アルバック／ULVAC, Inc. List of Products and Services

The "SWU10-U" is a smartphone-compatible Pirani vacuum gauge that can be directly connected to a smartphone via a USB cable. You can easily perform vacuum measurements with your smartphone. No dedicated power supply or display is required. Lightweight and compact. Thanks to ULVAC's unique structure (patent number 6595945) and the use of protective rubber on the main unit, it has excellent shock resistance. 【Features】 ■ Direct connection to smartphones ■ No AC power required ■ Lightweight and compact ■ Excellent shock resistance ■ Wide bandwidth measurement ■ Extensive fitting lineup *For more details, please refer to the PDF document or feel free to contact us.

• Vacuum Equipment

The A2K series is an abnormal discharge prevention unit that applies a positive voltage pulse to a DC power supply in a reactive sputtering process to neutralize the charge on the target. By reducing abnormal discharges, it enables high power input. The A2K-20K and 40K can be operated in parallel with up to six units each. It is possible to synchronize the output pulses of multiple A2K units. It can be easily installed on existing equipment, achieving improved yield and throughput at a low cost. 【Features】 ○ High throughput ○ Reduced substrate damage ○ Suppressed substrate temperature ○ Simple connectivity ○ Adjustable reverse pulse frequency For more details, please contact us or download the catalog.

• Power Supplies

The G-TRAN series vacuum gauge multi-ion gauge ST2-1/ST2-2 achieves long life by maximizing the advantages of the triode type, even in harsh environments for vacuum gauges. ULVAC has developed and commercialized an ion vacuum gauge that can measure accurately for a longer time, even in severe conditions. The triode type metal ion vacuum gauge significantly reduces running costs and can also contribute to improving the yield of various processes. 【Features】 ○ Triode type metal ion vacuum gauge (patent pending) ○ Small, metal measuring element ○ Wideband measurement ○ Measuring elements with different measurement ranges can be connected ○ Accurate atmospheric pressure measurement For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The VD Series Ver.C is an oil-sealed rotary vacuum pump equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor. It features a two-stage vane design that achieves excellent ultimate pressure and has been optimized for low noise, making it suitable for a wide range of applications. One motor can accommodate a wide voltage range from 200-240V to 380-460V. The pump maintains stable exhaust speed even near atmospheric pressure, making it ideal for repeated continuous operation between atmospheric and vacuum conditions. 【Features】 ○ Equipped with ULVAC's original high-efficiency (IE3) multi-voltage motor ○ One motor can accommodate a wide voltage range ○ Utilizes a forced lubrication system ○ Stable exhaust speed even near atmospheric pressure ○ Options available for special applications → In addition to the standard model, three variants (A specification, B specification, H specification) are available for special applications. For more details, please contact us or download the catalog.

• Vacuum pump

ECO-SHOCK is an attachment that significantly reduces power consumption by being installed on dry pumps. The ES4A is ideal for applications that require frequent evacuation of the loading and unloading chamber, as well as for reducing the power consumption of dry pumps with long operating times at the target pressure, such as turbo molecular pump packs. It also helps to suppress heat generation in dry pumps, thereby reducing the power consumption of air conditioning equipment. 【Features】 - Contributes to energy saving in dry pumps - Effective with volumetric transfer type dry pumps - No decrease in pumping speed across all pressure ranges - Easy to install - Reduces heat generation and power consumption of air conditioning equipment For more details, please contact us or download the catalog.

• Other pumps

At ULVAC, we offer a lineup of power supplies tailored for film deposition equipment, including the optimal DC power supply for plasma loads, "DPG-10/DPG-20," and the RF power supply "RFS-N Series," which achieves compactness and lightweight design with high-efficiency RF amplifiers. 【Product Lineup】 ■ DC Power Supply "DPG-10/DPG-20" ■ EB Power Supply "HPS-N Series" ■ RF Power Supply "RFS-N Series" For more details, please refer to the catalog or feel free to contact us.

• power supply
• Vacuum Equipment
• Vacuum forming machine

This is a clean and highly reliable vacuum transport robot and transport platform that incorporates the technology developed by ULVAC, a manufacturer of vacuum equipment. We offer a wide range of products compatible with various vacuum equipment. 【Product Lineup】 ○ High vacuum compatible robot ELEC-RZ (for φ200mm/300mm wafers) ○ High vacuum compatible robot COVOT (for φ200mm/300mm wafers) ○ High vacuum compatible robot COVOT-LC (for φ200mm/300mm wafers) ○ Medium vacuum compatible independent four-arm robot COVOT-6 (for φ300mm wafers) ○ Vacuum transport platform NCH series (for φ200mm/300mm wafers) For more details, please contact us or download the catalog.

