リンテック List of Products and Services

The "MC-7000 Series" is a high-speed response mass flow controller that achieves a response time of less than 200 msec with a thermal sensor. By adopting Lintec's unique self-temperature compensation method, it can handle corrosive gases and liquefied gases, ensuring a flow accuracy of ±1.0% S.P. It also supports various digital interfaces such as DeviceNet and EtherCAT. 【Features】 ■ Uses Au seals and piezo actuators ■ Achieves a response time of less than 200 msec with a thermal sensor ■ Adopts Lintec's unique self-temperature compensation method ■ Compatible with corrosive gases and liquefied gases ■ Guarantees flow accuracy of ±1.0% S.P. *For more details, please refer to the PDF document or feel free to contact us.

• Flow Control
• Weighing Control

Mass flow controller compatible with EtherCAT, adopting our unique self-temperature compensation sensor (patented in the US and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with digital interface (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts Lintec's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra-high performance with a width of 1.125 inches ○ Compatible with surface mount gas interfaces *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

The MC-10 series mass flow controller for gases is a low-cost model that can contribute to improving semiconductor manufacturing costs through short delivery times. It achieves low pricing by utilizing solenoid actuators and rubber seals. 【Features】 - Achieves low pricing by adopting rubber seals - Guarantees flow accuracy of ±1.0% F.S. - Supports a wide flow range - With the optional variable range function, it can accommodate multiple specifications with a single unit (gas type, F.S., and flow can be changed) - Stable operation even in environments with high-frequency noise and direct current magnetic fields, thanks to the use of a metal case and various filters *For other functions and details, please download the PDF.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a compact gas heater that can be heated up to Max 300℃ despite its low pressure loss structure. 【Features】 ○ Can be installed even after flow control by reducing pressure loss ○ Clean structure with all-metal seals ○ Gas contact material is SUS316L ○ Built-in thermal switch for abnormal heating detection ○ Built-in thermocouple ○ Capable of heating up to Max 300℃ while being compact in size *For other functions and details, please download the catalog.

• Vacuum Equipment
• Heating device

This is a mass flow controller that can control gas flow rates even at low pressure using proprietary technology. 【Features】 ○ Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure ○ Suitable for applications such as AsH3 and PH3, and can control gases from liquids without heating ○ Compatible with the general-purpose interface RS485 ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Equipped with a high-speed, high-performance piezo actuator *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a mass flow controller that can be changed for various gases and ranges using the rotary switch located on the upper part of the MFC. 【Features】 ○ Short delivery time model ○ Equipped with high-speed, high-performance piezo actuator ○ Universal interface RS485 is available ○ Standard ultra-clean specification with metal seals and precision polished inner surfaces ○ Various gases and ranges can be changed using the rotary switch *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a high-temperature digital mass flow controller in a 1.125-inch size that achieves high precision of 1.0% F.S. with proprietary patented technology. It is ideal for controlling high-temperature gases such as water vapor. 【Features】 ○ RoHS compliant ○ Operating temperature up to 120°C, baking temperature up to 150°C (non-energized) ○ Equipped with a digital interface RS-485 ○ Features a sensor with proprietary patented technology ○ High-temperature compatible, high-precision digital MFC *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a vaporizer suitable for the vaporization of easily thermally decomposable liquids such as high-k materials and various metals. 【Features】 ○ The liquid has minimal contact with the walls of the vaporizer (made of metal), allowing for efficient vaporization with light contact. ○ High-efficiency vaporization achieved through atomization of droplets and fine particle generation by blow gas. ○ When combined with the liquid mass flow meter LM-3000L series, it allows for precise flow control of liquid materials and efficient vaporization (US PAT.5372754). ○ A vaporizer that vaporizes easily thermally decomposable liquids at low temperatures. *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

Mass flow controller compatible with DeviceNet, adopting our unique self-temperature correction sensor (patented in the U.S. and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with DeviceNet interface (SEMI E54, ODVA SEMI SIG MFC Profile) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts our unique self-temperature correction sensor (patented in the U.S. and Japan) ○ Connector type (horizontal or vertical) selectable ○ Fully digital operation ○ Ultra-high performance 1.125-inch width ○ Compatible with surface mount gas interface *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

