シグマ光機 List of Products and Services

This holder features a thin hollow frame structure that provides high rigidity while also having the characteristic of quickly reaching thermal equilibrium. It is optimized for applications such as interferometric measurements and precise measurements.

• Laser Components
• Other optical parts

The "Laser Shield Curtain YLC-1Plus/YLC-2AL" is a film that protects the human eye from scattered laser light by being applied to windows, door glass, and partitions in laser-controlled areas. Made of soft PVC, it is flexible and can be easily cut to the desired size using a cutter or scissors. It excels in anti-static and flame-retardant properties, and since it uses a water-based application without adhesives, it can be reapplied if misaligned. 【Features】 ■ Ensures high visibility through improved surface accuracy and visible light transmittance ■ Visible light transmittance is standard 40% (YLC-1) and standard 30% (YLC-2A) ■ Available in widths of 1m and lengths ranging from 0.5 to 10m *For more details, please refer to the materials. Feel free to contact us with any inquiries.

• others

We offer a wide variety of "laser protection glasses" that can be selected according to laser wavelength, output, and usage form. We provide support for appropriate product selection based on customer needs, and we can also lend out sample products to check for fit. ■ Over-glass type "YL-780" and "YL-780G" - Can be used in conjunction with corrective glasses - Equipped with two types of nose bridges to minimize gaps - Anti-fog treatment ensures clear visibility The "YL-780G" series features - "Tempered glass" lenses with high transparency and good visibility ■ Over-glass type "YL-717" - Can be worn over corrective glasses - Adjustable ear hook lock rubber improves fit *If you are having trouble with selection, please download the "Inquiry Sheet," fill in the laser specifications, and send it via email or fax. A representative will contact you by email or phone.

• Other safety and hygiene products
• Glasses and goggles

It can block light over a wide range (1,000mm) and excels in anti-static and fire-resistant properties. Made of soft PVC, it can be easily cut with a cutter or scissors, allowing customers to process it to their desired size. High visibility is ensured by improving surface accuracy and visible light transmittance. Since it is water-applied without the use of adhesives, it is flexible and can be repeatedly used to fit various shapes.

• Other safety and hygiene products

High visibility is ensured by improving surface accuracy and visible light transmittance. Since it uses water adhesion without adhesives, it is flexible and can be repeatedly used to fit various shapes.

• Other safety and hygiene products

Please make use of "Comprehensive Catalog 02," which features a wide range of products from basic items to highly specialized products.

• Other optical parts
• lens
• Optical Experimental Parts

This is the comprehensive catalog for our high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) that we design, manufacture, and sell. It covers specifications, configurations, prices, and more for feedback stages, feedback stage controllers, cables, and options. We also accept orders for custom and special products. Please feel free to consult us. 【Features of Atmospheric Systems】 We develop, manufacture, and sell compact positioning devices with built-in linear scales. They are used in semiconductor-related equipment, communication-related applications, and optical systems for advanced research. 【Features of Vacuum-Compatible Systems】 Since our establishment, we have leveraged the know-how gained from producing custom products to provide high resolution and high precision reproducibility for vacuum applications. *You can view the comprehensive catalog by downloading the PDF. Please feel free to contact us via the inquiry form for any requests. Additionally, the link below introduces examples of custom product manufacturing.

• Other FA equipment

A stage used in various fields such as information communication, semiconductors, and biotechnology. The "Q&A you want to know at the time of selection" provides essential information for those considering a precision positioning stage or currently using one and requiring more precise operation, presented in a Q&A format. 【Examples of Q&A】 ■What are the sizes of the stage and stroke? ■What is an easy way to communicate? Is it possible to connect with a sequencer? ■What is the difference between an open stage and a feedback stage? ■How long does positioning take? ■Where is it used?… *For details, please request materials or view the PDF data from the download.

• Other machine elements
• Other processing machines

Comprehensive catalog of high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) designed, manufactured, and sold by Sigma Tech. It covers specifications, configurations, prices, and options for feedback stages, feedback stage controllers, and cables. Please feel free to consult us about anything related to positioning. ■ Features and Description of Atmospheric Systems We develop, manufacture, and sell compact positioning devices equipped with linear scales. These are used in semiconductor-related equipment, communication-related applications, and advanced research optical systems, and we respond to customer needs based on our expertise. ■ Features and Description of Vacuum-Compatible Systems Based on the know-how gained from custom solutions since our founding, we provide high resolution and high precision reproducibility for vacuum applications. For more details, please download the catalog or contact us.

• Other FA equipment

An ultra-precision positioning device (feedback stage system) has achieved 1nm resolution and ±2nm reproducibility for optical linear encoders. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capabilities." The available strokes are up to "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices
• Other FA equipment

■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with a resolution of 5nm, and the position is read by an optical linear encoder integrated into the stage, enabling high resolution and excellent reproducibility through feedback control. ■Long Stroke Due to the ball screw drive, a maximum movement of 50mm is possible. This allows for precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device.

