4-axis cylindrical coordinate clean robot LTHR4000 series
It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.
The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
- Company:ジェーイーエル
- Price:Other