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Atmospheric Pressure Plasma Device - メーカー・企業60社の業務用製品ランキング | イプロスものづくり

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Atmospheric Pressure Plasma Deviceのメーカー・企業ランキング

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  1. null/null
  2. JFEプラントエンジ Tokyo//others
  3. 伯東 本社 Tokyo//Electronic Components and Semiconductors
  4. 4 ジャパンクリエイト Saitama//Testing, Analysis and Measurement
  5. 5 魁半導体 Kyoto//Educational and Research Institutions
企業ランキングへ

Atmospheric Pressure Plasma Deviceの製品ランキング

更新日： 集計期間:Sep 09, 2026～Oct 06, 2026
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  1. Handheld Atmospheric Pressure Plasma Treatment Device "Piezo Brush PZ3"
  2. Digital Oil Checker "Wendy" JFEプラントエンジ
  3. PVA Tepla Corporation Microwave Plasma Treatment Device (for Pre-Processing) 伯東 本社
  4. 4 PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing) 伯東 本社
  5. 4 Atmospheric Pressure Plasma Device "Precise Series" イー・スクエア

Atmospheric Pressure Plasma Deviceの製品一覧

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DEFESA Logger Series

DEFESA Logger Series

Operation log products for virtual environments and desktop cloud environments!

Our "DEFESA Logger Series" is a product that generates and acquires various operation history logs on Windows OS. With our unique log acquisition technology specialized for thin client environments, it records detailed operation histories such as application usage, web access, and communication history at the user level without putting a load on the PC. In server-based thin client environments, we have an overwhelming sales record and have maintained a top-class market share as a representative operation log generation product on Citrix XenApp/Terminal Services since its release. 【Features】 ■ Stronger security measures ■ Excellent environmental adaptability ■ Detailed and comprehensive logs can be acquired ■ Unique log generation technology that does not burden the PC *For more details, please download the PDF or feel free to contact us.

  • Other security
  • Atmospheric Pressure Plasma Device

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Batch-type equipment "Flexicoer Series"

Batch-type equipment "Flexicoer Series"

Multiple plasma technologies can be integrated into a single device!

Our batch-type device, the 'Flexicoer Series', is built on a modular concept that seamlessly integrates scalability and reliability at a high level. It is possible to incorporate multiple plasma technologies into a single device. Additionally, it is always possible to upgrade delivered devices with new technologies. Due to its diverse customization options, we can provide devices tailored specifically to our customers' needs. 【Features】 ■ A modular concept that integrates scalability and reliability at a high level ■ Capable of incorporating multiple plasma technologies into a single device ■ Always possible to upgrade delivered devices with new technologies ■ Diverse customization options available, allowing us to provide devices unique to our customers *For more details, please download the PDF or feel free to contact us.

  • Plasma surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Atmospheric Pressure Plasma Device Air Plasma Series

Atmospheric Pressure Plasma Device Air Plasma Series

Quality control of surface modification using atmospheric pressure plasma devices with various options.

The "Air Plasma Series" is an atmospheric pressure plasma surface modification device that controls various plasma quality management options via a touch panel. With easy touch panel operation, you can change the plasma output (500W to 1000W) and set the minimum and maximum limits for the input air pressure, creating a stable operating environment. Since it allows for detailed processing condition distribution, it can be utilized in development and laboratories, expanding the possibilities of atmospheric pressure plasma. Additionally, it is equipped with an on-off delay function and a temperature sensor function, making it suitable for use on production lines. 【Features】 ■ Adopts various plasma quality management options ■ Easily change plasma output via touch panel ■ Equipped with on-off delay function and temperature sensor function ■ Optimized for production lines and research *For more details, please refer to the PDF document or feel free to contact us.

  • 企業：AETP Japan
  • 価格：1 million yen-5 million yen
  • Plasma surface treatment equipment
  • Other surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Atmospheric Pressure Plasma Treatment Frame Plasma 'AFP'

Atmospheric Pressure Plasma Treatment Frame Plasma 'AFP'

A wide variety of burner designs! An atmospheric pressure frame plasma device that easily adapts to the usage environment.

