一般財団法人材料科学技術振興財団　MST List of Products and Services

Our organization conducts an analysis of defect levels in wide bandgap semiconductor gallium nitride (GaN) using first-principles calculations. Gallium nitride (GaN), a wide bandgap semiconductor, is primarily used in the field of power devices, and in recent years, there has been an increasing demand for applications such as rapid chargers and 5G communication base stations. Here, we present a case study analyzing the defect levels formed by nitrogen vacancies (VN) in GaN using first-principles calculations. [Measurement and Processing Methods] ■ [PL] Photoluminescence Method ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization conducts product degradation investigations through weather resistance testing. The Sunshine Weather Meter can artificially reproduce sunlight, temperature, humidity, and other conditions. We conducted weather resistance testing standards for bicycle lights and examined changes over time. To quantitatively discuss the discoloration of lights that are originally black, we refer to (JIS D 0205) and present a case study evaluating color difference and glossiness. 【Measurement Methods and Processing Methods】 ■Others ■Weather Resistance Testing *For more details, please download the PDF or feel free to contact us.

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Our organization is conducting the assignment of the Raman spectrum of copper phthalocyanine through quantum chemical calculations. By comparing the measured results with the simulation results from quantum chemical calculations, we can perform spectral assignment, which allows for the analysis of vibrational modes. Here, we will introduce a case study of the analysis of "copper phthalocyanine," which is also expected to be utilized in organic thin-film transistors and other applications. 【Measurement and Processing Methods】 ■ [Raman] Raman Spectroscopy ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization conducts lipid imaging. TOF-SIMS excels in low-mass components and enables imaging with high spatial resolution. On the other hand, MALDI-MS specializes in high-mass components and offers a wide variety of lipids that can be imaged. Here, we present examples of measurements taken with TOF-SIMS and MALDI-MS, using lipid imaging mass spectrometry results from mouse testes as a case study. [Measurement Methods] ■ [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry ■ [MALDI-MS] Matrix-Assisted Laser Desorption Ionization Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Our organization conducts evaluations of the hierarchical structure of polymer materials using X-ray diffraction and scattering techniques. It is known that the differences in higher-order structures created by amphiphilic substances affect the moisturizing and permeability properties of skin tissue, making it important to understand these structures in order to evaluate the functionality of the materials. We will introduce examples of evaluating the hierarchical structure of polymers using XRD (X-ray diffraction) for structures on the order of a few nanometers and SAXS (small-angle X-ray scattering) for structures on the order of several tens of nanometers. 【Measurement and Processing Methods】 ■ [XRD] X-ray Diffraction ■ [SAXS] Small-Angle X-ray Scattering *For more details, please download the PDF or feel free to contact us.

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Our organization conducts calculations of acid dissociation constants (pKa) using quantum chemistry. The acid dissociation constant (pKa) is one of the indicators that quantitatively represents the strength of an acid (the ease of proton dissociation). Knowing the pKa helps in estimating the solubility of compounds in relation to pH, their state, the ease of absorption of pharmaceuticals in the body, and pH buffering effects. Using the acid dissociation energy differences obtained from quantum chemical calculations and experimental pKa values, we create calibration curves for different solvents and functional groups, and present examples of studies investigating the impact of intramolecular hydrogen bonding on pKa. [Measurement Methods and Processing Methods] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization conducts evaluations of molecular permeability to lipid bilayers using molecular dynamics simulations. The free energy obtained from molecular dynamics calculations is an important value that contributes not only to predicting the stability of the system but also to understanding the material distribution and transport phenomena in systems with spatial and temporal fluctuations. For example, it is effective in gaining insights into the permeability of molecules across biological membranes. Using lipid bilayers in aqueous solvents as an example, we will introduce a case where the permeability of molecules in the membrane was discussed based on the free energy values when benzene and carbon dioxide were transported. [Measurement Methods and Processing Techniques] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization conducts analyses of the thermal decomposition reactions of ionic liquids using quantum chemical calculations. Since ionic liquids are often used at high temperatures for extended periods, understanding their reactivity, such as thermal decomposition, is essential. We will introduce examples of evaluating the likelihood of thermal decomposition reactions of ionic liquids through quantum chemical calculations. 【Measurement Methods and Processing Methods】 ■Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization conducts evaluations of the bonding state of cathodes in secondary batteries. X-ray photoelectron spectroscopy (XPS), which is one of the methods for analyzing surface states, is suitable for evaluating binders and conductive additives due to its shallow detection depth (approximately 10 nm). Hard X-ray photoelectron spectroscopy (HAXPES), which uses hard X-rays (Ga rays) for excitation, allows us to obtain information about active materials buried under binders without causing damage, thanks to its deeper detection depth. 【Measurement and Processing Methods】 ■ [XPS] X-ray Photoelectron Spectroscopy ■ [HAXPES] Hard X-ray Photoelectron Spectroscopy ■ Processing under controlled atmosphere *For more details, please download the PDF or feel free to contact us.

