List of CVD Equipment products

Reduce the workload from handling heavy objects! Here are five case studies that solved customer challenges! We are also accepting free consultations and tests tailored to your work!

• Other conveying machines

Presentation of explanatory materials on JIS and ISO standards. We propose suitable safety barriers from a rich product series! Free rental of demo kits.

• Other safety and hygiene products

Chemical reactions caused by dilute gases can also be considered!

• CVD Equipment
• Wafer
• Other semiconductors

Features of "DSMC-Neutrals"!

• Vacuum Equipment
• Vacuum pump
• CVD Equipment

A compact multi-thin film device that incorporates sputtering, deposition, electron beam (EB), and annealing thin film modules in a 60-liter volume chamber, suitable for various applications.

• Sputtering Equipment
• Evaporation Equipment
• CVD Equipment

Total support for the installation and maintenance of semiconductor manufacturing equipment, from precision equipment installation compatible with clean rooms! Additional information.

• CVD Equipment
• Etching Equipment
• Resist Device

Compact multi-film device that incorporates sputtering, deposition, EB, and annealing thin film modules in a 60L volume chamber, suitable for various applications.

• Sputtering Equipment
• Evaporation Equipment
• CVD Equipment

Film formation speed up & high adhesion! DLC coating equipment with low introduction costs and maintenance expenses.

• Plasma Generator
• CVD Equipment
• Plasma surface treatment equipment

Achieving excellent film thickness distribution and reproducibility! Multi-chamber specifications and various custom-made options are also available.

• CVD Equipment

Controllable extensive membrane properties! Significant particle reduction and improved productivity.

• CVD Equipment

A porous silicon formation device that further applies conventional anodic oxidation equipment. Porous silicon wafers are formed depending on the chemical solution used and the current density.

• CVD Equipment

Delta Seal (HNV HELICOFLEX(R) DELTA) achieves ultra-high vacuum! [Standardized for JIS V-groove flanges]

• Sealing
• CVD Equipment
• Etching Equipment

No need to change the size or number of existing bolts? A must-see for those struggling with "wanting to eliminate gas permeation and gas release from vacuum rubber O-rings" in semiconductor manufactu...

• Sealing
• CVD Equipment
• Electron beam lithography equipment

UHP/UHV, ultra-high purity, ultra-high vacuum, advanced metal sealing solutions for ultra-low temperature.

• Sealing
• CVD Equipment
• Etching Equipment

Sales of aluminum frames up to 5800 mm are possible! Additionally, we also accept "assembled products" such as exterior booths! Compatibility with other companies is also available.

• Other assembly machines
• CVD Equipment
• aluminum

Proposed simplifications for harness processing, introduced software for harness inspection, and achieved mass production!

• CVD Equipment

Improvement of gas usage efficiency with a low-capacity chamber! Achievements in providing support for mass production.

• CVD Equipment

Replace with elastomer seals! Introducing our metal seals.

• Sealing
• CVD Equipment
• Semiconductor inspection/test equipment

Involved in the manufacturing of both development and mass production machines, achieving manufacturing and mass production in a short period!

• CVD Equipment

"Replace rubber O-ring to metal seal, Eliminate gas permeation and gas release." This can be possible with Delta Beta HNRV.

• Sealing
• CVD Equipment

Cost reduction with functional aluminum frames and a wide range of accessories [Available not only as individual items but also as "assembled products" in flat or three-dimensional configurations!]

• Other assembly machines
• CVD Equipment

We relentlessly pursue customer satisfaction and technical expertise, contributing to society. We have extensive experience in contract manufacturing for OEMs and prototype machines.

• CVD Equipment
• Wafer processing/polishing equipment
• Other semiconductor manufacturing equipment

Small quantities and wide varieties. NSG(SiO2)/PSG/BPSG deposition. Single-wafer processing atmospheric pressure CVD (APCVD) system (Compatible with 8-inch SiC wafers)

• CVD Equipment

For mass production of crystalline Si solar cells/For NSG(SiO2)/PSG/BSG deposition High productivity/Continuous atmospheric pressure CVD (APCVD) system

• CVD Equipment

For prototyping, development, and small lot production For deposition of NSG(SiO2)/BSG/PSG/BPSG Batch processing (simultaneous processing of multiple substrates) APCVD system

• CVD Equipment

A film deposition platform for semiconductor wafers and advanced packaging capable of various film deposition treatments.

• Sputtering Equipment
• Etching Equipment
• CVD Equipment

Meeting the high cleanliness standards required in the semiconductor and medical device fields. We carry out everything from precision cleaning to packaging and assembly in a consistent clean environm...

