●Closed-loop control ●Equipped with absolute encoder ●Achieves battery-less operation
This is a 4-axis cylindrical coordinate clean robot designed for super clean rooms. It is a new type of twin-arm robot compatible with 2-inch to 300mm wafers, achieving low cost, high-speed transport, and no loss of steps.
It employs closed-loop control that does not lose steps even under rapid load fluctuations or sudden acceleration, further enhancing the robot's reliability. By incorporating an absolute encoder, it can grasp its current position and reduce the time required for operation after returning to the origin.
It is equipped with a mechanical multi-turn absolute sensor that does not require a battery. It is compatible with conventional models (mounting compatibility and performance compatibility), allowing for easy replacement.
The high rigidity arm has a third joint equivalent to 3 kgf (including wrist block, chuck, and workpiece). Arm variations include: 100mm, 130mm, 160mm, and 200mm. Depending on the device layout, it is possible to choose the mounting method for base type or flange type devices.
A Bernoulli chuck can be installed (optional).