• Transport and handling robots

The EGN series is a metal vapor deposition electron beam evaporation source developed with a focus on improving maintenance. The adoption of a flat-top structure and a 15mm hearth deck reduces the coating area on the electron beam evaporation source, achieving high maintenance efficiency. 【Specifications】 ○ Electron beam deflection angle: 270° ○ Number of crucibles: 6 ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H): 260mm×340mm×144mm ○ Weight: 28kg For more details, please contact us or download the catalog.

• others

The EGP-1G is an electron beam evaporation source for optical film deposition that keeps costs down by adopting a simple 180° beam deflection method. Furthermore, by employing a two-sided positioning structure, it has a model with high beam position reproducibility after maintenance. 【Specifications】 ○ Electron beam deflection angle: 180° ○ Cooling water flow rate: 10L/min ○ Dimensions (W×D×H) excluding protrusions: 185mm×239mm×179mm ○ Weight: 11kg ○ Maximum output: 10kW For more details, please contact us or download the catalog.

• others

The RFS-N series is an RF power supply for plasma processes with output options of 13.56MHz, 0.5kW/1kW/3kW/5kW. It achieves compactness and lightweight design by incorporating a high-efficiency RF amplifier. Additionally, it features a built-in auto-matching controller function, allowing for power control and matching system control with just the main unit. 【Product Lineup】 ○RFS-1305N/1310N ○RFS-1330N/1350N ○MBX-1305N/1310N ○MBX-1330N/1350N For more details, please contact us or download the catalog.

• power supply

The HPS-N series is a power supply compatible with electron beam evaporation sources, designed to stabilize circuits and improve performance based on Ulvac's many years of accumulated technology and achievements. By using it in combination with the EB Gun Controller EGC-10GS, it can support both EB guns for optical thin films and EB guns for metallic thin films. 【Product Lineup】 ○HPS-600N ○HPS-1000N ○EGC-10GS For more details, please contact us or download the catalog.

• power supply

The DPG-10 and DPG-20 are DC power supplies for sputtering with outputs of 10kW and 20kW, respectively. They are composed of reliable components and circuits. This power supply is highly reliable and optimized for plasma loads, reflecting the know-how gained from years of experience in power supply applications. 【Specifications】 ○ Input Voltage: AC208V ○ Variation Range: AC187 – 229V ○ Phases, Frequency: 3-phase, 50/60Hz ○ Input Connection: Connector connection ○ Input Capacity: 13.5kVA or less For more details, please contact us or download the catalog.

• power supply

This is a variety of feedthroughs compatible with ultra-high vacuum using UFC flanges (bakeable flanges with knife-edge type metal seal). The CMS series is for current and voltage, the TDU series is for rotational motion, and the TSU series is for linear motion, all designed to introduce these elements into an ultra-high vacuum chamber without leakage from the atmosphere. The TVU series is a viewport for observing the interior of the ultra-high vacuum chamber from the atmosphere with a wide field of view. 【Product Lineup】 ○ Current feedthrough terminal: CMS series ○ Ultra-high vacuum rotary feedthrough terminal: TDU series ○ Ultra-high vacuum linear feedthrough terminal: TSU series ○ Ultra-high vacuum zero-length viewport: TVU series For more details, please contact us or download the catalog.

• Vacuum Equipment

The UFC series is a bakeable flange compatible with ultra-high vacuum, conforming to the ISO3669-1986 standard, featuring Alback's unique knife-edge metal seal design. We also offer a variety of fittings, copper gaskets, bolt sets, and more that utilize the UFC flange. 【Specifications】 ○ Operating pressure range: Atmospheric pressure to 10^-11 Pa ○ Allowable leak rate: 1.0×10^-11 Pa·m3/s ○ Operating temperature range: -196 to 450°C ○ Normal bake-out temperature: Below 300°C ○ Material: Austenitic stainless steel For more details, please contact us or download the catalog.

• Vacuum Equipment

ULVAC's vacuum valves leverage years of experience and expertise as a specialized manufacturer in vacuum technology. Please utilize ULVAC's vacuum valves, which can accommodate all areas, conditions, and applications, from L-type to gate valves, and from atmospheric pressure to ultra-high vacuum. 【Features】 ○ High reliability ○ Extensive lineup ○ Two drive methods ○ Back pressure specifications ○ Compatible with baking and other customizations available For more details, please contact us or download the catalog.