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Our organization conducts metal analysis in organic materials. Metal components can cause a decrease in insulation properties when they contaminate organic materials, such as in semiconductor devices. Therefore, it is important to understand the amount of metal in organic materials. In this case, we analyzed the metal content in organic materials (polyethylene products, polypropylene products, polyimide films). Organic materials can be acid-digested by irradiating them with microwaves in a sealed state (under high temperature and pressure). [Measurement Method / Processing Method] ■ [ICP-MS] Inductively Coupled Plasma Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Our organization conducts observations of structural changes in ABS resin through tensile testing using in situ X-ray CT. In in situ X-ray CT measurements, it is possible to perform structural observations while applying a load (tensile or compressive) to the sample. In this case, X-ray CT measurements were conducted on a sample of ABS resin containing glass filler under tensile load, and the tensile stress applied to the sample was calculated. The three-dimensional structural changes of the resin and glass filler under each stress condition were monitored. [Measurement Method / Processing Method] ■ X-ray CT Method *For more details, please download the PDF or feel free to contact us.

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Our organization provides the energy profile of the Li-ion insertion and extraction process in LIB anodes/electrolytes using the ESM-RISM method. During the charge and discharge processes of lithium-ion secondary batteries (LIB), various phenomena occur near the interface with the electrolyte and the anode, including the formation of solvation, desolvation, the formation of the electric double layer, and the insertion and extraction of Li ions. This document introduces a case study that evaluates the energy profile and solvation structure during the Li-ion insertion and extraction process from graphite anodes using the hybrid ESM-RISM method, which combines Effective Screening Medium (ESM) and Reference Interaction Site Model (RISM) through simulation. [Measurement and Processing Methods] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization offers analysis of the end group structure of polycarbonate. Polycarbonate is an engineering plastic known for its excellent impact resistance and heat resistance, and it is widely used as a material in electrical, electronic, and optical devices. There are mainly two methods of manufacturing polycarbonate, and the end group structure, which affects the physical properties of the polymer, varies depending on the manufacturing method. Since the end group portion of the polymer is small compared to the main chain, the analytical methods available for its structural analysis are limited. Here, we present a case study evaluating the end group structure of polycarbonate using thermal decomposition GC/MS. [Measurement Method / Processing Method] ■ [GC/MS] Gas Chromatography Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Our organization conducts NMR chemical shift simulations of organic molecules using quantum chemical calculations. Determining the isomeric structures of organic molecules is a very important issue in fields such as natural product chemistry and drug discovery. Combining the results of nuclear magnetic resonance (NMR) measurements with NMR chemical shift simulation results from quantum chemical calculations is believed to be useful for elucidating the structures and evaluating the properties of novel compounds that lack model compounds for structure-chemical shift correlation. This document presents a case study on the identification of structural isomers of biologically active quinoxaline derivatives. [Measurement Methods and Processing Methods] ■ [NMR] Nuclear Magnetic Resonance Analysis ■ Computational Science, AI, Data Analysis ■ Others *For more details, please download the PDF or feel free to contact us.

