VAT List of Products and Services

- Angle and inline body - Bellows shaft seal - Large differential pressure support - Long cycle life

• Vacuum Equipment

- Minimal vibration and particle generation during valve opening and closing - Easy and quick maintenance due to the split body structure - No adjustment needed after disassembly and cleaning

• Vacuum Equipment

- High-speed, particle-free, shock-free operation - Extremely short control response time - Equipped with a service port (for PC connection or service BOX2 connection)

• Vacuum Equipment

- High operating speed with lightweight components - No system downtime during maintenance - Three different service positions - Safety mode during maintenance

• Vacuum Equipment

- High throughput due to short opening and closing times - Designed for harsh processes and high temperatures - Small distance between the flange faces of the valve

• Vacuum Equipment

- Low holding costs - High throughput due to short opening and closing times - Customer-specified design

• Vacuum Equipment

- Shock-free L-shaped operation - Particle-free, vibration-free operation - Low ownership cost

• Vacuum Equipment

- Excellent pressure control capability - Automatic detection of service timing (contamination detection) - Equipped with service port (for PC connection or service box connection) - Excellent adaptability to processes with high contamination levels

• Vacuum Equipment

- Large differential pressure response - The aperture can be set using a memory - Angle and inline body

• Vacuum Equipment

Series 61.2: A system that combines a butterfly control valve and a Series 12.1 vacuum sealing gate valve within a single valve body. The gate valve acts as a slave to the butterfly control valve and is suitable for OEM interfaces. Series 95.1: A combination of a control valve and an angle valve, equipped with a bellows shaft seal. The valve can operate open at a differential pressure of 0.1 MPa. Series 95.2: A combination of a control valve and a gate valve, equipped with an O-ring shaft seal.

• Vacuum Equipment

- Excellent pressure control capability - Equipped with limit switch - Service port equipped (for PC connection or service box connection)

• Vacuum Equipment

- Minimal shock - Low particle generation - Vacuum section and mechanism are isolated - Vulcanized gate seal - Long life cycle

• Vacuum Equipment

- Extremely low outgassing amount - Large differential pressure compatibility - CF rotating flange

• Vacuum Equipment

- High-speed, particle-free operation - Accurate pressure control - Equipped with service ports (for PC connection and CPA software)

• Vacuum Equipment

- Super high-speed operation - Built-in software operable on Windows - Remote control analog/digital interface

• Vacuum Equipment

- High reliability - No maintenance required - For research institutions

• Vacuum Equipment

- Enables uniform exhaust with particle-free operation - Proven track record of excellent pressure control - Equipped with service port (for connecting to PC and Control Performance Analyzer (CPA) via USB)

• Vacuum Equipment

- The seal uses the FLEX VATRING method. - Deformation of the sealing surface is within the range of elastic deformation. - Standard hex wrench, no torque management required. - High conductance. - FLEX VATRING can be replaced up to two times.

• Vacuum Equipment

- No lubricant required - Low particle generation - Shock reduction - Vulcanized seal

• Vacuum Equipment

- No welded or brazed joints between the water-cooled section and the vacuum section - Industrial use - UHV compatible

• Vacuum Equipment

- Sturdy and compact vacuum shut-off valve for pumps - Operates with differential pressure

• Vacuum Equipment

- Durable and long life cycle - Mechanical lock in closed position - Radiation resistance performance - "Hard on hard" sealing

• Vacuum Equipment

-No lubricant required -Vulcanized seal for DN 63-200 -Easy maintenance

• Vacuum Equipment

- Low particle generation - Easy maintenance - Low cost

• Vacuum Equipment

Hatcher, optimal for harsh processes like CVD. - Uniform pressing and extended lifespan of gate seals by real L-MOTION - Easy maintenance from the service cover - Pneumatic locking mechanism in open or closed position - Particle-free, shock-free - Adjustable sealing force to match sealing materials - Low shock

• Vacuum Equipment

- Protection from the process side by placing the bellows inside the actuator - Differential pressure tab made of PEEK material - Maintenance-free actuator - Easy gate replacement - Low shock - Compact design

• Vacuum Equipment

- Enables uniform exhaust with particle-free operation - Proven track record of excellent pressure control - Equipped with service port (for connection to PC and Control Performance Analyzer (CPA) software via USB)

• Vacuum Equipment

The main features of VAT welded bellows are high airtightness, cleanliness, and repeated lifespan. 1. We have sufficient experience in flexibly responding to customer requirements while proposing the best materials and shapes that are more in line with actual usage environments and conditions. 2. We have sufficient reliability based on continuous operation in a state where axial expansion and contraction movements are combined with movements in the axial perpendicular direction, as well as durability tests under differential pressure and heating environments. 3. We can also provide high purity products with extremely low particle generation, produced from manufacturing processes in ISO Class 5 clean environments.

• Vacuum Equipment

Valves for research and development and low vacuum applications in industry - Gate valve with VATLOCK system that securely seals even in back pressure situations with mechanical locking - Structure that does not burden the pump due to low vibration thanks to air damping - Easy to remove and maintain - Low cost

• Vacuum Equipment

The valve can open and close with a differential pressure of 0.1 MPa. - High vacuum gate valve for vacuum sealing applications - Can be opened and closed even with a pressure difference due to the wedge seal.

• Vacuum Equipment

Valves for exhaust and venting in high vacuum applications that require high conductance - Capable of withstanding harsh environments (high resistance to corrosion). - A perforated cylinder rotates, allowing for full conductance. - A rotating structure that hides the O-ring within the valve body. Protects the O-ring from corrosive gases, ensuring a long lifespan!

• Vacuum Equipment