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Super Clean Room 3-Axis Cylindrical Coordinate Clean Robot SCR3100S Series
By reducing the footprint, it is suitable for the transport of small-diameter wafers within semiconductor manufacturing equipment and inspection equipment, allowing for a more compact equipment layout.
The exchange of wafers can be done in a short time with two arms.
The Super Clean Room 4-axis cylindrical coordinate clean robot STCR4000S series is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It allows for quick wafer exchanges with its two arms. It has obtained CE marking certification. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Optimal for wafer transport in an acidic or alkaline atmosphere during the LSI manufacturing process.
The waterproof 3-axis cylindrical coordinate robot SWHR3156 series is compatible with 300mm wafers and features a flip + edge grip function. With an IP64 protection rating, it is suitable for wafer transport in acidic and alkaline environments during the LSI manufacturing process. It transports wafers at high speed and high precision through S-curve acceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
It offers superior cost performance compared to conventional MHR.
The MCR3000C series, compatible with 300mm for super clean rooms, is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with all-axis AC servo, offering superior cost performance compared to conventional MHR models. You can choose between base type and flange type to match your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.
The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Specifications of AC servo motors and high-speed transportation through motion trajectory optimization.
The GCR4000-AM series is a multi-axis type, 4-axis horizontal articulated clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices that accommodate 300mm. You can choose between base type and flange type according to the equipment layout. It is possible to use optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
It can be used for transporting wafers inside a vacuum chamber.
The vacuum-compatible 3-axis cylindrical coordinate clean robot SVCR3000 series can be used for transporting wafers within a vacuum chamber. Compared to the SVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the SVHR for installation, allowing for a smooth transition. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
For Z strokes of 760mm or more, the Z-axis is multi-stage, allowing for low-pass line configuration.
The LHR3000 series clean robot with a 3-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
It is suitable for the transport of glass substrates for inspection devices, etc., within liquid crystal manufacturing equipment.
The LTHR4000 series clean robot with a 4-axis cylindrical coordinate system compatible with glass substrates is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. With a Z stroke of over 760mm, the Z-axis is multi-stage, allowing for low pass line configuration. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Optimal for transporting masks and glass substrates in liquid crystal manufacturing equipment, inspection devices, etc.
The FTVHR4000 series clean robot, compatible with mask and glass substrates and designed for four-axis cylindrical coordinate link-type high vacuum applications, is suitable for transporting mask and glass substrates within LCD manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!
The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.
Ideal for wafer transport in acidic and alkaline mist environments!
The "STWHR4156 series" is a waterproof twin-arm 4-axis cylindrical coordinate clean robot. It is suitable for wafer transport in an acidic and alkaline mist atmosphere during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 ■ Arm variation is 156mm ■ Z-axis variation is 200mm and 300mm ■ Load capacity is 3kgf or less when calculated at the third joint of the arm ■ The arm section is coated with Teflon to ensure corrosion resistance ■ The arm joint section uses V-seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.
Clean robot for small wafer paths!
The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.
Reduction of wafer exchange time! Waterproof robot with a 4-axis cylindrical coordinate system using a twin-arm design.
The "STWCR4000 Series" is a waterproof robot with a 4-axis cylindrical coordinate twin-arm design, compatible with 300mm wafers and featuring an inversion and edge grip function. The arm section is coated with Teflon to ensure corrosion resistance, and the joint sections of the arms use V seals for waterproofing. With an IP64 protection rating, it is suitable for transporting wafers in acidic and alkaline environments during the LSI manufacturing process. 【Features】 ■ Compatible with 300mm wafers, inversion and edge grip function ■ Arm section ensures corrosion resistance with Teflon coating ■ V seals used in the waterproof structure of the arm joints ■ Twin-arm design allows for reduced wafer exchange time ■ Ideal for transporting wafers in acidic and alkaline environments *For more details, please refer to the PDF materials or feel free to contact us.