The "AFP" is a frame plasma device designed to perform surface treatment and surface cleaning with very high combustion efficiency using LNG, LPG, and compressed air. It allows for direct adjustment of gas and air flow to create the desired flame state. Additionally, it features a wide variety of burner designs and is designed for dual use with LPG/LNG, making it adaptable to the customer's usage environment. 【Features】 ■ Capable of surface treatment and surface cleaning with very high combustion efficiency ■ Can create the desired flame state ■ Wide variety of burner designs ■ Designed for dual use with LPG/LNG ■ Easily adaptable to usage environments *For more details, please refer to the PDF materials or feel free to contact us.

  • Plasma Generator
  • Atmospheric Pressure Plasma Device

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Atmospheric Pressure Plasma Device Air Plasma ECO Series

Atmospheric Pressure Plasma Device Air Plasma ECO Series

[Exhibition at Automotive World 2020] Low cost! Simple and economical atmospheric pressure plasma device, Air Plasma ECO series.

The "Air Plasma ECO Series" is a model developed to be simple and economical by not including a touch panel function, starting from the general type AP-4000 plasma device. The high-voltage transformer and control board that govern the processing effect are the same as those in the AP-4000 series, but the plasma output is set to either 500, 750, or 1000W at the time of order and shipped accordingly. 【Lineup】 ■ AP-4000 ECO Model (Fixed Head Type with 1 Head) ■ AP-4000R ECO Model (Rotating Head Type with 1 Head) ■ AP-4000 ECO MULTI Model (Fixed Head Type with Multiple Heads) ■ AP-4000R ECO MULTI Model (Rotating Head Type with Multiple Heads) *For more details, please refer to the PDF document or feel free to contact us.

  • 企業：AETP Japan
  • 価格：1 million yen-5 million yen
  • Plasma Generator
  • Plasma surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Ultrasonic surface cleaning system

Ultrasonic surface cleaning system

Introducing the surface cleaning system using ultrasound, including PCB cleaning and metal mask cleaning!

AETP's ultrasonic cleaning system is manufactured using a 100% custom-made approach, allowing us to select detergents suitable for your products and design the output, direction, and position of the ultrasonic waves to provide an optimized surface cleaning environment. We are capable of processing a variety of products, including precious metals, molds, recycled parts, gears, and industrial equipment. We also manufacture smaller-sized products tailored for restaurants and small-scale applications, so please feel free to contact us at any time. 【Advantages of AETP Ultrasonic Cleaning System】 ■ 100% custom-made approach ■ Selection of detergents suitable for your products, along with the design of ultrasonic output, direction, and position to provide an optimized surface cleaning environment ■ Capable of processing various products, including precious metals and molds ■ Ability to manufacture smaller-sized products *For more details, please refer to the PDF materials or feel free to contact us.

  • Ultrasonic Cleaner
  • Atmospheric Pressure Plasma Device

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Evaluate the processing effect of the atmospheric pressure plasma device using surface tension test ink.

Evaluate the processing effect of the atmospheric pressure plasma device using surface tension test ink.

Wet reagents for measuring surface wettability modification by plasma treatment, surface tension test ink.

Introducing the "Surface Tension Test Ink" handled by AETP. It is an environmentally friendly ethanol-based product. Due to its high manufacturing frequency, it maintains freshness. By using this product, you can clearly see the differences in surface tension. 【Features】 ■ Patented unique ink formulation ■ Measures surface tension in 3 seconds ■ Yellow pigment makes it easy to read even on dark materials ■ Affordable price ■ Environmentally friendly ethanol-based ■ Maintains freshness due to made-to-order production *For more details, please refer to the PDF document or feel free to contact us.

