ピーアイ・ジャパン List of Products and Services

A robust and highly precise hexapod designed for industrial applications, based on the premise of operating 24 hours a day, 365 days a year. Despite its compact design, it offers high durability and achieves reliable positioning even in harsh environments.

• Testing Equipment and Devices

The C-887.52X is equipped with a 32-bit PID controller optimized for hexapod control, allowing for 6 degrees of freedom positioning with a single command. It supports various communications such as EtherCAT, USB, and RS-232, and is also equipped with analog/digital I/O and BNC connectors. LabVIEW, Windows DLL, and Linux drivers are provided, enabling flexible control according to the development environment. It also features reference switches and stall detection functions, ensuring safety considerations are taken into account.

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• Servo
• Amplifier

The H-850 is a high-rigidity hexapod boasting a maximum load capacity of 250 kg, capable of extensive movement with ±50 mm (XY) / ±25 mm (Z) and ±30° range of motion. Its reproducibility is highly precise, with a Z-axis accuracy of ±0.2 µm and a rotational axis accuracy of ±7.5 µrad. Smooth operation is achieved through a brushless DC gear motor, and immediate position acquisition is facilitated by an absolute encoder, allowing for fast and stable control. The structure employs a parallel kinematic design, making it ideal for robotics, heavy object alignment, and testing equipment.

• Actuator
• Other industrial robots
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The H-840 is a high-precision hexapod that employs a Stewart platform structure and is driven in parallel by six actuators. It achieves flexible motion with a Z-axis range of ±25mm, X/Y direction of ±50mm, and rotation of ±30°, enabling advanced position control for applications such as optical alignment and micromanipulation. It can accommodate loads of up to 30kg and features a position repeatability of ±0.1µm along with high control accuracy.

• Actuator
• Other industrial robots
• encoder

The H-825, with a Z-axis reproducibility of ±0.1µm and a high-rigidity design, is suitable for precise operations in semiconductor manufacturing and optical adjustment fields. It has a maximum load capacity of 30kg and can operate immediately without initialization due to its brushless DC gear motor drive and absolute rotary encoder. It achieves stable high-precision positioning and posture control.

• Actuator
• Other industrial robots
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The H-811.I2 is a compact hexapod capable of high-precision positioning across all six axes. In addition to a movement range of ±17mm in the XY plane and ±6.5mm in the Z direction, it allows for rotation control of ±21°. Thanks to its parallel kinematic design, interference and errors are minimized, ensuring stable operation. It is particularly reliable for operation in vacuum or confined spaces, excelling in precision fields that require reproducibility and rigidity. It can support loads of up to 5kg.

• Other industrial robots
• Actuator
• encoder

The D-510 PISeca is a single-electrode capacitive sensor that achieves a maximum measurement range of 500µm and a resolution of less than 1nm. The sensor probe is easy to install with a LEMO connector. Uniformity of the electric field is ensured by the guard ring electrode, achieving high linearity (maximum 0.1%). When combined with dedicated electronics such as the E-852.10, it enables excellent nanometer-level displacement measurements with both static and dynamic resolution.

• Sensors
• Converters and Transducers
• Other electronic parts

The D-050/D-100 is a two-electrode capacitive sensor provided by PI that achieves a measurement range of up to 150µm and a resolution of 0.01nm. It is ideal for nanometer-scale measurements due to its higher resolution than interferometers and its non-contact method. It supports parallel measurements and allows for real-time correction in multi-axis control. Linearity is less than 0.01% (when using a digital controller), and the bandwidth is up to 10kHz. It is suitable for clean environments, semiconductor manufacturing, and integration into measuring instruments.

• Sensors
• Converters and Transducers
• Other electronic parts

The U-781 is an XY stage that utilizes PILine® piezo linear motors, featuring stability due to its self-locking function and a lubrication-free silent design. Its compact and flat design does not hinder sample access under a microscope. It is compatible with various software such as LabVIEW, MATLAB, and µManager, allowing for flexible integration and automation of the device. There are also plenty of options available, such as sample holders and Z stages.

