Vacuum-compatible 1nm feedback stage system
Stage with built-in linear encoder for positioning with 1nm resolution, maximum movable range of 50mm, usable within a vacuum chamber.
A super-precise positioning device (feedback stage system) has achieved a resolution of 1nm and a reproducibility of ±2nm with respect to optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capabilities." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.
- Company:シグマ光機
- Price:Other