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Our organization is capable of identifying the composition of petroleum products, evaluating molecular weight distribution, and distinguishing types of oils. Petroleum products such as oils and greases are mixtures of hydrocarbons with various compositions, and GC/MS methods are effective for their qualitative analysis. Here, we present a case study where commercially available oils with different molecular weight distributions were measured using soft ionization methods. Compared to hard ionization methods (EI), soft ionization methods (FI and FD) allow for the detection of molecular ions, making them effective for evaluating the composition of oil components. In particular, the FD method can also be applied to evaluate oils containing high molecular weight components that are difficult to volatilize. [Measurement Method / Processing Method] ■ [GC/MS] Gas Chromatography Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Our organization offers (S)TEM analysis of the fine structure of hair cross-sections. The hair cell membrane complex (CMC) serves as a pathway for chemicals during processes such as bleaching and dyeing hair. In particular, the CMC between the cuticle layers has a three-layer structure, which we have visualized. We present a case where osmium tetroxide (OsO4) was used for electron staining targeting unsaturated fatty acids in lipids, followed by TEM observation and STEM-EDX analysis. [Measurement and Processing Methods] ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ [TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM) ■ Ultramicrotome processing ■ Others *For more details, please download the PDF or feel free to contact us.

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Our organization offers (S)TEM observation using negative staining. Organic functional materials, such as fine particles and fibrous substances, are primarily composed of light elements like C (carbon), H (hydrogen), O (oxygen), and N (nitrogen), which do not provide sufficient contrast for morphological observation in (S)TEM. Therefore, by applying staining to these materials, we can enhance the contrast and enable observation. In this instance, we will introduce a case where negative staining was performed using phosphotungstic acid (H3[P(W3O10)4]·nH2O, abbreviated as PTA). 【Measurement Method / Processing Method】 ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ Others *For more details, please download the PDF or feel free to contact us.

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Our organization offers (S)TEM observation of polymer materials using electron staining. Since polymer materials are composed of light elements, it is difficult to obtain clear contrast in (S)TEM observations. Staining can enhance the contrast for such materials. This document introduces examples of staining and observation using a method called electron staining with ruthenium tetroxide (RuO4), osmium tetroxide (OsO4), and phosphotungstic acid (H3[P(W3O10)4]·xH2O, abbreviated as PTA). [Measurement and Processing Methods] ■ [(S)TEM] (Scanning) Transmission Electron Microscopy ■ Others *For more details, please download the PDF or feel free to contact us.

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Our organization is conducting simulations of precursor adsorption in ALD film deposition using first-principles calculations. ALD (Atomic Layer Deposition) is a film deposition technology that utilizes continuous chemical reactions in the gas phase. It is widely used in the semiconductor field, where fine processing is required, due to its ability to precisely control film thickness, operate at low temperatures, and provide good step coverage. In general, to understand the differences in film deposition rates between different substrates in the slow deposition process of ALD, it is necessary to elucidate the precursor adsorption mechanisms on the substrate. [Measurement Methods and Processing Techniques] ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our organization offers evaluation of the crystallinity of carbon materials using Raman mapping. Carbon materials possess different properties depending on their structure and crystallinity, and are used in various applications such as industrial components and medical devices. Linking the characteristics of materials to their crystallinity is effective as an indicator for material development. This document presents a case study where the in-plane distribution (peak intensity) of diamond particles, a carbon material applied to the surface of components, and the crystallinity (full width at half maximum) of each diamond particle were evaluated using Raman mapping. Diamonds exhibit a sharp peak observed sensitively at 1330 cm-1, making Raman evaluation effective. [Measurement Method / Processing Method] ■ [Raman] Raman Spectroscopy *For more details, please download the PDF or feel free to contact us.