• Other machine elements
• Cartesian Robot
• Piezoelectric Devices

The N-472 series is a highly reliable closed-loop actuator that employs the Piezoelectric Inertia Drive method. It enables high-precision positioning control, with position feedback obtainable via an incremental encoder. While ensuring a maximum driving force of 22N and a holding force of over 100N, it requires no current when not in operation, minimizing heat generation. It allows for easy installation with an M10×1 screw and a 9.5mm clamp shank, making it suitable for device integration.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The N-470 is a compact inertial drive actuator with high holding force (over 100N) and a movement range of 7 to 13mm. Designed to replace conventional manual screw mechanisms, it is ideal for fine adjustment of optical mirror chip tilts and for long-term stable fixation of small components. It can be easily mounted to devices with an M10×1 screw and a 9.5mm clamp shank. When combined with the E-872 controller, it enables precise micro-motion control.

• Actuator
• Piezoelectric Devices
• Solenoid Actuators

The N-216 is a piezo stepping actuator with a maximum holding force of 800N and a resolution of 0.03nm (open loop) / 5nm (closed loop). Thanks to its unique PiezoWalk® technology, it enables high-speed and nano-precision positioning while switching between full-step mode and nano-stepping mode. It is suitable for non-magnetic, clean, and vacuum environments, making it ideal for applications that require fine control, such as semiconductor manufacturing, wafer inspection, and nano-lithography.

• Actuator
• Piezoelectric Devices
• Other machine elements

The E-727 is a digital control unit that supports up to 4 channels, with a lineup that includes a high-output current model (up to 1500mA) in addition to standard specifications. It is equipped with analog input/output terminals, digital I/O, sensor monitor output, and waveform generator functions, fully supporting advanced piezo motion applications. It is capable of signal processing with a sensor bandwidth of 10kHz and a sampling rate of 100kHz, demonstrating excellent performance in dynamic measurement and synchronous control.

• controller
• Servo
• Amplifier

The E-625 is a high-performance servo controller designed for low-voltage piezo actuators. It allows for parallel networking of up to 12 units and can flexibly accommodate multi-axis control systems. With a 24-bit high-resolution A/D and a 20-bit D/A converter, it achieves high-precision position detection and smooth operation. Sensors can be selected from capacitive or strain gauge (SGS) options. It features PI's unique GCS command system, software compatible with LabVIEW and DLL, and waveform memory functionality, making it ideal for device development and experimental applications.

• controller
• Servo
• Amplifier

The P-620.2 to P-629.2 PIHera® series is an XY-axis piezo nano-positioning stage that employs long-life PICMA® actuators. With closed-loop control using capacitive sensors, it achieves excellent linearity and stability. It offers high resolution of less than 1nm and bidirectional repeatability of ±0.2nm, making it reliable for use in applications that require high reliability, such as quality assurance testing and semiconductor inspection. The housing is extremely compact, making it ideal for integration into devices.

• Other machine elements
• Piezoelectric Devices
• Cartesian Robot

The A-142 is a compact linear stage driven by a voice coil motor, achieving speeds of up to 200 mm/s and accelerations of 10 m/s² within a travel range of 10 mm. It offers a sensor resolution of 5 nm, a position accuracy of ±0.2 µm, and a minimum incremental motion of 50 nm. With a zero-wear air bearing structure, it requires no lubrication and is suitable for cleanroom applications, making it ideal for semiconductor inspection, optical adjustment, and measurement applications.

• Other machine elements
• Solenoid Actuators
• encoder

The PIglide A-62x series is an air-bearing rotary stage designed to pursue high precision and high stability required for optical alignment and precision inspection applications. With frictionless, non-contact rotation, it minimizes wobble and eccentricity to the extreme. Flatness and eccentricity are achieved at less than 200nm, enabling control at the nanometer level. Thanks to the torque motor and optional absolute encoders, positioning is both fast and safe. It is compatible with clean room environments and can be installed both horizontally and vertically, allowing for flexible system configurations tailored to experimental conditions.

