ALIO Industries Hexapod Stage
ALIO's hybrid hexapod capable of ±30° tilt! 360° rotation is also possible! High rigidity long stroke hexapod stage.
ALIO Industries' patent technology. A new type of hexapod called "Hybrid Hexapod" that combines the degrees of freedom of parallel kinematics with the precision and rigidity of serial kinematics. Its significant feature is that, despite being a long-stroke hexapod, it achieves a repeatability precision of ±80nm even in the standard configuration. Compared to conventional systems, it offers major advantages of being compact, high-rigidity, long-stroke, and high-precision, enabling entirely new system designs for applications such as precision machining and precision alignment.
- Company:オーテックス
- Price:Other