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Our organization offers composition distribution evaluation of organic films using Raman mapping. The properties such as mechanical characteristics, thermal resistance, and durability change by mixing materials. It is important to link material properties with mixing conditions in material development, and using dispersion as an indicator is effective. This document presents a case study of mapping the distribution of PS (polystyrene) and PCL (polycaprolactone) using Raman. By comparing the characteristic Raman peaks of each material, it is possible to separate the components of the mixture. Component separation from PCL was performed through spectral analysis around the PS-specific peak at approximately 3050 cm-1. [Measurement Method / Processing Method] ■ [Raman] Raman Spectroscopy *For more details, please download the PDF or feel free to contact us.

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Our organization offers imaging of cuticles. The evaluation of cuticles has been limited to structural observation using electron microscopy due to their fine structure, and detailed component distribution has remained unclear. By using TOF-SIMS, which can evaluate the distribution of inorganic and organic materials at the sub-micron level, it is possible to assess the distribution of various components within the cuticle. This document presents the results of evaluating hair and visualizing the component distribution within the cuticle. [Measurement and Processing Method] ■ [TOF-SIMS] Time-of-Flight Secondary Ion Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Our organization offers dynamic viscoelastic evaluation of PDMS using AFM. Dynamic Mechanical Analysis (DMA) is an effective method for investigating viscoelastic behavior, which is an important factor in the research and development of polymer materials. Additionally, by combining it with the AFM mechanism, it becomes possible to measure in-plane distribution and evaluate localized areas. This document presents a case study using AFM-DMA to map the viscoelastic modulus of PDMS (polydimethylsiloxane) and conduct frequency-dependent spectroscopy evaluation. [Measurement Method / Processing Method] ■ [AFM] Atomic Force Microscopy *For more details, please download the PDF or feel free to contact us.

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Our organization offers evaluation of the direct current voltage dependence of carriers in semiconductors. SMM measurement is a technique that can map the concentration of carriers in semiconductors. Additionally, it is possible to apply a direct current voltage to the sample during SMM measurement to induce carriers while measuring. Mapping measurements are conducted while acquiring SMM signals under different applied voltage conditions at each measurement point, constructing a data cube. After collecting all data, analyzing the SMM signals according to the applied voltage conditions allows us to visualize the behavior of carriers in response to the applied voltage. [Measurement Method / Processing Method] ■ [SMM] Scanning Microwave Microscope Method *For more details, please download the PDF or feel free to contact us.

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Our organization offers structural evaluation of lithium-ion secondary battery anode materials. The structural state of the anode materials, such as the dispersion of active substances and porosity, affects performance. In this case, we observed the internal structure of the anode material using X-ray CT, which allows for non-destructive and high-resolution measurement of the three-dimensional structure. By analyzing the results obtained from X-ray CT, it is also possible to detect foreign substances within the electrode material and evaluate the porosity of the active substance layer. [Measurement Method / Processing Method] ■ X-ray CT Method *For more details, please download the PDF or feel free to contact us.

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Our organization offers three-dimensional structural analysis of 3D printed objects. Understanding the differences between the design drawings and the manufactured products is an important process in quality control. By conducting X-ray CT measurements, it becomes possible to compare the three-dimensional structural "discrepancies" between the printed objects and the design drawings, allowing for an evaluation of the quality. In this case study, we are evaluating molded products made from resin-based materials, but similar evaluations can also be conducted for molded products made from metal-based materials that allow X-rays to pass through. [Measurement Method / Processing Method] ■ X-ray CT Method *For more details, please download the PDF or feel free to contact us.

