High-performance, cost-effective RF/DC magnetron sputtering system for research and development.
High-Performance RF/DC Magnetron Sputtering Equipment
● Achievable pressure: 5 x 10^-5 Pa (*1 x 10^-4 Pa in the fastest 30 minutes!)
● Sputter cathodes x 3: Automatic continuous multilayer film, simultaneous deposition from 2 sources
● Film uniformity ±3%
● Various options: Substrate rotation and elevation, substrate heating (Max 500℃), cathodes for magnetic materials, and more
◉ nanoPVD can be used for various purposes, including up to 3 sputter sources + 3 systems (MFC control), expansion of RF/DC PSU (up to 2 power supplies), continuous multilayer film, and simultaneous deposition from 2 sources (RF/DC or DC/DC only).
- Insulating films
- Conductive films
- Compounds, etc.
【Main Features】
◉ Compatible substrates: Up to Φ4 inch
◉ 2" cathodes x up to 3 sources
◉ 7" touch panel for easy operation with PLC automatic process control
◉ APC automatic pressure control
◉ High-precision process control with MFC
◉ 1 Ar gas system (standard) + N2, O2 expandable up to 3 systems
◉ USB port for connection to Windows PC, allowing the creation and storage of recipes for up to 1000 layers and 50 films. Data logging on PC
◉ Other various options available