• Other microscopes
• Other inspection equipment and devices

■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with a resolution of 10nm, and the optical linear encoder integrated into the stage reads the position for feedback control, resulting in high resolution and excellent reproducibility. ■Long Stroke It can move up to 200mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lifting types and micro-rotation options. For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices

■High Resolution and Reproducibility The built-in motor driver in the controller allows the stage to operate with sub-micron resolution, and the optical linear encoder integrated into the stage reads the position and performs feedback control, resulting in high resolution and excellent reproducibility. The stage controller operates at a resolution of either 100nm (0.1μm) or 50nm (0.05μm). ■Long Stroke It can move up to a maximum of 400mm. This enables precise positioning and sample retraction with a single stage. ■Control The controller is equipped with several communication interfaces, allowing the stage to be controlled by inputting command strings from a PC or similar device. ■Movable Type In addition to linear motion, we also offer lift types and micro-rotation options. For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices

A super-precise positioning device (feedback stage system) has achieved a resolution of 1nm and a reproducibility of ±2nm with respect to optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capabilities." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices
• Other FA equipment

An ultra-high-resolution positioning device (feedback stage system) has achieved a resolution of 5nm and a reproducibility of ±10nm for optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices
• Other FA equipment

A precision positioning device (feedback stage system) that achieves a resolution of 10nm and a reproducibility of ±20nm with an integrated optical linear encoder. It can be used in a vacuum chamber with a vacuum level of up to 10^-4 Pa. Compared to positioning devices that use piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices
• Other FA equipment

A precision positioning device (feedback stage system) has achieved reproducibility with sub-micron resolution (0.1μm or 0.05μm) using an optical linear encoder built into the stage. It can be used within a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is widely used due to its "low cost," "easy control," and "large stroke capability." The stroke ranges from 20mm to 100mm. If you are facing issues with positioning, please feel free to contact us. For more details, please download the catalog or contact us.

• Other microscopes
• Other inspection equipment and devices
• Other FA equipment

This device consists of a stage and controller that incorporate a uniquely developed linear encoder. The reading values from the stage's encoder have a resolution of 1nm to 100nm after amplification processing. The movable range is from 20mm to 300mm (the lineup varies depending on the resolution). The controller is equipped with a feedback circuit and motor driver, allowing for feedback control of the stage. It features various communication interfaces, enabling command control from a PC or similar devices. We also offer vacuum-compatible products. We have a track record of manufacturing wafer positioning stages tailored to the size of vacuum chambers.

• Other physicochemical equipment
• Other optical parts
• Actuator

Comprehensive catalog of high-resolution positioning devices for atmospheric use and vacuum-compatible high-resolution positioning devices (feedback stage systems) designed, manufactured, and sold by Sigma Tech. It covers specifications, configurations, prices, and options for feedback stages, feedback stage controllers, and cables. Please feel free to consult us about anything related to positioning. ■ Features and Description of Atmospheric Systems We develop, manufacture, and sell compact positioning devices equipped with linear scales. We have been achieving nano positioning since before the term nanotechnology was coined. Based on that know-how, we respond to our customers' needs. ■ Features and Description of Vacuum-Compatible Systems Since our founding, we have gained know-how in vacuum compatibility through custom solutions, providing high resolution and high precision reproducibility for vacuum applications. For more details, please download the catalog or contact us.

• Other FA equipment

Feedback refers to a system that monitors position information from a linear scale through closed-loop control to improve the reproducibility of positioning. The feedback stage system is composed of a linear scale, a stage, and a controller. The selection guide introduces methods for selecting stages based on three points: "operating type," "resolution," and "stroke," tailored to the customer's specifications. 【Features of the Feedback Stage Controller】 - Full closed-loop control - Built-in motor driver - Various error detection functions - Communication via RS-232C standard / GPIB For more details, please contact us or download the catalog.

• Other process controls

A high-resolution positioning stage with an optical linear scale built into the center of the stage to minimize detection errors. It allows for precise positioning over a long stroke (150mm) in increments of 10nm. Due to its long stroke, it is suitable for creating optical delays in optical experiments. With our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning reproducibility, and stability after positioning. *In combination with the feedback stage controller FC-511. For more details, please contact us or download the catalog.