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When evaluating the internal structure of materials, it is necessary to expose the internal structure while maintaining it through cross-sectional processing techniques such as cutting and polishing. This document introduces a case where the microtome method, which has a relatively small impact from processing damage, was used to create cross-sections of hair, followed by AFM observation of the internal structure and evaluation of elastic modulus. The microtome method is a cutting processing technique widely used in the field of soft materials, such as rubber materials and biological samples, and this approach has made it possible to evaluate the mechanical properties of the internal structure of these materials. [Measurement and Processing Methods] [AFM] Atomic Force Microscopy [AFM-MA・AFM-DMA] Mechanical Property Evaluation (Elastic Modulus Measurement, Dynamic Viscoelasticity Measurement) Ultra Microtome Processing *For more details, please download the PDF or feel free to contact us.

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Our company conducts local area evaluation of positive electrode active materials for secondary batteries (C0614). It is known that in lithium-ion secondary batteries, the crystal structure of the active material surface and the valence of metal elements change due to ion extraction and insertion during charge and discharge, as well as degradation. In a case where TEM was used for local area evaluation to assess composition, crystal structure, and chemical state, it was found through EDX that AlOx is coated on the outermost layer. Additionally, electron diffraction and EELS revealed that the crystal structure and valence differ between the surface and the interior of the active material. [Measurement and Processing Methods] ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ [TEM-EDX] Energy Dispersive X-ray Spectroscopy (TEM) ■ [TEM-EELS] Electron Energy Loss Spectroscopy *For more details, please download the PDF or feel free to contact us.

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We offer particle size analysis of Au nanoparticles using small-angle X-ray scattering (SAXS) method. Metal nanoparticles are known to exhibit unique properties not found in bulk metals. Due to their high catalytic activity and optical properties such as surface plasmon resonance, they are used in applications like fuel cell electrode catalysts and biosensors. To control these properties, it is necessary to understand their structure and composition. By using TEM and SAXS complementarily, it is possible to conduct reliable particle size analysis. [Measurement and Processing Methods] ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ [SAXS] Small-Angle X-ray Scattering *For more details, please download the PDF or feel free to contact us.

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We offer the evaluation of stainless steel passive films in accordance with SEMI standards (C0612). Stainless steel exhibits excellent corrosion resistance due to the formation of a very thin, dense, and stable chromium oxide film (passive film) on its surface. The composition and film thickness of this passive film can be effectively evaluated using surface-sensitive techniques such as XPS and AES. [Measurement and Processing Methods] ■ [AES] Auger Electron Spectroscopy ■ [XPS] X-ray Photoelectron Spectroscopy ■ Others *For more details, please download the PDF or feel free to contact us.

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We offer identification analysis of pigments using the direct MS method (C0611). Due to the insolubility of pigments in solvents, chromatographic separation is not possible, and the analytical methods are limited. However, evaluation can be performed using the direct MS method, which directly introduces the sample into the mass spectrometer. There are several techniques within the direct MS method, and it is necessary to choose the appropriate one based on the properties of the sample. In a case where pigments in toner were measured, molecular ions were detected, allowing for structural estimation. [Measurement and Processing Methods] ■ Others *For more details, please download the PDF or feel free to contact us.

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We offer wide-area cross-sectional SEM observation (C0610) using Xe-PFIB. The metal bonding that electrically connects the electrodes of integrated circuits, electrodes, printed circuit boards, and semiconductor packages has a diameter of several tens of μm to several hundred μm. With Xe-PFIB (Xe-Plasma Focused Ion Beam), we can target processing positions on the order of several tens of nm and create cross-sections of several hundred μm square, allowing for a detailed understanding of the entire view at the center of the bonding. 【Measurement and Processing Methods】 ■ [SEM] Scanning Electron Microscopy ■ X-ray CT Method ■ [FIB] Focused Ion Beam Processing *For more details, please download the PDF or feel free to contact us.