• valve

The optical process monitor Optius can monitor the status of various plasma processes in real-time by measuring the emission spectrum of the plasma. It is ideal for MFC control in reactive sputtering and endpoint detection in etching. 【Specifications】 ○ Weight: Main unit (TSC): 4.9kg Expansion unit (ESC, 1ch): 1.3kg ○ Power supply: AC100–240V (50/60Hz) ○ Power consumption: 100W (when using 5 channels) ○ Operating environment: Temperature: 10 – 40°C, Humidity: 15 – 80% RH (without condensation) For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Other process controls

The CRTS series is a sensor used for the crystal oscillator-based film deposition controller CRTM series. We offer a wide range of options to be widely used in various deposition devices. The CRTS-M6 is a rotary multi-sensor developed for the crystal oscillator-based film deposition controller CRTM series. It can accommodate six crystals operating at 5MHz or 6MHz, making it suitable for continuous deposition and other applications. 【Product Lineup】 ○ Deposition Sensor CRTS-4 ○ Multi-Sensor CRTS-M6 ○ Multi-Sensor CRTS-12NS For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Coating thickness gauge

The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Coating thickness gauge

The CRTM-6000G is a quartz oscillator-based film deposition controller that excels in cost performance while enhancing the fundamental capabilities required of a film deposition controller. Despite its compact half-rack size, it is capable of low-rate control and continuous deposition control for multilayer films up to 99 layers. 【Specifications】 ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: Approximately 3.6kg ○ Utility: AC85 ～ 230V 50/60Hz ○ Power Consumption: 30W Max ○ Operating Environment: Temperature: 5 ～ 40℃, Humidity: 5 ～ 95% RH (without condensation) For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Coating thickness gauge

The UNECS series is a spectroscopic ellipsometer that measures film thickness and refractive index with high speed and high precision. It employs a unique measurement method that achieves fast measurements and compact design. We offer a wide range of models to suit various applications, including a unique portable type, automatic stage types, and built-in types compatible with vacuum environments. 【Specifications】 ○ High-speed measurement → Achieves high-speed measurements as fast as 20ms by adopting a unique snapshot method. ○ Visible spectroscopy compatible → The wavelength range can be selected from standard type (530nm to 750nm) and visible spectroscopy type (380nm to 760nm). ○ Compact sensor unit → The light receiving and emitting sensors are composed solely of optical elements without rotating mechanisms, making them very lightweight and compact, with no need for regular maintenance. ○ Rich lineup → In addition to the unique portable type, we offer a variety of models to accommodate diverse applications, including manual/automatic stage types, large substrate types, and built-in types compatible with atmospheric/vacuum environments. For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The HELIOT900 series is a leak detector with a high exhaust speed and excellent convenience. It guarantees the best performance in all leak testing scenarios. The maintenance panel can be easily removed, allowing for easy access to various components, and it also features a work procedure explanation screen. 【Specifications】 ○ Input Voltage [V] 100-120 or 200-240 ○ Test Port Shape NW25 (ISO) ○ Startup Time [min] <2 ○ External Interface RS232C, RS485, Analog DC Output, Digital Input/Output ○ Display Languages Japanese, English, Korean, Chinese (Simplified), Chinese (Traditional), German, Spanish For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Leak Testing Equipment

The differential exhaust system kit equipped quadrupole mass spectrometer (Qulee with YTP) has realized enhanced functionality and ease of use, tailored to customer needs, based on the extensive track record of Alback's Qulee. It can be widely utilized for process management of various vacuum equipment, residual gas analysis, and R&D. 【Specifications】 ○ Gas analyzer main unit: Choose from Qulee BGM-101/102/201/202, HGM-302 ○ Maximum sampling pressure: Choose from atmospheric pressure / 3000Pa / 500Pa / 100Pa / 10Pa / 1Pa ○ Gas introduction system (500 to 1Pa specifications): Manual bellows valve (2 systems) and connection flange UFC070 ○ Software: Qulee QCS Ver. 3.1 or later (compatible with Windows 7/8) For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Analytical Equipment and Devices

