Small XY Axis Piezo Stage P-620.2~P-629.2
Achieving fine positioning with a maximum stroke of 1800µm and nanometer precision.
The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.
- Company:PI Japan
- Price:Other