• Other machine elements
• Other industrial robots
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The E-881 BIX motion controller is a modular piezo motion controller suitable for embedded device applications. It supports flexible connections via Ethernet/USB. It is compatible with various development environments such as Python, C++, and LabVIEW, allowing for smooth system development. Despite its high performance, its compact housing achieves both space-saving and high-performance control, supporting improved efficiency in device development.

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The "B-421 BIX" is compact, with a width of 25mm and a thickness of 11mm, achieving a maximum travel distance of 33mm. Thanks to its piezo inertia drive, it demonstrates relatively high holding force, high resolution, and position repeatability. It can also be easily combined in multi-axis configurations, enabling nanometer-scale motion while addressing space constraints in equipment design.

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The A-143 PIglide is a compact linear air bearing stage with a travel range of 25 mm. Its non-contact structure eliminates the need for wear and lubrication, achieving long life and compatibility with clean rooms. It boasts a minimum increment of 0.025 µm, position accuracy of ±0.2 µm, and straightness of ±0.05 µm, providing nanometer-level precision, making it ideal for staging in measurement, inspection, and optical equipment. It features a built-in linear motor and a 32-bit BiSS-C encoder, enabling high-performance motion with a maximum speed of 390 mm/s and acceleration of 10 m/s².

• Other machine elements
• Cartesian Robot
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The PIglide A-121 is a linear stage that combines magnetic direct drive and air bearing technology. It achieves zero friction and backlash, with excellent straightness (up to ±50nm) and repeatability (up to ±10nm). Its non-contact structure ensures a long lifespan with minimal maintenance. It supports a maximum travel distance of 500mm and a maximum speed of 500mm/s. This configuration is ideal for semiconductor inspection equipment and precision measurement devices that require high-precision positioning and speed control.

• Other machine elements
• Cartesian Robot
• encoder

The C-891 is a high-performance motion controller specifically designed for PI's PIMag® linear motors. With a maximum control frequency of 20 kHz and an output of 5 A, it enables high-speed and high-precision positioning. Safety features are also ensured with limit switches and protection against temperature and overcurrent. In addition to USB and RS-232, it is equipped with analog inputs and TTL I/O, making it easy to integrate with external sensors. Compact yet highly functional, it excels in various settings such as research and development and production environments.

• controller
• Amplifier
• Servo

It is a high-performance motion controller that precisely controls the operation of voice coil actuators. Equipped with a servo control cycle of up to 20kHz and PID control, it achieves fine positioning and speed control. It provides a maximum output current of 5A and operates within a range of 24 to 48V. It supports a variety of interfaces (TCP/IP, USB) and can be controlled using common programming environments such as LabVIEW, MATLAB, and Python. Additionally, it features an auto-zero function with automatic adjustment capabilities and a built-in data recorder function, making it easy to record operational data. Its compact and lightweight design makes it ideal for integration into OEM equipment and for research and development purposes.

• controller

The Direct Drive High-Precision Rotary Stage V-62x is a frictionless torque motor-driven stage equipped with a high-resolution encoder. It achieves excellent rotational accuracy (eccentricity and flatness <1 µm) and minimal tilt error (±20 µrad), making it ideal for applications that require advanced alignment and rotational control. The platform diameter ranges from 85 mm to 210 mm and supports installation in any orientation. It can be utilized in a wide range of fields, including optics, semiconductors, and biomedical applications.

• Actuator
• Other industrial robots
• encoder

The V-P01 is an XY stage that boasts high precision and high stability driven by a linear motor. It can handle loads of up to 100N and achieves high-speed and high-acceleration movement. With a position accuracy of ±1µm and a minimum incremental motion of 0.1µm, it is suitable for AOI automatic optical inspection and scanning applications.