ULVAC's residual gas analyzers/process gas monitors, the "Qulee" series, offer a variety of options. You can make effective use of Qulee with features such as the automatic measurement start function added to the "Qulee QIP," jacket heaters, and carrying cases. 【Specifications】 [Jacket Heater] ○ Power Supply: AC100V, 100W (CGM-JH01 / CGM-JH02), AC100V, 100W (BGM-JH01) ○ Size (approximate dimensions when installed): φ90×120 (CGM-JH01 / GM-JH02), φ90×250 (BGM-JH01) ○ Weight: 280g (CGM-JH01), 270g (CGM-JH02), 470g (BGM-JH01) ○ Connection Cable: Heat-resistant coated 2-core cable, length 1m ○ Plug Type: Flat 2-core plug For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

AxTRAN is a thermal cathode ionization vacuum gauge that features a Bessel-Box type energy filter placed between the ion source and the ion collector. By reducing residual currents caused by soft X-rays and ESD ions, it achieves a measurement resolution of 0.5x10^-10 Pa. It is ideal for pressure measurement in vacuum devices such as high-energy accelerators. 【Specifications】 ○ Operating temperature range: 10 to 40°C ○ Operating humidity range: 15 to 80% (without condensation) ○ Power supply voltage: AC85 to 240V ○ Dimensions: W×D×H 240mm×350mm×99mm ○ Weight: 5.3kg For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The GP-G series is a constant temperature Pirani vacuum gauge that utilizes the thermal conductivity of gases. It uses platinum (Pt) as the filament material, making it resistant to breakage even at atmospheric pressure. This versatile vacuum gauge allows for easy measurement of pressure in low vacuum regions. Additionally, with set points, it can be used for controlling various interlocks and exhaust sequences. 【Product Lineup】 ○ GP-1000G ○ GP-2001G ○ GP-2002G ○ GP-1GRY (A) ○ GP-1G, and others For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The sensor unit SP1 is a Pirani vacuum gauge that can measure from 3000 Pa to 0.4 Pa, featuring an integrated measuring element WP series and circuit section. This vacuum gauge eliminates the operation and display section from conventional controllers, focusing on the minimum necessary functions, which enables "cost reduction" and "space saving." 【Specifications】 ○ LED display: Power, Error, Set Point 1/2 ○ Power supply voltage: DC 24V ± 2V, 90mA (Max.) ○ Input/output connector: D-sub-15P (M2.6 screw) ○ Body weight: 190g (excluding measuring element) ○ Accessories: 1 set of input/output connectors, 1 instruction manual For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The G-TRAN series SAU pressure sensor unit is a pressure sensor unit that employs a semiconductor thin-film element capable of accurately measuring near atmospheric pressure (gauge pressure: -100 kPa to 10 kPa). It is also capable of continuous operation under high vacuum conditions, and the material of the inner surface is made of corrosion-resistant SUS316L. 【Specifications】 ○ Pressure reference: Gauge pressure ○ Measurement pressure range: -100 to 10 kPa (gauge pressure) ○ Measurement accuracy: ±3% F.S. ○ Temperature characteristics: ZERO ±0.2% F.S./℃ 　　　　　　SPAN ±0.1% F.S./℃ ○ Repeatability: ±2% F.S. For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Sensors

The Titanium Getter Pump (GGT-3, PGT Series) is a unit designed to directly electrify titanium alloy in a vacuum to sublime titanium. The sublimated titanium creates a large active metal surface on the surrounding walls, adsorbing and exhausting chemically active gases (H2, N2, O2, H2O, CO, CO2). The active metal surface of titanium does not have adsorption capability for inert gases (He, Ne, Ar, CH4, C2H6, and other organic gases), so it is used in combination with turbo molecular pumps and sputter ion pumps. 【Features】 ○ By selecting the adsorption area of the sublimated titanium according to the system design, a high exhaust speed can be achieved, improving the ultimate pressure performance. ○ The T-connection flange section features a knife-edge type metal seal (UFC), allowing for bakeout up to 250°C. ○ All constituent materials are treated with surface processing suitable for ultra-high vacuum. For more details, please contact us or download the catalog.

• Vacuum pump

ULVAC's PBL type oil diffusion ejector pumps are designed and manufactured utilizing years of research and extensive production experience. They are used in numerous high vacuum production facilities and are highly regarded for their practical performance. The large pumps of models PBL-06 to PBL-20 have pipe heaters directly immersed in the operating oil, which particularly enhances thermal efficiency. 【Product Lineup】 ○PBL-02 ○PBL-04 ○PBL-06 ○PBL-10 ○PBL-14 For more details, please contact us or download the catalog.

