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robot Product List

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Tabletop Single-Arm Clean Robot 'AR1300-220'

Tabletop Single-Arm Clean Robot 'AR1300-220'

Significantly contributes to the reduction of CO2 emissions during operation! Ultra-compact clean robot.

The AR1300-220 is an ultra-compact, lightweight tabletop single-arm clean robot. It can build a tabletop system for transporting conventional sorters and inspection devices. To reduce the size of the controller, the motor driver can be stored in the bottom of the robot. 【Features】 ■ The motor driver can be stored in the bottom of the robot ■ Significantly contributes to the reduction of CO2 emissions during operation ■ Board holding: Wafer is vacuum suctioned ■ Equipped with various sensors ■ Equipped with a two-phase pulse motor with an encoder ■ Dedicated command control via RS232C *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Tabletop Double-Arm Clean Robot 'AR2300-220'

Tabletop Double-Arm Clean Robot 'AR2300-220'

Low power consumption under 100W! The transport arm adopts a unique compact and lightweight multi-stage sliding mechanism.

The "AR2300-220" is a tabletop wafer transport device equipped with functions similar to conventional clean robots. It adopts a unique compact and lightweight multi-stage slide mechanism for the transport arm. By reducing the weight of the rotation and vertical axes, it achieves a simple structure with a mass of less than one-third compared to conventional models. 【Features】 ■ Achieves a mass of less than one-third compared to conventional models ■ Cleanliness measures: unique structure that sucks air from the side of the lower cover ■ Achieves low power consumption of less than 100W ■ Dedicated command control via RS232C ■ Equipped with a two-phase pulse motor with an encoder *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
  • Other conveying machines
  • Transport and handling robots

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Direct Drive Single Arm Clean Robot 'HR1400-720'

Direct Drive Single Arm Clean Robot 'HR1400-720'

The motor can be equipped with a reduction gear! The controller is a 5-axis specification clean robot.

The "HR1400-720" is a linear single-arm clean robot equipped with an AC servo motor of the absolute encoder type for all axes. The motor can be equipped with a reduction gear. Control methods can be selected from RS232C, I/O, and Ethernet. 【Features】 ■ Equipped with various sensors ■ Controller is 5-axis specification ■ Control method: RS232C ■ I/O and Ethernet can be selected ■ Equipped with an AC servo motor of the absolute encoder type for all axes *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Link-type double-arm cleaning robot 'PR2111-60'

Link-type double-arm cleaning robot 'PR2111-60'

Reduce manufacturing costs by increasing the sheet metal ratio and simplifying the structure! Link-type clean robot.

The PR2111-60 is a link-type double-arm clean robot equipped with various sensors. By increasing the sheet metal ratio and simplifying the structure compared to our conventional products, we achieve a reduction in manufacturing costs. It is equipped with a vacuum suction type ceramic chuck. 【Features】 ■ All axes use 2-phase stepping motors ■ Chuck: Ceramic chuck (vacuum suction type) optional ■ Equipped with various sensors ■ Reduction in manufacturing costs by increasing the sheet metal ratio and simplifying the structure *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Link-type single-arm cleaning robot 'SR1160-310'

Link-type single-arm cleaning robot 'SR1160-310'

Full-axis 2P stepping motor specifications! Link-type single-arm clean robot.

The SR1160-310 is a link-type single-arm clean robot with a hand that can rotate 180°. The hand section comes with a rotary unit. It can accommodate other wafer size hands by replacing the mounting block. As an option, various sensors for positioning and air pressure confirmation are available. 【Features】 ■ Hand: KUMADE FORK KMWF-12SF ■ The hand section includes a rotary unit ■ Various sensors included (positioning, air pressure confirmation) *optional ■ All axes are equipped with 2P stepping motors ■ Hand can rotate 180° *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Vacuum-Compatible Single-Arm Clean Robot 'SV1240'

Vacuum-Compatible Single-Arm Clean Robot 'SV1240'

Achieved further reduction in manufacturing costs by reducing the number of parts in conventional aluminum structures!

The "SV1240" is a single-arm clean robot that employs a magnetic fluid seal and a metal bellows method for its vacuum seal. By reducing the number of conventional aluminum structural components, further manufacturing cost reductions have been achieved. It uses a belt link system with a timing belt for arm drive. 【Features】 ■ Equipped with a 2-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control ■ Adopts a magnetic fluid seal and metal bellows method for the vacuum seal ■ Belt link system using a timing belt for arm drive *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Link-type single-arm cleaning robot "PR2000 Series"

Link-type single-arm cleaning robot "PR2000 Series"

Introducing a clean robot that increases the sheet metal ratio and simplifies the structure, achieving reduced manufacturing costs!

The "PR2000 Series" is a link-type single-arm clean robot that achieves manufacturing cost reduction by increasing the sheet metal ratio and simplifying the structure compared to our conventional products. It features a 2-phase stepping motor for all axes and is equipped with various sensors. If you are looking for a link-type single-arm clean robot, please feel free to consult us. 【Features】 ■ 2-phase stepping motor for all axes ■ Equipped with various sensors ■ Chuck: Ceramic chuck (vacuum suction type) option *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Direct Drive Double Arm Clean Robot 'HR81315-1900'

Direct Drive Double Arm Clean Robot 'HR81315-1900'

High rigidity design enables high-speed transport of glass substrates! ISO Class 2 clean robot.