  • Other measurement, recording and measuring instruments
  • Chemicals
  • Atmospheric Pressure Plasma Device

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Application to automotive parts: AETP atmospheric pressure plasma device

Application to automotive parts: AETP atmospheric pressure plasma device

AETP atmospheric pressure plasma treatment is effective for painting, bonding, and cleaning.

The AETP atmospheric pressure plasma device has a proven track record in pre-treatment for bonding automotive interiors and exteriors, as well as in dry cleaning electronic components. The AETP atmospheric pressure plasma device, which poses no concerns regarding ozone, contributes to improving the working environment and enhances the reliability of various parts and materials processing. The optimal processing conditions for atmospheric pressure plasma vary depending on the shape and material of the substrate. Therefore, for customers considering a purchase, we offer an initial sample processing test free of charge. We would like to work with you to determine which treatments are most suitable for your components, so please feel free to consult with us. *For more details, please refer to the catalog or feel free to contact us.*

  • 企業：AETP Japan
  • 価格：1 million yen-5 million yen
  • Other processing machines
  • Atmospheric Pressure Plasma Device

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Solving the challenges of the next preprocessing! "Atmospheric Pressure Plasma Device"

Solving the challenges of the next preprocessing! "Atmospheric Pressure Plasma Device"

Partial adhesion failures occur... We want to process without using solvents for safety... Our atmospheric pressure plasma device solves these issues related to adhesion pre-treatment!

Are you facing these issues in your subsequent preprocessing? - Partial adhesion failures occur... - You want to process without using solvents for safety... - You are looking for equipment that can be retrofitted to the manufacturing line... AETP Japan's "Atmospheric Pressure Plasma Device" solves these concerns! The atmospheric pressure plasma device not only physically roughens the material surface at the nano level but also strengthens adhesion by chemically bonding. We offer various types of nozzles to allow for selectable processing widths, excelling in partial treatments and processes that do not damage materials. Since it consists only of a plasma generation device and a nozzle, it is compact in size and can be easily retrofitted to the manufacturing line. With an easy-to-implement pricing structure, it is also recommended for those considering alternative equipment!

  • Plasma Generator
  • Atmospheric Pressure Plasma Device

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PVA Tepla Corporation Microwave Plasma Treatment Device (for Pre-Processing)

PVA Tepla Corporation Microwave Plasma Treatment Device (for Pre-Processing)

From batch processing equipment equipped with unique wafer transfer machines to sheet processing equipment, they are used in fabs around the world for MEMS and semiconductors.

By exciting high-density plasma with 2.45GHz microwaves and suppressing the kinetic energy of ions, it is possible to achieve damage-free process results. It is designed to accommodate a wide range of applications, including ashing in wafer processes, resist stripping, SU-8 resist ashing for MEMS, descum processing, and surface cleaning and activation of substrates.

  • Ashing device
  • Atmospheric Pressure Plasma Device

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PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

We have a proven track record for customers in OSAT around the world and have established our position with reliable performance.

By generating high-density plasma using microwaves (2.45GHz), highly effective surface treatment becomes possible. Additionally, you can choose from various process forms that cater to your different packaging processes. It is designed for chip packaging, including die attach, wire bonding, flip chip, underfill, and resin sealing, for substrate cleaning and surface activation.

  • Ashing device
  • Atmospheric Pressure Plasma Device

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Manufacturing results: Experimental high vacuum equipment

Manufacturing results: Experimental high vacuum equipment

A case of introducing an experimental device for surface treatment in a high vacuum into the surface treatment process of a research institution!

