Vacuum-compatible 10nm feedback stage, lifting type
Vacuum-compatible positioning stage for the Z-axis with a built-in linear encoder and 10nm resolution.
This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.
- Company:シグマ光機
- Price:Other