The "HR81315-1900" is a linear double-arm clean robot equipped with an all-axis ABS encoder AC servo motor. It transports glass substrates at high speed due to its high rigidity design. It holds the glass substrates by attaching anti-slip pads to the top surface of the CFRP fork. Additionally, it features a CFRP fork that is heat-resistant up to 250°C. 【Features】 ■ Equipped with various sensors ■ All-axis ABS encoder AC servo motor specification ■ Dedicated command control via RS232C ■ Substrate holding: Glass substrates are held by attaching anti-slip pads to the top surface of the CFRP fork ■ Fork: 250°C heat-resistant CFRP fork *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Direct Drive Double Arm Clean Robot 'HR71000-1500'

Direct Drive Double Arm Clean Robot 'HR71000-1500'

Support for transporting 3rd generation glass substrates! Double-arm clean robot equipped with various sensors.

The "HR71000-1500" is a direct drive double-arm clean robot compatible with third-generation glass substrate transport. Both the arms and the vertical axis can achieve long strokes. It vacuum-suctions the backside of the substrate. The arms are equipped with stepping motors, while the pivoting vertical axis uses servo motors. 【Features】 ■ Dedicated command control via RS232C ■ Equipped with various sensors ■ Substrate holding: Vacuum suction on the backside of the substrate ■ Arms: Stepping motor specification for pivoting ■ Vertical axis: Servo motor specification *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Direct Drive Double Arm Clean Robot 'LR31000-600'

Direct Drive Double Arm Clean Robot 'LR31000-600'

High rigidity design enables high-speed transport of third-generation glass substrates! Double-arm clean robot.

The "LR31000-600" is a compact body, long-stroke direct-drive double-arm clean robot. With a high-rigidity design, it transports third-generation glass substrates at high speed. It is designed for easy docking with the lateral slide axis. The slide axis is equipped with an incremental encoder and can be controlled by a servo motor. 【Features】 ■ Compact body, long stroke ■ Easy docking with the lateral slide axis ■ Slide axis: Incremental encoder specification, controllable by servo motor ■ Equipped with a two-phase pulse motor with encoder *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Link-type single-arm cleaning robot 'PR1111-200'

Link-type single-arm cleaning robot 'PR1111-200'

The hand can be rotated 180 degrees with a stepping motor drive! Link-type clean robot.

The "PR1111-200" is a link-type single-arm clean robot with a specification of 2P stepping motors for all axes. The hand can be rotated 180 degrees by a stepping motor drive. The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ 2P stepping motor specification for all axes ■ The rotation axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor ■ Chuck: Special I-type chuck made of a laminated structure of aluminum and stainless steel *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Link-type double-arm cleaning robot 'SR2160-310'

Link-type double-arm cleaning robot 'SR2160-310'

The lower inversion axis allows for vacuum suction of wet wafers! Double-arm clean robot.

The "SR2160-310" is a link-type double-arm clean robot equipped with an inversion unit and a mapping unit. To address issues with wet wafers, the lower inversion axis is capable of vacuum suction for wet wafers. To prevent water from entering the robot's drive components, water catchers have been installed in both the arm drive unit and the main body drive unit. 【Features】 ■ Includes inversion unit and mapping unit ■ Water catchers installed in arm drive unit and main body drive unit ■ Special ceramic chuck included (optional) ■ Positioning sensor included (optional) *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Parallel Link Single Arm Cleaning Robot 'EV2250'

Parallel Link Single Arm Cleaning Robot 'EV2250'

Single-arm clean robot using contact sealing method for vacuum sealing.

The "EV2250" is a parallel link single-arm clean robot that uses a contact sealing method for its vacuum seal. The arm section has been treated with Alpicca. In addition to being equipped with a two-phase pulse motor with an encoder, it supports RS232C communication control and parallel I/O control. 【Features】 ■ Heat-resistant use: Installation of a reflector (thermal reflective plate) on the arm ■ Arm section treated with Alpicca ■ Equipped with a two-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control *For more details, please refer to the PDF materials or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Waterproof Double-Arm Cleaning Robot 'WR2154-300'

Waterproof Double-Arm Cleaning Robot 'WR2154-300'

High rigidity arm specification with Teflon coating! Equipped with a transparent mapping sensor in the handle.

The "WR2154-300" is a waterproof double-arm clean robot. The arm section above the mounting flange complies with the IP64 standard. The hand section is equipped with a transmissive mapping sensor capable of vertical/horizontal operation. Additionally, it can accommodate rotary and clamp units. 【Features】 ■ Arm section: Teflon-coated, high-rigidity arm specification ■ Capable of mounting rotary and clamp units ■ Wafer holding: Vacuum suction using ceramic chucks ■ Equipped with a two-phase pulse motor with encoder ■ Control: RS232C communication control or parallel I/O control *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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Link-type single-arm cleaning robot "PR1000 series"

Link-type single-arm cleaning robot "PR1000 series"

Introducing a clean robot with a 180-degree reversible design and a full-axis 2P stepping motor specification!

The "PR1000 Series" is a link-type single-arm clean robot that can rotate 180 degrees driven by a stepping motor. It features a 2P stepping motor for all axes. It has a special I-type chuck made of a laminated structure of aluminum and stainless steel. Additionally, the rotating axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor. 【Features】 ■ The hand can rotate 180 degrees driven by a stepping motor ■ Special I-type chuck made of a laminated structure of aluminum and stainless steel ■ The rotating axis is equipped with a home position sensor, a motor stall detection sensor, and a 180-degree position sensor *For more details, please refer to the PDF document or feel free to contact us.

  • Other inspection equipment and devices
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  • Transport and handling robots

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