シグマ光機 List of Products and Services

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.

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This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

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This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control. It can operate with a 50mm stroke at a resolution of 5nm.

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This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in linear scale developed in-house, providing high-precision repeat positioning performance through full closed-loop control. It can operate with a 40mm stroke at a resolution of 5nm.

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Since the positioning stage is equipped with outgassing countermeasures, it can be directly introduced into the vacuum chamber. It features full closed-loop control based on the position information from the built-in optical linear encoder, providing high-precision repeatability in positioning performance. It can operate with a 20mm stroke at a resolution of 5nm.

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A stage was created with components that do not outgas for use in a vacuum. Therefore, the stage can be introduced into the vacuum chamber. It features full closed-loop control based on the positional information from an embedded optical linear encoder, providing high-precision repeatability in positioning. It can operate with a 50mm stroke at a resolution of 10nm.

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This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. It features full closed-loop control based on the positional information from an integrated optical linear encoder, providing high-precision repeatability in positioning performance. It can operate with a 40mm stroke at a resolution of 10nm.

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This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, resulting in high-precision repeatability in positioning. It can achieve positioning with a 20mm stroke and a resolution of 10nm.

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This is a vacuum-compatible feedback stage equipped with outgassing countermeasures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, providing high-precision repeat positioning performance. With a movement range of 100mm, it allows for sample movement and precise positioning with a single unit, making it effective when a wide range of data (such as spectra) is required.

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This is a high-resolution Z-axis positioning stage equipped with an optical linear encoder. It offers a resolution of 10nm with stroke options of 5mm or 10mm. It has been designed to mitigate outgassing, making it usable in a vacuum. The structure minimizes changes in the tilt of the table surface, and with our proprietary linear encoder and unique feedback control circuit, it provides high resolution, excellent positioning repeatability, and position retention after positioning.

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This is a high-resolution micro-rotation stage equipped with an optical linear encoder. It has a resolution of 0.00001° and a stroke of ±4°. It has been treated for outgassing and can be used in a vacuum. It is suitable for adjusting the rotation direction.

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The stage position is detected using a built-in optical linear encoder, enabling full closed-loop control, which results in high resolution and excellent position reproducibility. It has been treated for outgassing and can be used in a vacuum. It can operate within a range of 100mm, with a resolution of "50nm" or "100nm" depending on the controller.

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It is driven using a stepping motor and ball screw, which provides excellent position holding capability. The built-in optical linear encoder detects the stage's position and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. It has been treated for outgassing and can be used in a vacuum. It can operate within a range of 50mm with a resolution of either 50nm or 100nm (depending on the controller).

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The built-in optical linear encoder detects the position of the stage and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position holding capability. Due to the use of components that are less likely to outgas in the vacuum chamber, the stage can be placed inside the vacuum chamber. It can operate within a range of 40mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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The built-in optical linear encoder detects the position of the stage table and feeds the position information back to the controller, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position retention. As a countermeasure against outgassing, lubricants, wires, and motors have been replaced with vacuum-compatible products, allowing for use within a vacuum chamber. It can operate within a range of 20mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.

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You can operate the stage controller (manufactured by Sigmatech) of the positioning device at your fingertips. In addition to stage movement via jogging, you can execute the programmed actions (teaching function) stored in the controller.

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An optical linear encoder is built into the center of the stage to reduce position detection errors, and by feeding back position information to the controller, it achieves high resolution, high positioning repeatability, and position holding capability after positioning. The stroke is '100mm' with a resolution of '10nm' (*1). Due to the long operating range, both movement and positioning can be performed with this single stage. (*1) In combination with the feedback stage controller FC-511.

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This is a high-resolution positioning stage for the Z-axis equipped with an optical linear encoder. It achieves a resolution of "10nm" with a stroke of "5mm" or "10mm." Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis applications. With our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) In combination with the feedback stage controller FC-511.

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This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 20mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-111 or FC-411.

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This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. By reading the position with a self-developed encoder and performing feedback control, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm'. When combined with the FC-111, it operates with a resolution of '100nm'. The stroke is '40mm'.

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This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-411 or FC-111.

• Other FA equipment

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.

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This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It features a self-developed linear encoder and a proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. The stroke is '150mm' with a resolution of either '50nm' or '100nm' (*1). Due to the long stroke, it can perform both sample movement and precise positioning with just this one unit. (*1) In combination with the feedback stage controller FC-411 or FC-111.

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This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis systems, and, combined with our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

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This is a positioning stage for minute rotations with a stroke of '±4°' that incorporates an optical encoder. It allows for feedback control with a minimum step increment of '0.00005°' (*1) or '0.0001°' (*2). Thanks to our proprietary feedback control circuit, it features high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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This is a high-resolution long-stroke positioning stage equipped with an optical linear scale, which reduces detection errors. It has a stroke of "200mm," "300mm," or "400mm" with a resolution of "50nm" (*1) or "100nm" (*2). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It has a resolution of "5nm" (*1) and a stroke of "20mm." Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 40mm with a resolution of 5nm (*1). Due to the combination of our self-developed linear scale and our unique feedback control circuit, it performs full closed-loop control, ensuring high resolution, high positioning reproducibility, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 5nm (*1). Thanks to our proprietary linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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• Other microscopes

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It performs feedback control based on the encoder's position information, offering high resolution, high positional reproducibility, and high positional stability. When used in combination with the feedback stage controller FC-511, it operates with a resolution of 10nm over a stroke of 20mm.

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This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-511, it can operate with a reading resolution of '10nm' over a '40mm' stroke.

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This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

• Other FA equipment
• Other microscopes