We would like to introduce our achievements in the manufacturing of an "experimental high vacuum device" for the development of high-performance new lasers. We have introduced an experimental device for surface treatment in a research institution's surface treatment process, which operates under high vacuum conditions. The vacuum chamber is made of stainless steel, has a capacity of approximately 26.5L, and its dimensions are 400mm in width, 290mm in depth, and 340mm in height. Please feel free to contact us when you need assistance. 【Overview of Achievements】 ■ Vacuum Chamber Material: Stainless Steel ■ Vacuum Chamber Size: 400mm (W) × 290mm (D) × 340mm (H) ■ Vacuum Chamber Capacity: Approximately 26.5L ■ Achievable Vacuum Level: Below 1×10^-4 Pa ■ Vacuum Pump: Rotary Pump + Turbo Molecular Pump ■ Control/Operation: Manual (Automatic option available) *For more details, please refer to the related links or feel free to contact us.

  • Vacuum Equipment
  • Atmospheric Pressure Plasma Device

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What is plasma?

What is plasma?

It can be made odorless through oxidative decomposition! Highly reactive particles such as ozone are generated, making disinfection possible.

We would like to introduce the "Plasma" that we handle. It has features such as simultaneous deodorization and disinfection, the ability to reduce CO2 when used with adsorbents, and extremely low power consumption. Additionally, our products use filters primarily as a supplementary role, effectively plasma-activating the air for high efficacy in disinfection, virus removal, and odor elimination. 【Features】 ■ Simultaneous deodorization and disinfection ■ CO2 reduction when used with adsorbents ■ Extremely low power consumption ■ Capable of processing large volumes ■ No daily maintenance required *For more details, please refer to the PDF materials or feel free to contact us.

  • Plasma Generator
  • Atmospheric Pressure Plasma Device

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Tabletop / Standalone Atmospheric Pressure Plasma Device

Tabletop / Standalone Atmospheric Pressure Plasma Device

A wide variety of simple tabletop atmospheric pressure plasma devices and direct-type devices are featured.

We would like to introduce our "Tabletop / Standalone Atmospheric Pressure Plasma Devices." Starting with the simple tabletop atmospheric pressure plasma device "MyPL series," we also offer the standalone "ILP series," direct plasma devices using inert argon as the carrier gas, and the atmospheric pressure plasma head unit "MD series" that utilizes argon gas. Additionally, we provide a bar-type atmospheric pressure plasma unit using N2, which can irradiate curved and uneven workpieces. 【Product Lineup】 ■ Tabletop Atmospheric Pressure Plasma Device "MyPL series" ■ Atmospheric Pressure Plasma Device "ILP series" ■ Direct Plasma Device ■ Atmospheric Pressure Plasma Head Unit "MD series" ■ Long-Distance Irradiation N2 Plasma Unit *For more details, please refer to the PDF materials or feel free to contact us.

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  • Other physicochemical equipment
  • Other surface treatment equipment
  • Plasma surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Utilization of Atmospheric Pressure Plasma Coating

Utilization of Atmospheric Pressure Plasma Coating

I will provide a detailed explanation of ultra-strong dissimilar material bonding.

This document contains information about injection molding of plastics and metals utilizing atmospheric pressure plasma coating. It explains topics such as pre-treatment for bonding, polymerization using atmospheric pressure plasma, and properties like airtightness and corrosion resistance. [Contents (excerpt)] ■ Functional, flexible, and highly reliable manufacturing ■ Comparison of shear strength ■ PST resin compound ■ Joining of dissimilar materials contributes to the electronics industry ■ Adhesion with long-term stability *For more details, please refer to the PDF document or feel free to contact us.

  • Plasma surface treatment equipment
  • Injection Molding Machine
  • Atmospheric Pressure Plasma Device

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Plasma nozzle "PFW70"

Plasma nozzle "PFW70"

This is a nozzle suitable for parts that require uniform treatment on a wide surface.

The "PFW70" is a straight-type plasma nozzle. It is designed to perform surface treatment in a linear arrangement of plasma irradiation holes, and the Openair-Plasma beam emitted from the nozzle adopts a potential-free approach. Due to the minimal thermal impact, it is suitable for pre-treating heat-sensitive materials, particularly sheet materials and synthetic non-wovens. 【Features】 ■ Linear irradiation for wide plasma treatment ■ Adopts potential-free technology ■ Mainly utilized for high-speed and wide pre-treatment of flat materials ■ The nozzle body can be modular ■ The treatment width can be flexibly expanded *For more details, please refer to the PDF document or feel free to contact us.