• Vacuum pump

This is a turbo molecular pump with a composite wing design that employs digital 5-axis controlled magnetic bearings. The UTM-FH and UTM-FW achieve advantages such as high functionality, high reliability, and energy-saving capabilities due to the adoption of digital 5-axis controlled magnetic bearings. The FH series is designed for light to middle processes with high back pressure and high compression ratios, while the FW series is suitable for wide-range, high-flow applications for high-load processes and middle to hard processes. 【Features】 ○ Equipped with monitoring and self-diagnosis functions, as well as communication capabilities, enabling compatibility with centralized management systems through digitalization. ○ Incorporates a coupling-free system, allowing operation in combination with registered pump bodies using a single power supply by switching models. ○ Features a speed variable system, allowing exhaust speed to be adjusted within a range of 25% to 100%. ○ With excellent corrosion-resistant surface treatment, special surface treatment and internal heating systems are available as options for more demanding processes (FW series). ○ Adopts a destructive energy absorption structure, designed for high safety by minimizing equipment damage during malfunctions. For more details, please contact us or download the catalog.

• Vacuum pump

The YTP series is an exhaust unit capable of evacuating from atmospheric pressure to high vacuum, using the turbo molecular pump UTM series, which employs "pivot bearings + magnetic bearings (permanent magnets)." It is available in two types: the SA type, which can be automatically evacuated with a START/STOP switch, and the manual operation M type. 【Features】 ○ Two types available: automatic operation type (YTP-SA series) and manual operation type (YTP-M series), with four selectable exhaust speeds ○ In the event of a power outage, the fore valve automatically closes and the rotary pump is automatically vented → Even after power is restored, the exhaust unit will not operate ○ The saturation vapor pressure of the fluorinated oil used in the turbo molecular pump is around 10^-11 Pa (at 20°C), making it virtually oil-free ○ The turbo molecular pump uses high-performance bearings, eliminating the need for troublesome oil changes or bearing replacements For more details, please contact us or download the catalog.

• Vacuum pump

The UTM series is a full-wing turbo molecular pump that employs pivot bearings (lower) and magnetic bearings (upper). By adopting pivot bearings, it eliminates mechanical contact during high-speed rotation, achieving low vibration and high compression ratios. It features high-performance bearings that are different from conventional bearing types, offering excellent characteristics. 【Product Lineup】 ○UTM-50 ○UTM-150 ○UTM-300 ○UTM-500 For more details, please contact us or download the catalog.

• Vacuum pump

The UTM300B is a turbo molecular pump with a composite wing design that uses ceramic ball bearings. The integration of the controller and pump achieves space-saving. Its excellent high back pressure characteristics also enable the miniaturization of auxiliary pumps. 【Product Lineup】 ○ UTM300B (ISO flange type) ○ ISO100-K flange type ○ VG100 flange type ○ ICF152 flange type For more details, please contact us or download the catalog.

• Vacuum pump

The YMV series is a frame unit designed to combine mechanical booster pumps and oil-sealed rotary vacuum pumps. Four types of frame units are available to match the pump displacement. The independent frame design emphasizes pump maintainability, making it ideal for use in production facilities. 【Lineup】 ○YMV-01A ○YMV-03A ○YMV-06A For more details, please contact us or download the catalog.

• Vacuum pump

The mechanical booster pump can be used in combination with dry pumps, oil-sealed rotary vacuum pumps, and water-sealed pumps to increase the pumping speed in the range of 10k to 0.1Pa, where the exhaust speed of the roughing pump decreases. The PMB Series Ver.D is a versatile mechanical booster pump that can also be selected with a multi-voltage motor. Additionally, it can operate with air cooling as an option, and surface treatment and atmospheric pressure drive types are also available. 【Product Lineup】 ○PMB100D ○PMB300D ○PMB600D ○PMB1200D ○PMB2400D For more details, please contact us or download the catalog.

• Vacuum pump

When starting an oil rotary vacuum pump or working in low vacuum, the oil from the pump is discharged along with the exhausted gas as oil mist or oil droplets. By using the TM/TMX series, a clean working environment can be achieved without contaminating the indoor equipment and atmosphere with such oil droplets or oil mist. 【Product Lineup】 ○ TMX-1 ○ TM201 ○ TM401 ○ TM-2 (Standard, F) ○ TM-3 (Standard, F) and others For more details, please contact us or download the catalog.