The Biezokontrol Valve CV-3000 series is a high-speed response valve capable of controlling the flow of gases and liquids, as well as pressure control, through external control inputs. Both open-loop and closed-loop control methods can be used. 【Features】 - High-speed control is possible due to the use of stacked piezoelectric elements. - High thrust and high resolution allow for precise control of small flow rates and low pressures. - Capable of controlling the flow and pressure of both gases and liquids. - The connection part uses gold (Au) metal seals, making it virtually leak-free. - Particle-free materials and structural design. *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Pressure Control

This is a high-performance digital mass flow meter with a built-in microprocessor. 【Features】 ○ High precision achieved by adopting a high-resolution (16-bit) A/D and D/A converter ○ Standard alarm output function ○ Equipped with alarm status display LED ○ Auto-zero function included ○ Equipped with a general-purpose digital interface ○ Device number setting is possible ○ Maintains electrical compatibility with conventional products ○ Compact body size ○ Uses metal seals ○ Standard internal precision polishing of the body ○ Measurement of flow rates for various gases *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a normally open type mass flow controller for liquids. It can control flow rates from 0.01 to 2.0 g/min (equivalent to C2H5OH). Any liquid that does not corrode stainless steel is acceptable. 【Features】 - Long-term flow stability with a flow sensor using Lintec's unique ambient temperature compensation method - Compact design with a body width of 28.6 mm and an integrated valve structure - Equipped with a general-purpose digital interface (RS-485 compliant) - High-speed response due to the use of a piezo actuator - Diaphragm valve structure adopted (Minimal dead space, structure that minimizes bubble generation) - Bypass-less structure (Easy liquid introduction and internal purging, free installation orientation) - RoHS compliant *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

Measurement is possible from 0.01 to 20g/min (equivalent to C2H5OH). Any liquid that does not corrode stainless steel is acceptable. By connecting to a control valve (our CV series), it can also be used as a liquid mass flow controller. 【Features】 ○ Achieves high-precision flow measurement of various liquid materials ○ Utilizes a unique thermal mass flow sensor from Rintec (patent pending), with digitalized electronic circuits for high-speed, high-precision flow measurement ○ Enables high-precision flow control when combined with a control valve ○ Allows for high-speed, high-precision liquid vapor supply when combined with Rintec's unique vaporizer ○ Complies with RoHS directives *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a vaporizer that efficiently supplies various liquids with precise flow control when combined with the liquid mass flow meter LM-3000L series (US PAT. 5372754). 【Features】 ○ By combining with the liquid mass flow meter LM-3000L series, it controls the flow of various liquids and efficiently vaporizes them (US PAT. 5372754). ○ Capable of operating from reduced pressure processes to atmospheric pressure processes. ○ High-temperature heating up to 200°C is possible. ○ Compact body size. ○ A wide variety of options according to the flow rate of the carrier gas (50CCM-4SLM). ○ RoHS compliant. *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a digital mass flow controller that achieves high precision of 1.0% S.P. with its unique patented technology and is compatible with various surface mount standards (1.125 inches). 【Features】 ○ High-performance 1.125-inch size digital mass flow controller (piezo valve, high precision (S.P. guaranteed), digital control) ○ Maintains compatibility with analog mass flow controllers ○ Universal interface RS485 is available ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Compatible with various surface mount standards of SEMI STD. *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a vaporizer that efficiently supplies various liquids with precise flow control in combination with the liquid mass flow meter LM-3000L series. 【Features】 ○ In combination with the liquid mass flow meter LM-3000L series, it allows for precise flow control of various liquid materials (TEOS, TEB, TEPO, etc.) while enabling high-efficiency vaporization. ○ Equipped with a piezo valve. ○ Compatible with processes from atmospheric pressure to reduced pressure. ○ Capable of heating up to 160°C. ○ Compact body size. ○ Compliant with RoHS. *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control

This is a vaporizer that efficiently supplies various liquids with precise flow control when combined with the liquid mass flow meter LM-3000L series (US PAT. 5372754). 【Features】 ○ When combined with the liquid mass flow meter LM-3000L series, it allows for precise flow control of various liquids and efficient vaporization (US PAT. 5372754). ○ Capable of vaporizing water under atmospheric pressure conditions. ○ Heating up to 200°C is possible. ○ Compact body size. ○ A wide variety of options according to the flow rate of the carrier gas (1SLM to 100SLM). ○ RoHS compliant. *For other functions and details, please download the catalog.

• Piping Materials
• Vacuum Equipment
• Flow Control