[Analysis Case] Composition Analysis of GaN-based LED Structures using SIMS
Capable of evaluating the composition of the main elemental components of GaN-based LEDs in the depth direction.
In general, the quantification of major elements with concentrations exceeding a certain percentage in SIMS is considered to be low. However, by using the M Cs+ (M: element of interest) detection mode with Cs+ as the primary ion, it is possible to determine the compositional distribution of major element elements in the depth direction. An example of depth compositional evaluation for Al, Ga, and In in GaN-based LED structures is presented.
- Company:一般財団法人材料科学技術振興財団 MST
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