Clean Robot "STCR4000S Series"
A clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices!
The "STCR4000S Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. With its two arms, it enables quick wafer exchanges. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 ■ Arm variations can be selected from 100mm and above ■ Z-axis variations can be selected from 200mm and above ■ Load capacity is 3kgf or less based on the third joint of the arm ■ Adoption of twin arms reduces wafer exchange time ■ Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.
- Company:ジェーイーエル
- Price:Other