• Other machine elements
• Cartesian Robot
• encoder

The V-Z03 achieves high-speed and high-precision Z-axis control through a direct drive system using a voice coil motor. With a high-rigidity cross roller guide and linear encoder, it enables fine movements with a minimum of 0.035µm. It supports a maximum load of 150N and is equipped with a self-locking function and pneumatic counterbalance. It demonstrates excellent performance in demanding fields such as semiconductor manufacturing and precision measurement.

• Other machine elements
• Solenoid Actuators
• encoder

High-precision linear stage for industrial automation. The V-D07 high-load linear motor stage is a high-performance platform ideal for industrial automation, laser processing, and precision inspection equipment. With direct drive using iron core linear motors, it achieves frictionless high-speed and high-acceleration operation. It boasts a maximum travel speed of 3000 mm/s and a load capacity of 1000 N, enabling positioning in nanometer units thanks to a high-precision linear encoder. It offers a new option for the manufacturing industry that demands precise operation in high-load environments.

• Other machine elements
• Other industrial robots
• Solenoid Actuators

PICMAWalk for Walking Drive - Plug and play with PI's unique controller technology - Interfaces: TCP/IP, USB, RS-232, SPI - Waveform generation function - Data recorder

• Other machine elements

- Travel range: 25mm and 50mm types - 75 N active force - 3 nm minimum incremental motion - Self-locking when power is off - Multi-axis setup compatible: XY, XZ, XYZ - Vacuum compatible

• Other machine elements
• Actuator
• Piezoelectric Devices

PI's Hexapod 6-axis stage has been uniquely developed and produced in-house for over 40 years, just like our piezo stages, and it is a market leader in hexapods as well as in piezo positioning products. <Features of the Hexapod> - Easy to set the rotation center at any position - No cumulative error due to parallel drive - Compact, high rigidity, and high stability - Can be installed in any orientation, etc. *For product details, please refer to our catalog or company website. We also have videos of the hexapod available.

• Other industrial robots
• Actuator
• encoder

PI's hexapod 6-axis stage has been uniquely developed and produced in-house for over 40 years, just like our piezo stages, and it is a market leader in hexapods as well as in piezo positioning products. <Features of the Hexapod> - Easy to set the rotation center at any position - No cumulative error due to parallel drive - Compact, high rigidity, and high stability - Can be installed in any orientation, etc. *For product details, please refer to our catalog or website. We also have videos of the hexapod available.

• Other industrial robots
• Actuator
• encoder

PGW Corporation (hereinafter referred to as PGW) was established in 1997 as a manufacturer specializing in stone processing, using granite for stone plates and jigs. We possess extremely high stone polishing technology and manufacture bases, plates, jigs, and other products primarily for the FPD industry, which requires large and high-precision granite. In addition, we design and develop high-precision unit devices that combine stages, linear motors, guides, encoders, and other components based on granite to meet our customers' specifications. In 2021, we became a member of PI Japan, Inc., a market leader in ultra-precision positioning products using piezo technology. We will be able to provide even more solutions for device design, development, and manufacturing requested by customers from PI (Physik Instrumente) subsidiaries in Asia, as well as within Japan. *For more details, please download the PDF or contact us.

• Processing Contract
• Other measurement, recording and measuring instruments
• Other machine elements

A hexapod with 6 degrees of freedom, featuring a parallel kinematic design that is more compact and rigid than a single-axis kinematic system. It offers a large dynamic range, operates without cables, and provides high reliability. Additionally, it allows for user-defined pivot point settings via software. Main body dimensions: ultra-compact design of φ136×115mm, direct drive type using brushless DC motors (BLDC) and long-life ball screws. A vacuum-compatible version (10^-6 hPa) is also available for use in optical alignment, automation, quality assurance testing, and testing equipment. 【Features】 ■ Minimum hexapod (vacuum option available) ■ Travel range: 34mm / 42° ■ Load capacity: 5kg ■ Actuator resolution: 40nm ■ Minimum incremental motion: 0.2μm ■ Reproducibility: ±0.1μm ■ Includes scanning algorithm for fiber optical alignment ■ Arbitrary setting of pivot point (rotation center) is possible *For more details, please download the PDF or contact us.