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Our company is conducting theoretical calculations (C0583) on the Fe/MgO/Fe junction system that demonstrates the tunnel magnetoresistance effect of MRAM. Tunnel magnetoresistance (TMR) is a phenomenon where the electrical resistance changes depending on the orientation of magnetization in ferromagnetic layers separated by a thin insulating layer, and applications in magnetic resistance memory (MRAM) are being advanced. Through simulations, it is also possible to evaluate the effects of behaviors under bias application, strain at the interface, and oxygen vacancies on the physical properties of TMR. 【Measurement Methods and Processing Methods】 ■ Computational Science, AI, Data Analysis *For more details, please download the PDF or feel free to contact us.

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Our company offers technologies suitable for structural evaluation of electronic devices, and we propose analytical methods tailored to the observation field and objectives. In a case where we investigated specific areas of a device using X-ray CT and FIB-SEM, we first used X-ray CT to observe the internal structure of the entire sample and identify specific areas. Next, we used FIB-SEM to confirm the detailed structure of the specific structures identified on the vias. 【Measurement and Processing Methods】 ■[SEM] Scanning Electron Microscopy ■[SEM-EDX] Energy Dispersive X-ray Spectroscopy (SEM) ■X-ray CT Method ■[FIB] Focused Ion Beam Processing *For more details, please download the PDF or feel free to contact us.

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We offer composition distribution evaluation of ultra-thin films using ARXPS (Angle-Resolved X-ray Photoelectron Spectroscopy) (C0550). Photoelectrons emitted by X-ray irradiation are detected at different take-off angles, and spectra with varying detection depths are used to evaluate the depth profile very close to the sample surface. This method improves depth resolution and has the advantage of no compositional changes due to selective sputtering or mixing, making it effective for evaluating the depth profiles of ultra-thin films (on the order of a few nanometers) on substrates. [Measurement Method / Processing Method] ■ [XPS] X-ray Photoelectron Spectroscopy *For more details, please download the PDF or feel free to contact us.

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We offer quantitative analysis of glucosylceramide in konjac (C0491). Glucosylceramide is a type of glycosphingolipid found in food. It is included not only in cosmetics that are applied directly to the skin but also in health foods and general foods, such as supplements containing glucosylceramide, as well as various processed products and beverages. By using HPLC, it is possible to analyze the amount of glucosylceramide contained in raw crops and processed foods with high precision. [Measurement Method/Processing Method] ■ [HPLC] High-Performance Liquid Chromatography *For more details, please download the PDF or feel free to contact us.

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We offer the evaluation of the chemical state of RuO2 catalysts using in-situ XAFS (C0456). Under controlled conditions with gas atmospheres and temperatures tailored to the sample environment, it is possible to assess the chemical bonding state and local atomic structure of the sample. Therefore, it is suitable for cases where state evaluation is required in special environments, such as catalysts. In a case where RuO2 powder was heated from room temperature to 400°C under a reducing atmosphere using in-situ XAFS, it was confirmed from the shape of the spectrum that RuO2 is reduced to Ru between 100°C and 200°C. [Measurement Method / Processing Method] ■ [XAFS] X-ray Absorption Fine Structure *For more details, please download the PDF or feel free to contact us.

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We would like to introduce our spectral separation technology using the DOSY method. In NMR, when performing structural analysis of each component in a mixed sample, each component is typically isolated and purified before measurement. The DOSY method allows for the separation of spectra for each component by utilizing the differences in diffusion rates, enabling structural analysis of each component in a mixed sample without the need for isolation and purification. 【Features】 - Effective for measuring samples where physical separation by molecular weight is difficult - Effective for measuring samples that undergo structural changes during pretreatment (e.g., samples in the biochemical field such as proteins) - Facilitates structural analysis of each component by separating mixed spectra of multiple components - Provides insights into the mobility of molecules of each component in the mixture *For more details, please download the PDF or feel free to contact us.

