Vacuum-compatible submicron feedback stage, lift type
Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!
This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111
- Company:シグマ光機
- Price:Other