4-axis cylindrical coordinate clean robot STHR4000 series
It is suitable for wafer transport and allows for quick wafer exchange.
The STHR4000 series of super clean room 4-axis cylindrical coordinate twin-arm robots is suitable for wafer transport in semiconductor manufacturing equipment and inspection devices. The two arms allow for quick wafer exchanges. You can choose between base type and flange type to match the equipment layout. S-curve acceleration and deceleration control enables high-speed and high-precision wafer transport. It is possible to accommodate optimal chucks tailored to the transported objects and equipment layout. For more details, please contact us or refer to the catalog.
- Company:ジェーイーエル
- Price:Other