Proven results in space.
We design and manufacture high-speed movement, precise positioning, and vacuum-compatible stages using ultrasonic motors for applications such as prototyping and small-lot production for development purposes. Nanomotion's ultrasonic motors feature direct drive with no backlash and can hold the stage without power. They can also be used in high vacuum environments, and non-magnetic models are available for MRI and ion beam applications.
■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation
A 3-axis stage used within a vacuum chamber that has sub-nanometer step resolution using SE motors, manufactured for semiconductor 7nm process development.
■ Multi-Axis Platform for Laser Communication for Low Earth Orbit Satellites
The stage with ultrasonic motors cancels the continuous vibrations of the satellite caused by actuators, enabling laser communication with Earth.
■ Lens Drive Module for Wafer Inspection
An autofocus module using a compact EDGE motor.
*For other examples, please refer to the "Examples of Achievements" section below.
Additionally, Nanomotion's ultrasonic motors can be widely used in medical devices, spectrometers, optical alignment, analytical instruments, and more. We offer assistance with prototyping and development.