• Vacuum pump

The PKS series is a very robust large oil rotary vacuum pump with stable exhaust characteristics. It can be used in a wide range of applications, including the metal and automotive industries, as well as the chemical, pharmaceutical, and food industries. Disassembly and assembly are extremely easy, and inspecting the exhaust valve is also straightforward. 【Product Lineup】 ○PKS-016 ○PKS-030 ○PKS-070 For more details, please contact us or download the catalog.

• Vacuum pump

The PVD series is a compact oil rotary vacuum pump that has been a mainstay for many years, widely used by customers due to its reliability and ease of use. It is a two-stage rotary vane pump that excels in achieving low pressure, making it suitable for a wide range of applications. 【Features】 ○ Belt-driven compact oil rotary vacuum pump (rotary pump) ○ Excellent exhaust characteristics For more details, please contact us or download the catalog.

• Vacuum pump

The VS650A/VS750A is a single-stage vane type (rotary wing type) oil rotary vacuum pump. It offers a large exhaust capacity and stable exhaust performance, and its low vibration helps reduce the burden associated with pump installation for foundation work. Additionally, you can choose between air cooling and water cooling, so please select according to your installation environment. 【Product Lineup】 ○VS650A-A ○VS650A-W ○VS750A-A ○VS750A-W For more details, please contact us or download the catalog.

• Vacuum pump

ECO-SHOCK is a revolutionary attachment that can significantly reduce the power consumption of your currently used dry pump by installing it on the dry pump. It is ideal for dry pumps used in inert gas exhaust applications. 【Features】 - Can reduce the power consumption of dry vacuum pumps by up to 80% - No decrease in exhaust speed across all pressure ranges - Easy to install For more details, please contact us or download the catalog.

• Vacuum pump

The LR/HR/UR series has achieved high durability in hard processes such as CVD and dry etching through the effective utilization of compression heat, thanks to its unique high-temperature uniform heating technology. In light processes, it is possible to reduce power consumption by up to approximately 70% in combination with ECO-SHOCK. Additionally, it improves maintainability and reduces noise, and all models are CE compliant (optional). 【Product Lineup】 ○ LR/HR60 ○ LR/HR90 ○ LR180 ○ LR421 ○ LR421-T, etc. For more details, please contact us or download the catalog.

• Vacuum pump

The GR Series dry vacuum pumps are designed with a simple structure for general industry, based on the proven and reliable LR and HR series. They can be used for high-load applications such as repeated exhaust from atmospheric pressure to vacuum and continuous operation in high-pressure areas. They are ideal for exhausting load lock chambers that require high throughput. 【Product Lineup】 ○ GR60A ○ GR90A ○ GR180A For more details, please contact us or download the catalog.

• Vacuum pump

The CR series dry vacuum pumps are air-cooled, roots-type dry vacuum pumps. They do not use oil in the exhaust chamber, and the rotor and cylinder operate without contact, allowing for stable operation over long periods. No cooling water or nitrogen gas is required, contributing to reduced running costs. 【Product Lineup】 ○ CR16A ○ CR30A ○ CR60A ○ CR300A For more details, please contact us or download the catalog.

• Vacuum pump

ULVAC has developed and commercialized the transducer-type "G-TRAN Series Multi-Ion Gauge" (patent pending), which allows for the connection of measuring elements with different measurement ranges. In conventional multi-principle vacuum gauges, we often hear customer feedback such as "a failure of one measuring element requires the complete replacement of all measuring elements," "the measuring elements are complex and prone to failure," and "the measuring elements are expensive." With this new approach, we can enable wide-range measurements while significantly reducing running costs and addressing low environmental impact. 【Product Lineup】 ○SH2-1 Standard Specification ○SH2-2 Serial Communication Specification For more details, please contact us or download the catalog.

• Pressure

The Qulee RGM-202/RGM-302 is a process monitor equipped with a differential exhaust system that supports reactive processes such as etching and CVD in the Qulee series. Thanks to ULVAC's unique ion source and exhaust system structure, it offers excellent corrosion resistance to reactive gases and enables stable measurements over long periods. 【Specifications】 ○ Mass: Exhaust system: 57 kg / Control system: 38 kg ○ Power supply voltage: AC100V 15A ○ Compressed air: Dry N2: 0.4 to 0.7 MPa (φ6 quick connector) ○ One Click function: Yes / He/H2O/N2/O2/Any gas ○ PC interface: RS-232C/485 For more details, please contact us or download the catalog.

• Analytical Equipment and Devices
• Other measurement, recording and measuring instruments