  • nozzle
  • Plasma Generator
  • Plasma surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Two-color molding atmospheric pressure plasma technology 'InMould-Plasm(R)'

Two-color molding atmospheric pressure plasma technology 'InMould-Plasm(R)'

Atmospheric pressure plasma device that can be integrated into molds. Even materials that were considered incompatible can be bonded together without solvents or adhesives using a single molding machine, reducing production time.

The "InMould-Plasma(R) method" incorporates a plasma nozzle into a two-color molding machine, allowing for surface modification during the molding process. This enables continuous processing of hard and soft materials and surface treatment with a single molding machine, significantly improving adhesion strength. It can firmly bond materials that are difficult to join, greatly increasing the range of material options and allowing for greater freedom in design and engineering. Surface treatment with atmospheric pressure plasma modifies the materials and is shorter than the cooling time of the molding materials, thus not affecting the production process and enabling improved production efficiency through process consolidation. ★ You can view explanatory materials for this method by downloading the PDF. 【Features】 ■ Molding is possible without a primer even for incompatible combinations of PP and TPU. ■ Compatible with various molds such as turntables and slide tables. ■ Almost no temperature impact on the objects being treated due to plasma processing. ■ Surface treatment can be performed while the molded items are solidifying, ensuring a reliable tact time. ■ Prevents misalignment and loss of packing, reducing defect rates. ■ Controls plasma output, pressure, and temperature to achieve a high-quality process.

  • Other processing machines
  • Atmospheric Pressure Plasma Device

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Improved adhesion even with difficult-to-bond materials 'Openair-Plasma(R)'

Improved adhesion even with difficult-to-bond materials 'Openair-Plasma(R)'

Openair-Plasma® is a high-speed, ozone-free surface treatment technology. It is easy to integrate into robots and allows for dry inline processing!

Features of the independently developed generator FG5001S: ● Compatible with various materials such as composite materials, CFRP, general-purpose plastics, and metals ● Simultaneous surface cleaning and activation processing ● Automation of the surface treatment process ● Compact yet compatible with multi-nozzle systems ● Visualization achieved through touch panel operation ● Process management through a control system ● Process data can be output externally ● Ozone-free, making it easy to integrate into production lines ● Customizable processing width according to conditions *For more details, please download the materials or contact us.

  • Plasma surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Surface treatment essential for automobile manufacturing: atmospheric pressure plasma treatment technology.

Surface treatment essential for automobile manufacturing: atmospheric pressure plasma treatment technology.

Introducing case studies of solutions using Openair-Plasma® in the automotive manufacturing industry.

In the automotive industry, robust and adjustable processes have been used to achieve stable high quality. Additionally, when manufacturing parts with complex shapes, the use of durable adhesive bonding technology and high-performance materials becomes a key parameter. Openair-Plasma® is a technology that meets the stringent requirements of the automotive industry. As a result, it has established a solid position in various manufacturing processes of major manufacturers. 【Examples of Openair-Plasma® solutions in automotive manufacturing】 ■ Improved adhesion for headlights and taillights made of PP/PC ■ Pre-treatment for adhesion/printing/flocking on EPDM profiles ■ Automotive interior parts: Automated uniform surface treatment even for 3D shapes ■ Automotive exterior parts: Long-term stable adhesive bonding of dissimilar materials ■ Improved sealing for powertrains/electronic devices ★☆★☆ We will be exhibiting at the 2023 Automotive Technology Exhibition at Pacifico Yokohama ☆★☆★ 　　　　　　　　Booth number: 195

  • Plasma surface treatment equipment
  • Atmospheric Pressure Plasma Device

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Roll-to-roll plasma processing device (RtoR plasma device evaluation tests now accepting applications)

Roll-to-roll plasma processing device (RtoR plasma device evaluation tests now accepting applications)

We have a proven track record in the transportation and processing of fibers, accommodating a wide range of applications from electronics to advanced materials!