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We will introduce a technique that emphasizes the signals of polymers or small molecules using a measurement method that utilizes the differences in relaxation times or diffusion coefficients of each component in a mixed sample. When electromagnetic waves are irradiated onto atomic nuclei in a static magnetic field, they absorb energy corresponding to the energy difference ΔE and enter an excited state (nuclear magnetic resonance). When the irradiation of electromagnetic waves is stopped, the process of returning to the original state is called relaxation, and the relaxation time is the time required for this process. The relaxation time is closely related to the mobility of the molecules. [Measurement Method / Processing Method] ■ [NMR] Nuclear Magnetic Resonance Analysis *For more details, please download the PDF or feel free to contact us.

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We offer NMR (Nuclear Magnetic Resonance Analysis) services. Since NMR directly observes nuclear spins, the area of the peaks of the measured nuclides obtained from the measurement is proportional to the number and concentration of the nuclides contained in the solution or solid being measured. Based on this principle, NMR allows for quantitative analysis without the need for a calibration curve. For example, using the integral value of the peak of the 31P nucleus, it is possible to determine the concentration of one component of a two-component mixture from the known concentration of the other component according to a relationship. [Measurement Method / Processing Method] ■ [NMR] Nuclear Magnetic Resonance Analysis *For more details, please download the PDF or feel free to contact us.

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We offer metal contamination analysis of Si wafers (B0233). The purpose of metal contamination analysis of Si wafer surfaces using ICP-MS includes not only the contamination assessment of the Si wafer itself but also the evaluation of contamination within semiconductor devices and the assessment of the working environment due to Si wafer exposure. Therefore, the analysis of Si wafer surfaces is conducted for various purposes. ICP-MS analysis allows for the highly sensitive measurement of metal contamination on Si wafer surfaces, and it is also possible to specify the evaluation area according to the purpose. [Measurement Method] ■ [ICP-MS] Inductively Coupled Plasma Mass Spectrometry *For more details, please download the PDF or feel free to contact us.

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Our organization has established a system that suppresses atmospheric exposure through atmosphere control, and further cools the samples for processing, observation, and analysis. We can produce TEM thin samples while maintaining the original structure of the specimen, allowing for observation and analysis. Even with unstable materials, we can perform thinning processing while cooling, and by maintaining a vacuum during the transfer between processing and observation devices, we enable cross-sectional TEM/SEM observation that minimizes atmospheric exposure and thermal alteration. 【Measurement and Processing Methods】 ■ [(S)TEM] Scanning Transmission Electron Microscopy ■ Processing under atmosphere control ■ Cryo-processing *For more details, please download the PDF or feel free to contact us.

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Control of particles in the semiconductor wafer manufacturing process is extremely important for ensuring wafer quality. In this case study, we estimated what the particles were on a Si wafer through SEM observation, EDX analysis, and simple quantification. The SEM equipment, which has high spatial resolution in the submicron range and can scan areas of several centimeters, allows for rapid inference of what the particles on the wafer are based on shape and composition information, enabling quick identification of the generation process. Analysis linked to coordinate data from defect inspection equipment is also possible.

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• Wafer
• Other semiconductor manufacturing equipment

Freon gases are utilized in various applications such as refrigerants, foaming agents, semiconductors, and cleaning agents for precision parts due to their chemically stable nature and minimal impact on human health. On the other hand, they are substances that contribute to ozone layer depletion and global warming, which is why they are regulated by law. In this case, Freon gases were analyzed using GC/MS, and the separation analysis of CF4, which has low polarity and is difficult to separate among PFCs, was conducted. By using GC/MS, it is possible to qualitatively analyze specific Freons such as CFCs, HCFCs, and alternative Freons like HFCs and PFCs.

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• Environmental Analysis

In situ X-ray CT measurements allow for internal structure analysis under conditions where a load (tension or compression) is applied to the sample. In this document, in situ X-ray CT measurements were conducted using an aluminum plate as the sample, both in its normal state and in an extended state. We calculated the tensile stress applied to the sample and monitored the internal structural changes under each stress condition. By combining in situ X-ray CT measurements with image analysis technology, it is possible to evaluate under actual usage conditions, which was previously difficult, and assess the impact of stress on the product.

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