• CVD Equipment
• Sputtering Equipment
• Resist Device

We have a track record of equipment such as 'plasma CVD systems for metal containers' and 'ICP-type MOCVD systems'!

• CVD Equipment

Coating is possible up to a 3L container! It contributes to reducing logistics costs through lightweight containers.

• CVD Equipment

A simple structure with high versatility! It adopts a unique plasma control method.

• CVD Equipment

The compatible film types are DLC, amorphous SiC, etc.! Equipped with a substrate heating mechanism (maximum set temperature: 500°C).

• Plasma Generator
• CVD Equipment

4.5 generation glass substrate deposition system for rigid/flexible devices such as FPD.

• CVD Equipment

Mass production / NSG(SiO2)/PSG/BPSG deposition High-productivity / Continuous atmospheric pressure CVD (APCVD) system (for 12-inch wafers)

• CVD Equipment

Mass Production / NSG(SiO2)/PSG/BPSG deposition　 High-productivity/Continuous atmospheric pressure CVD (APCVD) system (for up to 8-inch wafers)

• CVD Equipment

It is an engineering plastic that boasts excellent heat resistance, low water absorption rate, and outstanding sliding properties.

• CVD Equipment
• valve
• plastic

There is a track record of growing nitride semiconductor crystals on various semiconductor substrates. Customization is also possible according to your requests.

• CVD Equipment
• LED Module
• Wafer

Explaining the benefits of aerogel products that can be used in high-temperature environments!

• CVD Equipment

◉ Short time: Easily conduct graphene synthesis experiments in just 30 minutes per batch. ◉ High-precision temperature and pressure control. ◉ Sophisticated software.

• CVD Equipment

CVD, PVD (evaporation, sputtering, etc.) high vacuum, ultra-high temperature plate heater for wafer and small chip heating with excellent uniformity and reproducibility.

• Other semiconductor manufacturing equipment
• Annealing furnace
• CVD Equipment

Plasma CVD equipment compatible with wafer sizes of Φ3 inch and Φ4 inch. Rapid synthesis of clean, high-quality graphene while suppressing impurities.

• CVD Equipment

Hot Wall Type Thermal CVD Equipment: A compact, high-performance CVD device ideal for fundamental research.

• CVD Equipment
• Annealing furnace
• Heating device

TiC treatment and TiCN treatment are possible! It can be used under harsher conditions than PVD treatment.

• CVD Equipment

Adopting a unique LIA method plasma source, we achieve ultra-fast, high-quality vacuum deposition on resin films and metal foils!

• CVD Equipment

Adopting a unique LIA method plasma source, we achieve ultra-fast, high-quality vacuum deposition on flat substrates such as glass and metal!

• CVD Equipment

With a space-saving design, the vacuum pump module can be installed up to 18 meters away from the process module.

• CVD Equipment

Demo available at our company! New technology launched in the market. CVD with atmospheric pressure plasma. Capable of handling small quantities and a variety of products.

• CVD Equipment
• Other painting machines
• Other processing machines

Silicon nitride, which has heat resistance and excellent thermal shock resistance, is a material with strong mechanical strength and good balance.

• Fine Ceramics
• CVD Equipment
• Heating device

The passivation MBE device is composed of various chambers specially designed for laser facet passivation and other purposes.

• Evaporation Equipment
• CVD Equipment

Eliminate concerns about vacuum piping equipment! Presenting examples of measures against degradation of centering due to plasma and heat.

• Other semiconductor manufacturing equipment
• valve
• CVD Equipment

Heat-resistant 150°C insulation material

• CVD Equipment

Equipped with a flow management system! Processing of powders at high temperatures using CVD/PECVD is possible.

• CVD Equipment

Various plasma sources can be equipped! Customized design for CVD, MOCVD, and ALD equipment.

• CVD Equipment

The maximum film-forming temperature is 800°C! It can accommodate up to 4x DLI evaporators with the chamber heating mechanism.

• CVD Equipment

Compatible with SI 500-1M, SI 500 PPD-1M, etc.! The transport chamber is available in three types.

• CVD Equipment

Control of ion density by ICP power! Achieving low-temperature film formation, low damage, and high conformality.

• CVD Equipment

A must-see for semiconductor material manufacturers! We are presenting examples of proposals addressing the challenges of high-temperature conditions in solid material supply.

• Other semiconductor manufacturing equipment
• valve
• CVD Equipment

Heat-resistant above 300℃! We can offer various super engineering plastics. There has been an increase in inquiries from the semiconductor industry as an alternative proposal to the "depletion of high...

• CVD Equipment
• valve
• plastic