List of CVD Equipment products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Presentation of explanatory materials on JIS and ISO standards. We propose suitable safety barriers from a rich product series! Free rental of demo kits.

• Other safety and hygiene products

The compound semiconductor wafers (GaAs, InP, GaP) are transported to a designated position non-contactly through manual operation.

• CVD Equipment
• Plasma surface treatment equipment
• Heating device

It is a device with numerous achievements in mass production of power devices, LEDs, MEMS, etc.

• CVD Equipment

For repairs of vacuum device peripheral equipment and valves, leave it to us! We will solve the problems of "high prices and long lead times" associated with manufacturer maintenance.

• CVD Equipment
• Etching Equipment
• LCD display

Leave the maintenance and servicing of semiconductor, LCD, and solar cell manufacturing equipment to us.

• Other semiconductor manufacturing equipment
• CVD Equipment
• Etching Equipment

Slit valve seal

• CVD Equipment
• Etching Equipment
• Other semiconductor manufacturing equipment

Adhesion prevention seal

• Oxidation/Diffusion Device
• CVD Equipment
• Pneumatic Equipment

Perfluoroelastomer!! It is a perfluoroelastomer with excellent heat resistance and chemical resistance. Our company is the official distributor of Kalrez in Japan.

• Oxidation/Diffusion Device
• CVD Equipment
• Etching Equipment

Fluororubber with excellent long-term durability!! It can withstand high temperatures (200-220°C) compared to conventional fluororubber.

• Oxidation/Diffusion Device
• CVD Equipment
• Vacuum Equipment

High-performance metal seals!! Ideal for various vacuum equipment and semiconductor manufacturing devices!

• Oxidation/Diffusion Device
• CVD Equipment
• Sealing

Energy-saving environment and safety system engineering in a wide range of fields handled by trading companies!

• CVD Equipment

We provide vacuum deposition equipment and related maintenance services.

• Evaporation Equipment
• CVD Equipment
• Sputtering Equipment

Heater module for manufacturing a single wafer in the electronics and semiconductor industry!

• Other heaters
• CVD Equipment
• Annealing furnace

Module heater for CVD coating equipment

• Steel
• CVD Equipment

Pipe heaters and cylinders prevent heat loss! Reduce power consumption and CO2 emissions! Shapes and materials can be freely customized according to application!

• Injection Molding Machine
• Extrusion Machine
• CVD Equipment

Versatile MFC that contributes to cost reduction.

• CVD Equipment
• Sputtering Equipment
• Etching Equipment

High-precision rubber seals with excellent cost-effectiveness.

• CVD Equipment
• Sputtering Equipment
• Etching Equipment

Advanced digital MFC/MFM with excellent versatility, compatible with many systems.

• CVD Equipment
• Sputtering Equipment
• Etching Equipment

High-precision and reliable metal seal model

• CVD Equipment
• Sputtering Equipment
• Etching Equipment

Next-generation PI technology that meets tomorrow's process needs.

• CVD Equipment
• Sputtering Equipment
• Etching Equipment

Ensure a flow rate of up to 1,000 lpm.

• CVD Equipment
• Etching Equipment
• Evaporation Equipment

Excellent uniformity of film thickness and impurity concentration. Atmospheric pressure CVD equipment that achieves high productivity and low cost.

• CVD Equipment

A very compact atomic layer deposition device with a rich process recipe.

• CVD Equipment
• Other surface treatment equipment

White type perfluoroelastomer material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

Heat-resistant perflo (high temperature resistance: 300°C) material without filler using O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

White type heat-resistant perfluoroelastomer (high temperature resistance: 280°C) material with O-ring cherry blossom seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

White type of ternary fluorine rubber material with cherry blossom seal of O-ring.

• Other machine elements
• CVD Equipment
• Piping Materials

White type of Bition ETP (FFKM-E) material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements

High hardness type Afuras (FEPM) material with O-ring cherry seal.

• Other machine elements
• CVD Equipment
• Sealing

Heat-resistant trivalent fluorine rubber (high temperature resistance: 250°C) material with O-ring cherry seal.

• Other machine elements
• CVD Equipment
• Sealing

Old grade of heat-resistant perfluoroelastomer (high temperature resistance -300℃) material with O-ring cherry seal.

• CVD Equipment
• Etching Equipment
• Other machine elements