Our company offers an RtoR-type "plasma treatment device" suitable for surface treatments such as cleaning and hydrophilization of flexible substrates like films and metal foils. With vacuum plasma, it is possible to select process gases and plasma modes tailored to the substrate and application, addressing processes that are difficult with atmospheric pressure plasma. We share a common basic structure with our well-established roll-to-roll sputtering equipment, aiming to improve reliability and reduce costs. It is effective for surface treatment before thin film deposition, achieving significant results in the removal of organic materials and hydrophilization. 【Features】 ■ Effective surface treatment using vacuum plasma ■ Selectable plasma modes (DC, RF / ion gun) for process optimization ■ Flexible customization options *For more details, please feel free to contact us.

  • Other physicochemical equipment
  • Heating device
  • Atmospheric Pressure Plasma Device

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Nozzle cleaning type high-pressure spray cleaning device

Nozzle cleaning type high-pressure spray cleaning device

Nozzle cleaning type high-pressure spray cleaning device

Conveyor continuous transport supports a variety of products and high throughput High-pressure spray cleaning device 【Features】 ○ Conveyor transport type automatic cleaning machine (nozzle cleaning machine) ○ Cleans oil and contaminants after pressing ○ Supports a variety of products and high throughput with conveyor continuous transport ● For other functions and details, please contact us.

  • Other cleaning machines
  • Atmospheric Pressure Plasma Device

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Plasma Device PiPi

Plasma Device PiPi

Compact tabletop plasma device PiPi

- Space-saving, ideal for research and development purposes - User-friendly, low-cost device that is easy to operate - Recommended vacuum pump PD139 - Dedicated to RIE mode

  • Etching Equipment
  • Ashing device
  • Surface treatment contract service
  • Atmospheric Pressure Plasma Device

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Plasma Ion Injection Film Deposition Device PBII-R1000

Plasma Ion Injection Film Deposition Device PBII-R1000

It can also be used as a production machine and is adopted by many users.

The Plasma Based Ion Implantation & Deposition (PBII&D) is a completely new plasma ion implantation technology developed in collaboration with Kurita Manufacturing Co., Ltd. and the Kansai Center of the National Institute of Advanced Industrial Science and Technology, and it has been patented (Patent No. 3555928). DLC coating is also possible. Due to its ease of handling, it can be used as a production machine and has been adopted by many users. For more details, please contact us or refer to the catalog.

  • Plasma surface treatment equipment
  • Ion implantation equipment
  • Atmospheric Pressure Plasma Device

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Spin Cleaning Device Spray Development Device SD-8004 Type

Spin Cleaning Device Spray Development Device SD-8004 Type

Automatic and manual operation will perform developing, rinsing, washing, and spin drying!

The SD-8004 model is a spin spray development system for 4" to 8" wafers. It performs developing, rinsing, water washing, and spin drying through automatic and manual operation. Condition settings are done via a touch panel on the operation panel. Each processing mode is displayed on the touch panel during the respective mode. For more details, please contact us or refer to the catalog.

  • Coater
  • Other semiconductor manufacturing equipment
  • Atmospheric Pressure Plasma Device

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Single Leaf Spin Spray Cleaning Device SRC-15001

Single Leaf Spin Spray Cleaning Device SRC-15001

High-pressure pure water is sprayed from a 2-fluid nozzle, followed by finishing cleaning with megasonic!

SRC-15001 is a sheet-type spray cleaning device. Place the item to be cleaned on the sample table, and by turning ON the start switch, the sample table begins to rotate while the nozzle arm swings the radius of the cleaning item, spraying high-pressure pure water from a two-fluid nozzle. Next, finishing cleaning is performed using megasonic waves, followed by spin drying. For more details, please contact us or refer to the catalog.