• Other FA equipment
• Actuator

[Features of the New Feedback Stage Controller] While maintaining compatibility with conventional products, it has become multifunctional due to additions such as: - Increased number of communication commands - Added teaching function - Added USB interface - Increased number of parameters This allows for better understanding of the feedback stage's status and the ability to set detailed parameters. [Features of the High-Resolution Positioning Device] It consists of a feedback stage and the new feedback stage controller. By using the position information detected by the built-in linear encoder in the feedback stage for feedback control, high resolution and high reproducibility are achieved. [Benefits of Implementation] - Improved work efficiency due to high positioning reproducibility - Fine adjustments possible due to high-resolution operation - Movement and fine adjustments of samples can be performed with one feedback stage due to the long range of motion For more details, please contact us or download the catalog. □ A Q&A collection that helps in stage selection can be downloaded for free from the link below. □

• Other inspection equipment and devices
• Other microscopes
• Other semiconductor manufacturing equipment

Sigma Tech Co., Ltd. is a company located in Hannō City, Saitama Prefecture, engaged in the manufacturing and sales of precision position detectors, as well as precision positioning equipment. We offer products such as the "High-Resolution Feedback Stage System," which incorporates an optical linear scale within the stage and features a unique feedback circuit, as well as the "Vacuum-Compatible Feedback Stage System." 【Business Activities】 ■ Manufacturing and sales of precision position detectors ■ Manufacturing and sales of precision measuring instruments ■ Manufacturing and sales of precision positioning equipment ■ All operations related to the above items *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other FA equipment

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.

• Other FA equipment
• Other microscopes

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.

• Other FA equipment

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.

• Other FA equipment

This is a stage with a transparent hole in the table section, as shown in the custom stage example. The table size, the size of the transparent hole, and the stroke can be modified. High reproducibility can be achieved through feedback control using an integrated linear scale.

• Other FA equipment

It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by a controller. It is a slim model in the direction of movement. Benefits of being slim: - Space-saving with a long stroke - Ensures space for the reference plate - Compact design for inspection equipment

• Other inspection equipment and devices
• controller
• Other laboratory equipment and containers

It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by the controller. This is a custom example of a slim model in the direction of travel. Benefits of being slim: - Space-saving with a long stroke - Securing space on the reference plane - Miniaturization of inspection equipment

• Other inspection equipment and devices
• Electron microscope

The 1nm feedback stage can be controlled with a resolution of 1nm. Feedback (full closed-loop) control is performed based on the values from the linear encoder within the stage. Communication control can be achieved via commands, allowing for easy construction of a positioning system.

• Other inspection equipment and devices
• controller
• Other optical parts

It can be used as a 5nm resolution positioning device in combination with a 5nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other FA equipment

It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other microscopes
• Other FA equipment

It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Therefore, it is used in precision inspections and research where reproducibility is required. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other microscopes
• Other FA equipment

It can be used as a positioning device with 50nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, ensuring high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other microscopes
• Other FA equipment

It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. The FC-514 is compatible with slow-down sensor signals and ORG sensor signals. The 10nm feedback stage is equipped with a slow-down sensor on the long-scale type stage, enabling high-speed positioning of long strokes with high resolution, which can expand the range of measurement data. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other microscopes
• Other FA equipment

It can be used as a positioning device with 50nm resolution when combined with a submicron feedback stage. Feedback (full closed-loop) control is performed based on the position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. The FC-414 supports signal input from slow-down sensors and ORG sensors. This controller is used when employing a long-scale submicron feedback stage. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other microscopes

It can be used as a positioning device with 100nm resolution in combination with a submicron feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, ensuring high resolution and excellent reproducibility. The FC-114 is compatible with signal inputs from slow-down sensors and ORG sensors. This controller is used when employing a long-scale submicron feedback stage. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

• Other inspection equipment and devices
• Other microscopes
• Other FA equipment

It is equipped with an optical linear encoder, allowing positioning with a resolution of '1nm' against the reading value of the built-in scale. The stroke is '20mm' long, enabling both transport and precise positioning with a single unit. It is used in research fields that handle wavelengths on the nanometer order.

• Other FA equipment

This is a precision positioning stage that incorporates an optical linear encoder, enabling closed-loop control with a resolution of '1nm' for the readings from the built-in scale. It has a long stroke of '40mm', allowing for both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

• Other FA equipment

This is a precision positioning stage that incorporates an optical linear encoder, allowing for closed-loop control with a resolution of '1nm' based on the reading values of the built-in scale. The stroke is '50mm', enabling both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

• Other FA equipment

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 20mm with a resolution of 1nm (*1). Thanks to our self-developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1020SPX(MD) and the high-speed type is FS-1020UPX. (*1) In combination with the feedback stage controller FC-911.

• Other FA equipment

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a resolution of "1nm" and a stroke of "40mm." Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1040SPX(MD) and the high-speed type is FS-1040UPX. (*1) In combination with the feedback stage controller FC-911.

• Other FA equipment

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, which reduces detection errors. It has a stroke of 50mm with a resolution of 1nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1050SPX (MD) and the high-speed type is FS-1050UPX. (*1) In combination with the feedback stage controller FC-911.

• Other FA equipment

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

• Other FA equipment

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controller FC-514.

• Other FA equipment