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• Other industrial robots
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【Linear Stage Using DC Motors and Stepper Motors】 ■Travel Range: 5–25mm ■Minimum Movement: 0.2µm ■Load Capacity: 30N ■Size: 60×62×20mm～ ■Can be set up on XY or XYZ axes, and compatible with vacuum (10^-6hPa) 【Compact Linear Stage, Multi-purpose】 ■A compact-sized linear stage with belt drive that is stacked ■Opening diameter is 10 mm ■XY setup can be directly mounted without an adapter plate 【Position Measurement】 ■Another type equipped with a DC gear motor: features a rotary encoder on the motor shaft ■Non-contact Hall effect reference point switch and limit switch 【Drive】 ■2-phase stepper motor or closed-loop DC gear motor ■Lead screw or ball screw with backlash compensation *For more details, please download the PDF or contact us.

• Actuator
• Cartesian Robot
• encoder

The V-817, which combines the PI Mag(R) linear motor and direct encoder, achieves non-contact drive to reduce dust generation and ensures long-term stability. It supports a maximum load of 600 N and achieves positioning repeatability at the 2 µm level. There are four types of travel lengths available: 204, 407, 610, and 813 mm, and it can be quickly systematized with a wide range of accessories, including drag chains and M6 mounting plates with dimensions of 75 to 150 mm square. It supports a wide range of industrial applications, including assembly of sensors and cameras, precision inspection and measurement, wafer processing and inspection, and laser processing. *For more details, please download the PDF or contact us.

• Linear motor
• Actuator
• Cartesian Robot

■Performance 1: Servo motor and ball screw stage configuration ■Performance 2: High precision, servo motor and ball screw drive stage configuration ■Performance 3: High speed and high precision, linear motor stage configuration The Z-axis is supported with a type that includes a holding brake. The ACS-based G-901 controller integrates motion, I/O, and safety functions, completing the EtherCAT(R) connection with the device PLC immediately. Ideal for laser processing, ultra-short pulse laser processing, testing and precision inspection, and electronic device manufacturing. *For more details, please download the PDF or contact us.

• Linear motor
• Actuator
• Cartesian Robot

We have been providing hexapod stages for over 20 years, and based on customer feedback, we have released a hexapod with enhanced drive precision! It enables step movements of 40 nm on the XY axis and 20 nm on the Z axis. It can meet the highest demands for alignment and positioning applications in production and measurement technologies. <Specifications> - Drive Axes: 6 axes - Travel Range: XY = ±50mm, Z = ±25mm, θxθy = ±15 degrees, θz = ±30 degrees - Minimum Movement: XY = 40nm, Z = 20nm, θxθy = 0.2µrad, θz = 0.4µrad - Maximum Speed: 2.5mm/second, 30mrad/second - Load Capacity: 40Kg (horizontal) - Arbitrary rotation center setting For more details, please contact us or refer to the catalog.

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• Other industrial robots
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To meet the global demand for large capacity and high speed data, silicon photonics (SiP) is an essential technology. "PI's innovative industrial technology contributes to this realization." With PI's automation subsystems, manufacturers of SiP products and their tool OEMs can perform testing and packaging of next-generation photonics devices with excellent cost efficiency and reliability, while maintaining the necessary nanoscale precision and high production throughput. The key to this technology lies in PI's unique capability to "automate the simultaneous high-speed alignment of multiple interacting inputs and outputs with degrees of freedom, completing global optimization in just a few hundred milliseconds." This parallel processing eliminates the need for the time-consuming iterative approaches traditionally required for positioning multi-channel SiP components in testing and packaging, enabling time savings of more than an order of magnitude. Additionally, due to its modular architecture, it can meet the diverse production testing and packaging needs with varying requirements based on the devices and production applications.