  • Coater
  • Other semiconductor manufacturing equipment
  • Atmospheric Pressure Plasma Device

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Custom-made production achievements: CVD equipment

Custom-made production achievements: CVD equipment

We have a track record of equipment such as 'plasma CVD systems for metal containers' and 'ICP-type MOCVD systems'!

We would like to introduce the custom manufacturing achievements of Japan Create Co., Ltd. regarding "CVD equipment." We have a track record that includes "Plasma CVD equipment for solar cells," "Plasma CVD equipment for three-dimensional objects," "Plasma CVD equipment for metal containers," and "ICP-type MOCVD equipment." Sample processing is being conducted using demo units. Please feel free to contact us if you have any inquiries. 【Manufacturing Achievements (Excerpt)】 ■ Plasma CVD equipment for solar cells ■ Plasma CVD equipment for three-dimensional objects ■ Research and development load-lock type plasma CVD equipment ■ Plasma CVD equipment for metal containers ■ Plasma CVD equipment for medical containers *For more details, please refer to the PDF materials or feel free to contact us.

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  • CVD Equipment
  • Atmospheric Pressure Plasma Device

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Dry etching equipment

Dry etching equipment

Switching between RIE mode and DP mode is possible! Reduction of metal contamination through special surface treatment.

The "Dry Etching Equipment" is a mass production device capable of fully automatic continuous processing of substrates up to φ12 inches. It features a dual-frequency independent application method that reduces metal contamination through special surface treatment. We also offer multi-chamber specifications and various custom-made options. This versatile device enables etching, ashing, and ion cleaning by switching gas types and plasma modes. 【Features】 ■ Switchable between RIE mode and DP mode ■ Reduction of metal contamination through special surface treatment ■ Compact footprint ■ Dual-frequency independent application method ■ Ultra-low temperature cooling stage *For more details, please refer to the PDF materials or feel free to contact us.

  • Etching Equipment
  • Atmospheric Pressure Plasma Device

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Organic EL evaporation device

Organic EL evaporation device

You can freely choose from the plasma cleaning chamber, organic deposition chamber, electrode deposition chamber, sealing chamber, and more!

The "Organic EL Deposition Device" is a multi-chamber system suitable for device and material development. It is capable of processing from pre-treatment to film formation and sealing without exposure to the atmosphere. Depending on the purpose, you can freely choose from a plasma cleaning chamber, organic deposition chamber, electrode deposition chamber, sealing chamber, etc. 【Features】 ■ Supports substrate sizes up to 300mm ■ Deposition cells can be selected from various materials and sizes ■ Can be combined with CVD chambers, sputtering chambers, etc. ■ Custom orders can also be manufactured ■ Sample processing is conducted using a demo machine *For more details, please refer to the PDF document or feel free to contact us.

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  • Evaporation Equipment
  • Atmospheric Pressure Plasma Device

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Pressurized RTA device

Pressurized RTA device

Maximum substrate heating temperature of 1000℃! Reduces element loss specific to the substrate surface heating process!

The "Pressure RTA Device" is a product that can handle processes from vacuum to pressurization (0.9 MPaG). The heating source is a halogen lamp, and the heating rate can reach up to 150°C/sec, achieving excellent substrate temperature distribution and gas flow methods. This device can be used for applications such as semiconductors, MEMS, and electronic components, enabling high-speed thermal oxidation, crystallization, and annealing treatments on the substrate surface. 【Features】 ■ Reduces element loss specific to the heating process ■ Capable of handling processes from vacuum to pressurization (0.9 MPaG) ■ Enables high-speed thermal oxidation, crystallization, and annealing treatments on the substrate surface ■ Achieves excellent substrate temperature distribution and gas flow methods ■ Compatible with tray transport ■ Multi-chamber specifications can also be manufactured *For more details, please refer to the PDF document or feel free to contact us.

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  • Heating device
  • Annealing furnace
  • Atmospheric Pressure Plasma Device

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