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Rectangular bed-shaped hexapod design. The PI multi-axis motion and positioning solution hexapod (derived from the Greek word for six legs) is a motion platform controlled by six actuators (supports). They all operate simultaneously on a single platform, enabling movement in six degrees of freedom.

• Other machine elements

We would like to introduce a case study that applies products handled by PI Japan Co., Ltd. The 50 antennas at the ALMA Observatory use our "high-precision hexapod." Under the harsh environmental conditions of the Atacama Desert, it was adopted to precisely align the sub-reflector of the radio telescope. It is suitable for extreme environmental conditions, including low pressure, temperature differences of up to 50 degrees, strong winds, dust, rain, and an altitude of 5,000 meters. It can adjust the position of the sub-reflector with high precision down to a few millimeters. [Case Study] <50 Hexapod Systems for ALMA Telescope Array> ■ Uses high-precision hexapod ■ Adopted to precisely align the sub-reflector of the radio telescope under the harsh environmental conditions of the Atacama Desert ■ Positioning possible with sub-micron arc-second resolution ■ Developed a high-stiffness and robust joint for the hexapod for ALMA to withstand harsh environmental conditions *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The V-308 is a Z-axis focus stage that combines voice coil direct drive and cross roller guides. With a minimum increment of 10 nm and an adjustable stroke of 7 mm, it allows for optimization of the focal position of optical systems at the nanometer level. It provides high reliability for multiphoton and deep tissue imaging using large-diameter lenses or long working distance lenses. The high rigidity structure of the cross roller guide and the 10 nm resolution encoder ensure smooth nanopositioning across the entire 7 mm range. For more details, please download the PDF or contact us.

• Other machine elements
• Actuator
• Solenoid Actuators

The P-725.xCDE2 is a focus scanner for objective lenses that employs a flexure guide structure and PICMA® piezo technology. The capacitive sensor achieves sub-nanometer resolution and 0.02% linearity, maintaining high precision even with long strokes of 100 / 400 / 800 µm. With zero wear parts and no need for lubrication, it offers a long lifespan. It contributes to the acceleration of Z-step in confocal and multiphoton microscopy as well as semiconductor inspection. *For more details, please download the PDF or contact us.

• Other machine elements
• Actuator
• Piezoelectric Devices

* Beam deflection angle: maximum 8° * Two orthogonal chip/tilt axes with a common rotation center * Identical motion characteristics of both axes through parallel kinematics * Compact design * High durability and frictionless operation due to flexure * Position measurement using linear encoders Tip/tilt operating range: ± 35 (± 2°) mrad Minimum movement amount: < 1 μrad Reproducibility: < 2 μrad Reference accuracy: ≤ 50 μrad Linearity: < 0.2 % Step response: < 20 ms (depending on load, etc.) Maximum mirror diameter: 1 inch Maximum load: 20g As this is for OEM supply, please consult us for customization options for multiple units to several hundred units.

• Actuator
• Solenoid Actuators
• Optical Experimental Parts

The air bearing rotation stage is not affected by friction or component precision from conventional mechanical guides due to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling very high-precision positioning due to its high flatness and minimal eccentricity. ● For more details, please contact us or refer to the catalog.

• Other machine elements

The air bearing rotary stage is not affected by friction or component precision due to conventional mechanical guides, thanks to its air levitation guide. As a result, there is no stick-slip or frictional heat, allowing for high-speed operation and enabling extremely high-precision positioning due to its high flatness and minimal eccentricity. - Wide opening: 260mm, thickness: 113mm, slim type - Incremental or absolute encoder For more details, please contact us or refer to the catalog.

• Actuator
• Other industrial robots
• encoder